浏览全部资源
扫码关注微信
中国工程物理研究院 机械制造工艺研究所, 四川 绵阳 621900
Received:28 October 2020,
Revised:20 November 2020,
Published:15 February 2021
移动端阅览
张韬,何建国,黄文等.机械轴与虚拟轴复合的磁流变抛光[J].光学精密工程,2021,29(02):286-296.
ZHANG Tao,HE Jian-guo,HUANG Wen,et al.Magnetorheological finishing method that combines mechanical and virtual axes[J].Optics and Precision Engineering,2021,29(02):286-296.
张韬,何建国,黄文等.机械轴与虚拟轴复合的磁流变抛光[J].光学精密工程,2021,29(02):286-296. DOI: 10.37188/OPE.20212902.0286.
ZHANG Tao,HE Jian-guo,HUANG Wen,et al.Magnetorheological finishing method that combines mechanical and virtual axes[J].Optics and Precision Engineering,2021,29(02):286-296. DOI: 10.37188/OPE.20212902.0286.
传统的磁流变抛光工艺采用抛光缎带的固定位置对工件进行法向加工,由于机床转轴的行程限制,工件陡度较高区域不可达,当前基于等效磁场原理的变切触点抛光方法存在着等效磁场实现成本高,没有充分发挥机械轴与虚拟轴相结合的抛光能力等问题。本文针对这些问题提出了一种用于加工高陡度曲面元件的方法,分析了保证去除函数稳定的磁场特点,通过磁场测量实验验证了磁场的稳定范围,通过采斑实验确定了去除函数稳定的虚拟轴范围为±12°,提出了将虚拟轴与机械轴复合使用的加工方法,并基于刚体变换实现了该加工方法下的坐标解算。最后,通过增加倾角的球面件抛光实验,将球面元件95%口径的PV值收敛为0.096
<math id="M1"><mi>λ</mi></math>
http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=7479635&type=
http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=7479631&type=
1.52399993
2.37066674
,RMS值收敛为0.012
<math id="M2"><mi>λ</mi></math>
http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=7479640&type=
http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=7479638&type=
1.52399993
2.37066674
,实验结果表明虚拟轴和机械轴复合抛光方法具有针对高陡度曲面的修形能力。
The conventional magnetorheological finishing employs a fixed position of the polishing ribbon to perform normal processing on the workpiece. However, the processing area of the workpiece is greatly restricted by the limited stroke of the machine tool rotary axis. Recently, shortcomings of the current polishing method have been identified based on the principle of equivalent magnetic fields, which implies a high cost for realizing an equivalent magnetic field and insufficient polishing ability due to the fact that the mechanical and virtual axes are not combined. A method for processing a high-gradient curved surface was thus proposed in this study. The characteristics of the magnetic field that ensure the stability of the removal function were then analyzed, and the magnetic field stability range was verified through a magnetic field measurement experiment. The study also conducted a spot-taking experiment, which determined that the feasible range of the virtual axis for the removal function stability was ±12°. A machining method that combines the virtual and mechanical axes was then proposed, and a coordinate calculation for the machining method was realized based on rigid body transformation. Finally, the study conducted a spherical polishing experiment with an greater inclination angle. Results shows that the peak-valley(PV) value of the spherical workpiece with a 95% aperture size converges to 0.096
λ
, and the root mean square(RMS) value converges to 0.012
λ
, indicating that the proposed composite polishing method of virtual and mechanical axes can obtain a high-gradient surface.
袁征 . 保形光学头罩磨削抛光设备研制及其磁流变抛光基础研究 [D]. 长沙 : 国防科学技术大学 , 2008 .
YUAN ZH . Develop grinding and polishing equipment and basic study on magneto-rheological finishing for conformal optics dome [D]. Changsha : National University of Defense Technology , 2008 . (in Chinese)
宋辞 , 戴一帆 , 彭小强 , 等 . 光学镜面磁流变抛光的后置处理 [J]. 光学 精密工程 , 2010 , 18 ( 8 ): 1715 - 1721 .
SONG C , DAI Y F , PENG X Q , et al . . Post processing for magnetorheological finishing of optical mirrors [J]. Optics and Precision Engineering , 2010 , 18 ( 8 ): 1715 - 1721 . (in Chinese)
鲁岩 . 一种大摆角五轴联动混联机床的构型设计及性能分析 [D]. 太原 : 中北大学 , 2017 .
LU Y . Research on configuration design and performance of five-axis linkage hybrid kinematics machine with large pendulum angle [D]. Taiyuan : North University of China , 2017 . (in Chinese)
周洁 , 何卫 , 胡旭晓 , 等 . 四轴联动变刀触点自由曲面磨削算法研究 [J]. 机械科学与技术 , 2011 , 30 ( 6 ): 951 - 956 .
ZHOU J , HE W , HU X X , et al . . A method for free surface grinding with changing cutter contact points in four-axis CNC machine [J]. Mechanical Science and Technology for Aerospace Engineering , 2011 , 30 ( 6 ): 951 - 956 . (in Chinese)
毛磊 , 何卫 , 周洁 , 等 . 基于曲率拟合及变刀触点的防干涉四轴磨削算法 [J]. 中国机械工程 , 2011 , 22 ( 17 ): 2022 - 2026 .
MAO L , HE W , ZHOU J , et al . . Curvature fitting and changing-TCpoints based 4-axis grinding algorithm [J]. China Mechanical Engineering , 2011 , 22 ( 17 ): 2022 - 2026 . (in Chinese)
MALONEY C , LORMEAU J P , DUMAS P . Improving low, mid and high-spatial frequency errors on advanced aspherical and freeform optics with MRF [C]. SPIE , 2016 , 10009 : 100090R .
MESSNER W , HALL C , DUMAS P , et al . . Manufacturing meter-scale aspheric optics [J]. SPIE , 2007 , 6671 : 667106 .
SONG C , DAI Y F , PENG X Q . Magnetorheological finishing of low-gradient curved surfaces based on four-axis linkage technique [J]. Journal of Central South University , 2013 , 20 ( 9 ): 2349 - 2358 .
李龙响 . 大口径非球面磁流变加工的关键技术研究 [D]. 长春 : 中国科学院长春光学精密机械与物理研究所 , 2016 .
LI L X . Study on the key techniques of magnetorheological finishing for large aspheric optics [D]. Changchun : Changchun Institute of Optics , Fine Mechanics and Physics , Chinese Academy of Sciences , 2016 . (in Chinese)
宋辞 . 离轴非球面光学零件磁流变抛光关键技术研究 [D]. 长沙 : 国防科学技术大学 , 2012 .
SONG C . Study on the key techniques of magnetorheological finishing for off-axis aspheric optical elements [D]. Changsha : National University of Defense Technology , 2012 . (in Chinese)
郑永成 , 王洋 , 何建国 , 等 . 基于磁场分割的磁导计算与磁路设计 [J]. 机械与电子 , 2006 , 24 ( 7 ): 11 - 13 .
ZHENG Y CH , WANG Y , HE J G , et al . . Permeance calculation and magnetic circuit design based on magnetic field division [J]. Machinery & Electronics , 2006 , 24 ( 7 ): 11 - 13 . (in Chinese)
赵翔宇 . 六自由度机械臂及其控制系统的研究 [D]. 哈尔滨 : 哈尔滨理工大学 , 2019 .
ZHAO X Y . Research on 6 -DOF manipulator and its control system [D]. Harbin : Harbin University of Science and Technology , 2019 . (in Chinese)
周涛 , 张云飞 , 樊炜 , 等 . 磁流变抛光回转对称非球面工件精确自定位 [J]. 光学 精密工程 , 2020 , 28 ( 3 ): 610 - 620 .
ZHOU T , ZHANG Y F , FAN W , et al . . Precise localization of rotary symmetrical aspheric workpiece in magnetorheological polishing [J]. Optics and Precision Engineering , 2020 , 28 ( 3 ): 610 - 620 . (in Chinese)
黄金勇 , 赵恒 , 胡庆 , 等 . 大口径平面光学元件波前梯度数控抛光 [J]. 光学 精密工程 , 2019 , 27 ( 7 ): 1473 - 1480 .
HUANG J Y , ZHAO H , HU Q , et al . . Large aperture optical element wavefront gradient controlled by computer numerical controlled polishing [J]. Optics and Precision Engineering , 2019 , 27 ( 7 ): 1473 - 1480 . (in Chinese)
CHENG H B , FENG Z J , CHENG K , et al . . Design of a six-axis high precision machine tool and its application in machining aspherical optical mirrors [J]. International Journal of Machine Tools and Manufacture , 2005 , 45 ( 9 ): 1085 - 1094 .
袁巨龙 , 吴喆 , 吕冰海 , 等 . 非球面超精密抛光技术研究现状 [J]. 机械工程学报 , 2012 , 48 ( 23 ): 167 - 177 .
YUAN J L , WU ZH , LÜ B H , et al . . Review on ultra-precision polishing technology of aspheric surface [J]. Journal of Mechanical Engineering , 2012 , 48 ( 23 ): 167 - 177 . (in Chinese)
SALZMAN S . Optimal magnetorheological fluid for finishing of chemical-vapor-deposited zinc sulfide [D]. Rochester : University of Rochester , 2016 .
周涛 , 黄文 , 陈华 , 等 . 基于ICP的磁流变抛光方形工件精准定位方法 [J]. 制造技术与机床 , 2019 ( 7 ): 43 - 47 .
ZHOU T , HUANG W , CHEN H , et al . . Precise localization of square workpiece in magnetorheological polishing based on ICP algorithm [J]. Manufacturing Technology & Machine Tool , 2019 ( 7 ): 43 - 47 . (in Chinese)
尹韶辉 , 邓子默 , 郭源帆 , 等 . 单晶碳化硅的电磁场励磁大抛光模磁流变抛光 [J]. 表面技术 , 2020 , 49 ( 10 ): 309 - 315 .
YIN S H , DENG ZH M , GUO Y F , et al . . Magnetorheological polishing using large polishing tool excited by electromagnetic field for silicon carbide wafer [J]. Surface Technology , 2020 , 49 ( 10 ): 309 - 315 . (in Chinese)
MORE A K , CHANMANWAR R M . Experimental investigation of magnetorheological finishing on copper alloy [J]. Materials Today: Proceedings , 2019 , 19 : 312 - 316 .
舒成松 , 董浩 , 尹韶辉 , 等 . 高精度微结构玻璃光学元件阵列模压技术研究进展 [J]. 光学 精密工程 , 2020 , 28 ( 9 ): 1967 - 1985 .
SHU CH S , DONG H , YIN SH H , et al . . Research progress of high precision micro structure glass optical element array molding technology [J]. Optics and Precision Engineering , 2020 , 28 ( 9 ): 1967 - 1985 . (in Chinese)
张欢 . 基于磁流变抛光法的光学元件抛光专利技术综述 [J]. 科技创新与应用 , 2019 ( 20 ): 5 - 6 .
ZHANG H . Overview of the patented technology of optical element polishing based on magnetorheological polishing method [J]. Science and Technology Innovation and Application , 2019 ( 20 ): 5 - 6 . (in Chinese)
周琴琴 , 彭可 , 陈永福 , 等 . 基于环形磁场励磁的多工位磁流变抛光方法 [J]. 制造技术与机床 , 2019 ( 7 ): 105 - 111 .
ZHOU Q Q , PENG K , CHEN Y F , et al . . Multi-stationmagnetorheological polishing method based on ring magnetic field excitation [J]. Manufacturing Technology & Machine Tool , 2019 ( 7 ): 105 - 111 . (in Chinese)
罗斌 , 阎秋生 . 磁流变抛光非球柱面镜的新工艺 [J]. 金刚石与磨料磨具工程 , 2019 , 39 ( 2 ): 64 - 71 .
LUO B , YAN Q SH . New technology to magnetorheological finishing aspheric cylindrical mirror [J]. Diamond & Abrasives Engineering , 2019 , 39 ( 2 ): 64 - 71 . (in Chinese)
0
Views
1187
下载量
5
CSCD
Publicity Resources
Related Articles
Related Author
Related Institution