Sensitivity theoretical analysis and desensitization design method for reflective optical system based on optical path variation

Qing-yu MENG; Hong-yuan WANG; Wei WANG; Zi-chang QIN; Xiao-dong WANG

doi:10.37188/OPE.20212901.0072

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Sensitivity theoretical analysis and desensitization design method for reflective optical system based on optical path variation

Modern Applied Optics | 更新时间：2021-02-04

- Sensitivity theoretical analysis and desensitization design method for reflective optical system based on optical path variation
- Optics and Precision Engineering Vol. 29, Issue 1, Pages: 72-83(2021)
- 作者机构：
  
  1.哈尔滨工业大学空间光学工程研究中心，黑龙江哈尔滨 150001
  2.中国科学院长春光学精密机械与物理研究所，吉林长春 130031
  3.中国科学院大学，北京 100049
- 作者简介：
- 基金信息：
- DOI：10.37188/OPE.20212901.0072
  CLC： O439
- Received：13 November 2020，
  
  Revised：23 November 2020，
  
  Published：15 January 2021
- 稿件说明：
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孟庆宇,汪洪源,王维等.基于光程变化量的反射式光学系统敏感度理论分析与降敏设计方法[J].光学精密工程,2021,29(01):72-83.

MENG Qing-yu,WANG Hong-yuan,WANG Wei,et al.Sensitivity theoretical analysis and desensitization design method for reflective optical system based on optical path variation[J].Optics and Precision Engineering,2021,29(01):72-83.
孟庆宇,汪洪源,王维等.基于光程变化量的反射式光学系统敏感度理论分析与降敏设计方法[J].光学精密工程,2021,29(01):72-83. DOI： 10.37188/OPE.20212901.0072.

MENG Qing-yu,WANG Hong-yuan,WANG Wei,et al.Sensitivity theoretical analysis and desensitization design method for reflective optical system based on optical path variation[J].Optics and Precision Engineering,2021,29(01):72-83. DOI： 10.37188/OPE.20212901.0072.

摘要

光学系统的最终性能不仅取决于其理论设计结果，更重要的是取决于光学系统建造过程中对于面形加工、装调位置和系统稳定性等误差因素的控制。为了探究反射式光学系统误差敏感度的影响因素及规律，以同轴两反式光学系统作为研究对象，提出了采用失调误差引起的光程变化量作为光学系统误差敏感程度的评价标准，理论推导了由反射镜位置失调因素引起的光程变化量的数学解析表达式，通过一套标准Ritchey-Chretien系统，并应用光线追迹的方法，计算了在各项失调扰动情况下所产生的实际光程变化量，与理论推导值对比，相对误差均在1%左右，证明了光程变化量理论表达式的正确性。在光程变化量理论研究的基础上，提出并建立了基于光程变化量作为评价准则的同轴反射式光学系统降敏设计方法。以一个焦距为5 600 mm的同轴两反系统为例，通过15轮迭代优化，设计了同时满足光程变化量与波像差指标的光学系统，并通过光程变化量与波像差改变量的关系，验证了光程变化量作为敏感度评价标准的正确性和降敏设计方法的有效性。

Abstract

The final performance of an optical system depends not only on its theoretical design， but more importantly， on various error-causing factors such as surface processing， alignment position， and system stability during its construction. To explore the influencing factors and the error sensitivity of a reflective optical system， a coaxial two-mirror system is considered as the research object. The optical path variation （OPV） caused by a misalignment error is proposed as the evaluation index of the error sensitivity of the optical system， and the mathematical expression of the OPV caused by the mirror position misalignment factor is deduced theoretically. By using a standard Ritchey-Chretien system and the ray tracing method， the OPV caused by various disturbances is calculated. Compared with the theoretical value， the relative error is approximately 1%， which proves the accuracy of the theoretical expression of the OPV. Based on the theoretical study of OPV， a desensitization design method for a coaxial reflective optical system with an OPV is proposed and established. Considering a coaxial two-mirror system with a focal length of 5 600 mm as an example， an optical system that meets the OPV and wavefront error index is designed after 15 rounds of iterative optimization. The accuracy of the OPV as the sensitivity evaluation standard and the effectiveness of the desensitization design method are verified by the relationship between the OPV and the wavefront error modification.

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