SUN Ci,YANG Jin,ZHU Ji-wei,et al.Optical design of echelle spectrometer with ultra-wide wavelength range and high resolution[J].Optics and Precision Engineering,2021,29(01):45-53.
SUN Ci,YANG Jin,ZHU Ji-wei,et al.Optical design of echelle spectrometer with ultra-wide wavelength range and high resolution[J].Optics and Precision Engineering,2021,29(01):45-53. DOI: 10.37188/OPE.20212901.0045.
Optical design of echelle spectrometer with ultra-wide wavelength range and high resolution
In order to realize the echelle spectrometer system with ultra-wide wavelength range and high resolution, an optical path structure design was proposed, and the detection method of deep ultraviolet lights was studied and verified. Frist, the optical structure combined the advantages of quasi-littrow structure and C-T structure,so as to ensure the dispersing path has the characteristics of high diffraction efficiency and the stray light was well suppressed. In the limited range of optional materials,the multi-optimization method was employed to design the optical parameters. In order to correct the aberration and improve the spectral resolution, a correction structure composed of spherical and cylindrical lenses was added. Finally, a solution to the detection of deep ultraviolet lights was proposed, and the feasibility of the scheme was verified by finite element analysis. The final design results indicates that in the wavelength range of 160-1 000 nm, the imaging spot RMS value is better than 12.1 µm, the spectral resolution of 257.61 nm is better than 0.009 nm. It can meet the dispersion demand of ultra-wide wavelength range and high resolution detection system.
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