Confocal microscopic measurement of ultramicro hardness considering indentation pile-up

SHI Wei; ZHANG Kai-lin; HOU Xiao-dong

doi:10.37188/OPE.20212905.1014

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Confocal microscopic measurement of ultramicro hardness considering indentation pile-up

Modern Applied Optics | 更新时间：2026-09-11

- Confocal microscopic measurement of ultramicro hardness considering indentation pile-up
- Optics and Precision Engineering Vol. 29, Issue 5, Pages: 1014-1023(2021)
- 作者机构：
  
  1.中国航空工业集团公司北京长城计量测试技术研究所，北京 100095
  2.北京航空航天大学仪器科学与光电工程学院，北京 100191
  3.东莞材料基因高等理工研究院应力测量技术研究所，广东东莞 523808
- 作者简介：
- 基金信息：
- DOI：10.37188/OPE.20212905.1014
  CLC： TB932
- Received：14 October 2020，
  
  Revised：2021-01-14，
  
  Published：15 May 2021
- 稿件说明：
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石伟,张凯林,侯晓东.边缘凸起式超显微硬度压痕的共聚焦测量[J].光学精密工程,2021,29(05):1014-1023.

SHI Wei,ZHANG Kai-lin,HOU Xiao-dong.Confocal microscopic measurement of ultramicro hardness considering indentation pile-up[J].Optics and Precision Engineering,2021,29(05):1014-1023.
石伟,张凯林,侯晓东.边缘凸起式超显微硬度压痕的共聚焦测量[J].光学精密工程,2021,29(05):1014-1023. DOI： 10.37188/OPE.20212905.1014.

SHI Wei,ZHANG Kai-lin,HOU Xiao-dong.Confocal microscopic measurement of ultramicro hardness considering indentation pile-up[J].Optics and Precision Engineering,2021,29(05):1014-1023. DOI： 10.37188/OPE.20212905.1014.

摘要

为了精确测量边缘产生凸起的超显微硬度压痕，采用高分辨率且能获得压痕三维形貌的激光扫描共聚焦显微镜，获得压痕边缘复杂的三维凸起结构。对压痕的三维形貌数据进行分析，利用压痕对角线方法提取压痕的4个角点，计算超显微硬度。然而，压痕对角线法并不能反映残余压痕的复杂结构，尤其是边缘凸起结构。在测量压痕三维形貌的基础上，为寻找更符合接触力学和压痕形成规律的压头与试样的接触面积，提出了基准平面的概念。通过对压痕面积函数进行微分，寻找最优的基准平面位置，既考虑压痕的边缘凸起，也能很好地反映接触面积。实验结果表明，通过接触力学规律寻找到的最优基准平面测量硬度，其测量误差小于±1.5%、稳定性小于1%。基准平面法可以稳定且准确地得到更符合硬度定义的硬度值。

Abstract

To accurately measure the ultra-micro-hardness indentation by considering the pile-up， a high-resolution laser scanning confocal microscope was used to obtain the 3D morphology of the residual indent in this study. The four corners of indentation were then extracted to calculate the ultra-micro-hardness value using the indentation diagonal method. However， this traditional method cannot accurately reflect the complex structure of the residual indenter， in particular， the pile-up. Taking advantage of the knowledge on the 3D shape of the indent， a datum plane concept is proposed to determine the true contact area in accordance with the contact mechanics. It was found that the contact area determined by the datum plane at the inflexion point of the area function differentiated by the depth is a good indication of the contact area， even considering pile-up. The experimental results show that the hardness values measured by the optimal datum plane obtained by the contact mechanics law are <±1.5% error and <1% stable. The reference plane method can obtain a more stable and accurate hardness value that is more consistent with the definition of hardness.

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