column:Three-DoF weakly coupled resonator micro-balance for mass detection

XIAO Qi-jun; LUO Zhong-hui; GUO Da-wei

doi:10.37188/OPE.20212902.0297

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column:Three-DoF weakly coupled resonator micro-balance for mass detection

Micro\/Nano Technology and Fine Mechanics | 更新时间：2026-09-12

- column:Three-DoF weakly coupled resonator micro-balance for mass detection
- Optics and Precision Engineering Vol. 29, Issue 2, Pages: 297-304(2021)
- 作者机构：
  
  1.肇庆学院电子与电气工程学院，广东肇庆 526061
  2.广东技术师范大学机电工程学院，广东广州 510665
  3.首都医科大学附属北京世纪坛医院，北京 100038
- 作者简介：
- 基金信息：
- DOI：10.37188/OPE.20212902.0297
  CLC： TH703;TN703
- Received：10 August 2020，
  
  Revised：2020-09-21，
  
  Published：15 February 2021
- 稿件说明：
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肖奇军,罗忠辉,郭大为.三自由度弱耦合谐振式微质量测量传感器[J].光学精密工程,2021,29(02):297-304.

XIAO Qi-jun,LUO Zhong-hui,GUO Da-wei.column:Three-DoF weakly coupled resonator micro-balance for mass detection[J].Optics and Precision Engineering,2021,29(02):297-304.
肖奇军,罗忠辉,郭大为.三自由度弱耦合谐振式微质量测量传感器[J].光学精密工程,2021,29(02):297-304. DOI： 10.37188/OPE.20212902.0297.

XIAO Qi-jun,LUO Zhong-hui,GUO Da-wei.column:Three-DoF weakly coupled resonator micro-balance for mass detection[J].Optics and Precision Engineering,2021,29(02):297-304. DOI： 10.37188/OPE.20212902.0297.

摘要

为了实现对微小质量的测量，本文提出了一种基于模态局部化效应三自由度弱耦合谐振式微质量传感器，建立3个谐振器的运动方程式，获得质量扰动的系统方程，建立了三自由度耦合谐振系统的 MATLAB / SIMULINK模型，得出幅值比变化相对于振幅变化和谐振频率变化来说具有最高的归一化灵敏度。最后进行传感器设计和微加工，搭建质量测量系统。实验结果表明，电压幅值比的变化产生的归一化灵敏度大约是振幅变化的4倍，大约是频移变化的两个数量级，最小可检测质量值为2 ng。仿真和实验结果表明，三自由度模态局部化弱耦合谐振器能实现对微质量的测量，具有良好的生物传感应用前景。

Abstract

To measure micro-masses effectively， a three degrees-of-freedom （3-DoF） mode localized weakly coupled resonator micro-mass sensor was proposed in this study. The equations of motion of three resonators were established， the system equations of mass disturbance were obtained， and a MATLAB/SIMULINK model of a 3-DoF coupled resonance system was established. The study determined that the variation in amplitude ratio has the highest normalized sensitivity compared with the variation in amplitude and frequency shift. The sensor was designed and fabricated using micro-electromechanical system （MEMS） technologies， and a mass measurement system was also developed. Experimental results reveal that the normalized sensitivity of the change in voltage amplitude ratio is approximately four times the change in amplitude. In addition， approximately two orders of magnitude of resonant frequency shift occurred， and the minimum detectable mass is 2 ng. Simulation and experimental results prove that the 3-DoF mode localized weakly coupled resonator can effectively measure micro-masses and thus has good prospects for bio-sensing applications.

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references

YAN Z M ， HAO Y C ， L W M . A mode-localized Lorentz force magnetometer with 1 . 6μt /√Hz Resolution ［C］. 20th International Conference on Solid-state Sensors ， Berlin ， Germany： Actuators and microsystems & Euro sensors ， 2019 ： 1815 - 1818 .

CLELAND A N ， ROUKES M L . A nanometre-scale mechanical electrometer ［J］. Nature ， 1998 ， 392 （ 6672 ）： 160 - 162 .

CHRISTENSEN D L ， AHN C H ， HONG V A ， et al .. Hermetically encapsulated differential resonant accelerometer ［C］. 2013 Transducers & Eurosensors XXVII ： The 17th International Conference on Solid-State Sensors ， Actuators and Microsystems （TRANSDUCERS & EUROSENSORS XXVII）. Barcelona： IEEE ， 2013 ： 606 - 609 .

赵健，施芹，夏国明，等 . 小型化硅微谐振式加速度计的实现与性能测试［J］. 光学精密工程， 2016 ， 24 （ 8 ）： 1927 - 1933 .

ZHAO J ， SHI Q ， XIA G M ， et al . . Implementation and measurement of a miniaturized silicon resonant accelerometer ［J］. Optics and Precision Engineering ， 2016 ， 24 （ 8 ）： 1927 - 1933 . （in Chinese）

康昊，常洪龙 . 基于模态局部化效应的微机械加速度计研究进展［J］. 导航与控制， 2018 ， 17 （ 6 ）： 16 - 22，93 .

KANG H ， CHANG H L . Research progress of A novel MEMS accelerometer based on mode localization ［J］. Navigation and Control ， 2018 ， 17 （ 6 ）： 16 - 22，93 . （in Chinese）

张和民 . 基于模态局部化的弱耦合谐振式加速度传感器敏感机理研究［D］. 西安：西北工业大学， 2017 .

ZHANG H M . Research on the acceleration sensing mechanism based on mode localization of the weakly coupled resonators ［D］. Xi'an ： Northwestern Polytechnical University ， 2017 . （in Chinese）

KANG H ， YANG J ， CHANG H L . A closed-loop accelerometer based on three degree-of-freedom weakly coupled resonator with self-elimination of feedthrough signal ［J］. IEEE Sensors Journal ， 2018 ， 18 （ 10 ）： 3960 - 3967 .

KANG H ， YANG J ， CHANG H L . A mode-localized accelerometer based on four degree-of-freedom weakly coupled resonators ［C］. 2018 IEEE Micro Electro Mechanical Systems （MEMS）. Belfast ： IEEE ， 2018 ： 960 - 963 .

CHEN F ， LI X X ， KRAFT M . Electromechanical sigma–delta modulators force feedback interfaces for capacitive MEMS inertial sensors： a review ［J］. IEEE Sensors Journal ， 2016 ， 16 （ 17 ）： 6476 - 6495 .

吴志强，杨亮，夏国明，等 . 基于带通Σ-Δ调制器的硅微机械陀螺力反馈闭环检测［J］. 光学精密工程， 2015 ， 23 （ 9 ）： 2540 - 2545 .

WU ZH Q ， YANG L ， XIA G M ， et al . . Force feedback close-loop detection of silicon micromachined gyroscope based on bandpass sigma delta modulator ［J］. Optics and Precision Engineering ， 2015 ， 23 （ 9 ）： 2540 - 2545 . （in Chinese）

ZHAO CH ， PANDIT M ， SOBREVIELA G ， et al . . On the optimization of resonant MEMS sensors utilizing vibration mode localization ［J］. Appl. Phys. Lett . 2018 ， 112 （ 19 ）： 194103 .

WANG Y ， ZHAO C ， WANG C ， et al . . A mass sensor based on 3-DOF mode localized coupled resonator under atmospheric pressure ［J］. Sensors and Actuators A： Physical ， 2018 ， 279 ： 254 - 262 .

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Related Institution

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