Structure and performance of piezoelectric piston gas compressor with flexible drive

Jian-tao WANG; Ding-xuan ZHAO; Hao-ren YANG; Shuai CAI; Qian-cheng ZHANG

doi:10.37188/OPE.20202810.2267

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Structure and performance of piezoelectric piston gas compressor with flexible drive

Micro/Nano Technology and Fine Mechanics | 更新时间：2020-11-16

- Structure and performance of piezoelectric piston gas compressor with flexible drive
- Optics and Precision Engineering Vol. 28, Issue 10, Pages: 2267-2275(2020)
- 作者机构：
  
  1.燕山大学车辆与能源学院, 河北秦皇岛 066004
  2.燕山大学机械工程学院, 河北秦皇岛 066004
  3.燕山大学机械工程博士后流动站, 河北秦皇岛 066004
- 作者简介：
- 基金信息：
- DOI：10.37188/OPE.20202810.2267
  CLC： TH321
- Received：02 March 2020，
  
  Revised：20 April 2020，
  
  Accepted：20 April 2020，
  
  Published：25 October 2020
- 稿件说明：
移动端阅览
Jian-tao WANG, Ding-xuan ZHAO, Hao-ren YANG, et al. Structure and performance of piezoelectric piston gas compressor with flexible drive[J]. Optics and precision engineering, 2020, 28(10): 2267-2275.
DOI：

Jian-tao WANG, Ding-xuan ZHAO, Hao-ren YANG, et al. Structure and performance of piezoelectric piston gas compressor with flexible drive[J]. Optics and precision engineering, 2020, 28(10): 2267-2275. DOI： 10.37188/OPE.20202810.2267.

摘要

为了提高容积式压电流体驱动器的气体驱动能力，提出了一种柔性驱动式压电活塞气体压缩机，并从理论与试验两个方面对气体压缩机的工作特性进行研究。建立了柔性支撑压电振子的振动模型，并通过仿真获得了驱动频率及电压对压电振子振动特性的影响规律。将柔性支撑压电振子与活塞式泵腔结合，构造一种柔性驱动式压电活塞气体压缩机，建立气体压缩机的流量及压力计算模型，获得腔高和活塞振幅等参数对压缩机输出性能的影响规律。结果表明，利用系统共振原理可以提高压缩机的气体驱动性能，同时存在最佳的系统结构参数使压缩机性能最优。在此基础上进行相关试验，试验结果表明：压缩机的气体输出流量和压力与驱动电压近似成线性关系，且受驱动频率影响明显，当系统工作在共振状态时系统输出性能最佳。设定压电振子的驱动电压为220 V，此时测得压缩机的气体输出流量和压力分别为190 mL/min和20.3 kPa。

Abstract

In this paper

a piezoelectric piston gas compressor with a flexible drive is proposed to improve the gas driving capacity of a volumetric piezoelectric fluid driver. The operation characteristics of the gas compressor are theoretically and experimentally studied. A vibration model of the flexible support piezoelectric vibrator is developed. The effects of driving frequency and voltage on the vibration characteristics of the piezoelectric vibrator are analyzed through simulations. The flexible support piezoelectric vibrator is combined with a piston pump cavity to construct a piezoelectric piston gas compressor with a flexible drive. A flow-pressure calculation model of the gas compressor is developed to analyze the influences of cavity height and piston amplitude on the compressor output performance. The system resonance principles can improve the gas drive performance of the compressor. In addition

certain structural parameters of the system can optimize the compressor performance. Test results show that the gas output flow and pressure of the compressor are approximately linearly related to the driving voltage and significantly affected by the driving frequency. The best system output performance is obtained when the system operates in the resonance state. When the driving voltage of the piezoelectric vibrator is 220 V

the gas output flow rate and pressure of the compressor are 190 mL/min and 20.3 kPa

respectively.

关键词

Keywords

references

Y N WANG , L M FU . Micropumps and biomedical applications-A review . Microelectronic Engineering , 2018 . 195 121 - 138 . DOI: 10.1016/j.mee.2018.04.008 http://doi.org/10.1016/j.mee.2018.04.008 .

陈松 , 王淑云 , 谢心怡 , 等 . 组合式压电芯片水冷系统 . 光学精密工程 , 2018 . 26 ( 5 ): 1140 - 1147 . http://ope.lightpublishing.cn/thesisDetails?columnId=1415397&Fpath=&index=-1&l=zh http://ope.lightpublishing.cn/thesisDetails?columnId=1415397&Fpath=&index=-1&l=zh .

S CHEN , SH Y WANG , X Y XIE , 等 . Practical rearch on computer chip water cooling system with combined piezoelectric pump unit . Opt. Precision Eng. , 2018 . 26 ( 5 ): 1140 - 1147 . http://ope.lightpublishing.cn/thesisDetails?columnId=1415397&Fpath=&index=-1&l=zh http://ope.lightpublishing.cn/thesisDetails?columnId=1415397&Fpath=&index=-1&l=zh .

刘本东 , 张震 , 李德胜 . 微泵的分类及其研究的最新进展 . 北京工业大学学报 , 2018 . 44 ( 6 ): 812 - 824 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=bjgydxxb201806002 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=bjgydxxb201806002 .

B D LIU , ZH ZHANG , D SH LI . Review on micro pump for microfluidics . Journal of Beijing University of Technology , 2018 . 44 ( 6 ): 812 - 824 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=bjgydxxb201806002 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=bjgydxxb201806002 .

J H ZHANG , Y WANG , J HUANG . Advances in valveless piezoelectric pump with cone-shaped tubes . Chinese Journal of Mechanical Engineering , 2017 . 30 ( 4 ): 766 - 781 . DOI: 10.1007/s10033-017-0151-z http://doi.org/10.1007/s10033-017-0151-z .

C P QIAN , S CHEN , J T WANG , 等 . A piezoelectric hydraulic linear motor with velocity self-monitoring . Sensors and Actuators A Physical , 2020 . 306 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=10.1177/1045389X9300400102 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=10.1177/1045389X9300400102 .

B DENKENA , L HÜLSEMEYER , M BERGMEIER . Performance of a piezo-hydraulic fine positioning device:Experimental analyses with a scaled model . Production Engineering , 2017 . 11 ( 4-5 ): 613 - 619 . DOI: 10.1007/s11740-017-0752-5 http://doi.org/10.1007/s11740-017-0752-5 .

S LU , B CHAI , Y LIU , 等 . The experimental study on the influence factors in adhesive dispensing dot diameter of impact jetting valve . IEEE Transactions on Components Packaging & Manufacturing Technology , 2016 . 6 ( 2 ): 1 - 5 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=25105f7e07ec8793d7dfdfff95f9cf73 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=25105f7e07ec8793d7dfdfff95f9cf73 .

顾守东 , 杨志刚 , 江海 , 等 . 压电驱动液压放大式喷射系统 . 光学精密工程 , 2015 . 23 ( 6 ): 1627 - 1634 . http://ope.lightpublishing.cn/thesisDetails?columnId=2159831&Fpath=&index=-1&l=zh http://ope.lightpublishing.cn/thesisDetails?columnId=2159831&Fpath=&index=-1&l=zh .

SH D GU , ZH G YANG , H JIANG , 等 . Piezoelectric driven hydraulic amplification jetting system . Opt. Precision Eng. , 2015 . 23 ( 6 ): 1627 - 1634 . http://ope.lightpublishing.cn/thesisDetails?columnId=2159831&Fpath=&index=-1&l=zh http://ope.lightpublishing.cn/thesisDetails?columnId=2159831&Fpath=&index=-1&l=zh .

J T WANG , X L ZHAO , EN CH , F X , 等 . A piezoelectric resonance pump based on a flexible support . Micromachines , 2019 . 10 ( 3 ): 169 DOI: 10.3390/mi10030169 http://doi.org/10.3390/mi10030169 .

赵丽清 , 纪晶 . 新型无阀泵机理与试验验证 . 光学精密工程 , 2019 . 27 ( 12 ): 2639 - 2649 . http://ope.lightpublishing.cn/thesisDetails?columnId=2140892&Fpath=&index=-1&l=zh http://ope.lightpublishing.cn/thesisDetails?columnId=2140892&Fpath=&index=-1&l=zh .

L Q ZHAO , J JI . Principle and experimental verification of valve-less pump . Opt. Precision Eng. , 2019 . 27 ( 12 ): 2639 - 2649 . http://ope.lightpublishing.cn/thesisDetails?columnId=2140892&Fpath=&index=-1&l=zh http://ope.lightpublishing.cn/thesisDetails?columnId=2140892&Fpath=&index=-1&l=zh .

V T DAUA , T X DINH . Numerical study and experimental validation of a valveless piezoelectric air blower for fluidic applications . Sensors & Actuators B Chemical , 2015 . 221 1077 - 1083 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=5c0fd62b5abfe3ab3f547472e518bc14 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=5c0fd62b5abfe3ab3f547472e518bc14 .

C LIU , Y ZHU . Simulation and experimental study of direct spray type piezoelectric air pumps based on synthetic jet . Microsystem Technologies , 2019 . 25 ( 12 ): 4445 - 4454 . DOI: 10.1007/s00542-019-04417-z http://doi.org/10.1007/s00542-019-04417-z .

Y WADA , D KOYAMA , K NAKAMURA . Acoustic streaming in an ultrasonic air pump with three-dimensional finite-difference time-domain analysis and comparison to the measurement . Ultrasonics , 2014 . 54 ( 8 ): 2119 - 2125 . DOI: 10.1016/j.ultras.2014.06.015 http://doi.org/10.1016/j.ultras.2014.06.015 .

王记波 , 刘国君 , 马祥 , 等 . 无阀压电泵驱动的集成式微混合器 . 西安交通大学学报 , 2018 . 52 ( 1 ): 92 - 99 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=xajtdxxb201801014 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=xajtdxxb201801014 .

J B WANG , G J LIU , X MA , 等 . An integrated micro-mixer driven by valveless piezoelectric pump . Journal of Xi'an Jiaotong University , 2018 . 52 ( 1 ): 92 - 99 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=xajtdxxb201801014 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=xajtdxxb201801014 .

J NAM , M LI , S C . Micromixing using swirling induced by three-dimensional dual surface acoustic waves (3D-dSAW) . Sensors and Actuators B Chemical , 2018 . 255 ( 3 ): 3434 - 3440 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=57ca87465a549fe8579df59dc38fc895 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=57ca87465a549fe8579df59dc38fc895 .

G J LIU , C L SHEN , Z G YANG , 等 . A disposable piezoelectric micropump with high performance for closed-loop insulin therapy system . Sensors and Actuators A Physical , 2010 . 163 ( 1 ): 291 - 296 . DOI: 10.1016/j.sna.2010.06.030 http://doi.org/10.1016/j.sna.2010.06.030 .

ANIS Y, MELDRUM D. Static and transient response analysis of a piezoelectric actuator driven diaphragm pico-liter pump[C]. IEEE Ras & Embs International Conference on Biomedical Robotics and Biomechatronics, IEEE , 2012: 652-656.

H K MA , R H CHEN , Y H HSU . Development of a piezoelectric-driven miniature pump for biomedical applications . Sensors & Actuators A Physical , 2015 . 234 23 - 33 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=03b50899f237642856362cd6c074c261 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=03b50899f237642856362cd6c074c261 .

Y WU , Y LIU , J F LIU , 等 . An improved resonantly driven piezoelectric gas pump . Journal of Mechanical Science and Technology , 2012 . 27 ( 3 ): 793 - 798 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=753f3f5c6de4adef1a06adfcffb49caa http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=753f3f5c6de4adef1a06adfcffb49caa .

J T WANG , Y LIU , Y H SHEN , 等 . A resonant piezoelectric diaphragm pump transferring gas with compact structure . Micromachines , 2016 . 7 ( 12 ): 1 - 9 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=MDPI000000210435 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=MDPI000000210435 .

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