Failure analysis of electro-thermal micro-actuator under  effect of process error

CHEN Hao; CAO Yun; WANG Xin-jie; WANG Jiong; XI Zhan-wen; NIE Wei-rong

doi:10.37188/OPE.20212906.1365

您当前的位置：

首页 >

文章列表页 >

Failure analysis of electro-thermal micro-actuator under effect of process error

Micro\/Nano Technology and Fine Mechanics | 更新时间：2026-09-12

- Failure analysis of electro-thermal micro-actuator under effect of process error
- Optics and Precision Engineering Vol. 29, Issue 6, Pages: 1365-1374(2021)
- 作者机构：
  
  南京理工大学机械工程学院，江苏南京210094
- 作者简介：
- 基金信息：
- DOI：10.37188/OPE.20212906.1365
  CLC： TH16;TP18
- Received：17 July 2020，
  
  Revised：2020-09-16，
  
  Published：15 June 2021
- 稿件说明：
移动端阅览
陈浩,曹云,王新杰等.工艺误差影响下微电热驱动器失效分析[J].光学精密工程,2021,29(06):1365-1374.

CHEN Hao,CAO Yun,WANG Xin-jie,et al.Failure analysis of electro-thermal micro-actuator under effect of process error[J].Optics and Precision Engineering,2021,29(06):1365-1374.
陈浩,曹云,王新杰等.工艺误差影响下微电热驱动器失效分析[J].光学精密工程,2021,29(06):1365-1374. DOI： 10.37188/OPE.20212906.1365.

CHEN Hao,CAO Yun,WANG Xin-jie,et al.Failure analysis of electro-thermal micro-actuator under effect of process error[J].Optics and Precision Engineering,2021,29(06):1365-1374. DOI： 10.37188/OPE.20212906.1365.

摘要

为了研究V型电热驱动器温度失效概率，基于驱动器存在的加工误差，对驱动器对称中心处的温度（整个驱动器的最高温度）进行不确定性分析。首先对同一加工批次驱动器进行测量计算，拟合得到当驱动器宽度和电阻率满足正态分布的参数。建立V型电热驱动器有限元模型并进行实验验证，从而保证不确定性分析中所用样本数据来源的可靠性。根据宽度和电阻率的分布特征并基于非侵入式混沌多项式展开方法，选取Hermite正交多项式进行展开，通过高斯数值积分法，求得多项式系数。最后使用蒙特卡洛法对所建立的温度混沌多项式模型进行验证。研究结果表明，混沌多项式模型能准确得到驱动器上最高温度的随机分布；最高温度的主要分布范围和均值随着电压的增大而增大；V型电热驱动器发生温度失效的概率也随着电压的增大而增大。在18 V电压作用下，该加工批次驱动器的温度失效概率达到91.5%。

Abstract

In order to study the failure probability of a V-shaped electro-thermal micro-actuator， an uncertainty analysis of the temperature at the center of the actuator， where the highest temperature is located is performed based on its process error. The actuators that were fabricated at the same time are first measured. Then， the parameters are obtained when the width and resistivity satisfy the normal distribution. Moreover， the finite element model （FEM） of the actuator is established and validated by experiment， which ensures that the sample data used in the uncertainty analysis is accurate. According to the distribution of width and electrical resistivity and the non-intrusive polynomial chaos expansion （NIPCE）， the Hermite orthogonal polynomial is chosen for the chaos expansion. Its coefficient is obtained by the Gauss numerical integration method. Finally， the chaos polynomial model of the temperature is validated by the Monte Carlo simulation. The results show that the stochastic distribution of the highest temperature on the actuator is accurate， which is obtained by using the chaos polynomial model. The main distribution and mean value of the highest temperature increases with an increase in the voltage. Similarly， the probability of temperature failure of the actuator also increases with an increase in the voltage. When an 18 V voltage is applied， the failure probability of the actuator is 91.5%.

关键词

Keywords

references

HUSSEIN H ， MOAL P L ， BOURBON G ， et al . Analysis of the dynamic behavior of a doped silicon U-shaped electrothermal actuator ［J］. international conference on advanced intelligent mechatronics ， 2015 ： 836 - 841

刘加凯 . 静电驱动MOEMS保险机构的设计与试验［J］. 光学精密工程， 2019 ， 27 （ 2 ）： 334 - 340 .

LIU J K . Design and test of electrostatic driving MOEMS arming device ［J］. Opt. Precision Eng. ， 2019 ， 27 （ 2 ）： 334 - 340 .

闫鹏，李金银 . 压电陶瓷驱动的长行程快刀伺服机构设计［J］. 光学精密工程， 2020 ， 28 （ 2 ）： 390 - 397 .

YAN P ， LI J Y . Design of piezo-actuated long-stroke fast tool servo mechanism ［J］. Opt. Precision Eng. ， 2020 ， 28 （ 2 ）： 390 - 397 .

TAKANAMI S ， KITAGAWA W ， TAKESHITA T . Design for improvement of torque-thrust characteristic in simultaneous drive in two-degree-of-freedom electromagnetic actuator ［C］. 19th International Conference on Electrical Machines and Systems ， Chiba ， JAPAN. ICEMS ， 2017 ： 1 - 6 .

曹云，席占稳，王炅，等 . UV-LIGA工艺误差对MEMS万向惯性开关性能的影响［J］. 浙江大学学报：工学版， 2017 ， 51 （ 9 ）： 1815 - 1823 .

CAO Y ， XI ZH W ， WANG J ， et al . Influence of UV-LIGA fabrication error on performance of a MEMS ominidirectional inertial switch ［J］. Journal of Zhejiang University （Engineering Science）， 2017 ， 51 （ 9 ）： 1815 - 1823 .

QIANGA W ， YANG G ， XIAOHUIB J ， et al . Influence of the DRIE Process Error on the Frequency of MEMS Comb-Drive Resonators ［J］. Micronanoelectronic Technology ， 2010 ， 47 （ 12 ）： 776 - 780 .

李豪，郑梦萍，董林玺 . 工艺误差对盘式耦合谐振滤波器的影响［J］. 传感技术学报， 2018 ， 31 （ 3 ）： 334 - 341 .

LI H ， ZHENG M P ， DONG L X . The influence of fabrication error on MEMS disk resonator-based filter ［J］. Chinese Journal of Sensors and Actuators ， 2018 ， 31 （ 3 ）： 334 - 341 .

KONG J S ， FRANGOPOL D M ， RAULLI M ， et al . A methodology for analyzing the variability in the performance of a MEMS actuator made from a novel ceramic ［J］. Sensors & Actuators A ， 2004 ， 116 （ 2 ）： 336 - 344 .

LILI G ， ZAI-FA Z ， QING-AN H . Modeling of the effect of process variations on a micromachined doubly-clamped beam ［J］. Micromachines ， 2017 ， 8 （ 3 ）： 81- .

GAO L ， ZHOU Z F ， HUANG Q A . A generalized polynomial chaos-based approach to analyze the impacts of process deviations on mems beams ［J］. Sensors ， 2017 ， 17 （ 11 ）： 2561- .

WU B . A statistically optimal macromodeling framework with application in process variation analysis of MEMS devices ［C］. 10th IEEE International New Circuits and Systems Conference， Montreal ， CANADA： NEWCAS ， 2012 ： 221 - 224 .

SHAVEZIPUR M ， PONNAMBALAM K ， HASHEMI S M ， et al . A probabilistic design optimization for mems tunable capacitors ［J］. Microelectronics journal ， 2008 ， 39 （ 12 ）： 1528 - 1533 .

韦东来，崔振山，陈军 . 混沌多项式新求解及其在板料成形性容差预测中的应用［J］. 机械工程学报， 2009 ，（ 8 ）： 267 - 271 .

WEI D L ， CUI ZH SH ， CHEN J . New solution for polynomial chaos expansion and application in tolerance prediction for stamping process ［J］. Journal of Mechancial Engineering ， 2009 （ 08 ）： 267 - 271 .

宋彦 . 基于随机响应面法的结构整体可靠度与全局灵敏度分析［D］. 哈尔滨：哈尔滨工业大学， 2016 .

SONG Y . Global Reliability and Sensitivity Analysis of Structures Based on Stochastic Response Surface Method ［D］. Harbin ： Harbin Institute of University ， 2016 .

王喆垚 . 微系统设计与制造（第二版）［M］. 清华大学出版社， 2015 ： 72 - 151 .

WANG ZH Y . Microsystem Design and Fabrication ［M］. Tsinghua University Press ， 2015 ： 72 - 151 .

寇志伟，曹慧亮，石云波，等 . 电容式环形微机电振动陀螺的设计［J］. 光学精密工程， 2019 ， 27 （ 4 ）： 842 - 848 .

KOU ZH W ， CAO H L ， SHI Y B ， et al . Development of capacitive MEMS vibrating ring gyroscope ［J］. Opt. Precision Eng. ， 2019 ， 27 （ 4 ）： 842 - 848 .

KOLAHDOOZAN M ， ESFAHANI A R ， HASSANI M ， et al . Experimental and numerical investigation of the arms displacement in a new electrothermal MEMS actuator ［J］. International Journal of Advanced Design and Manufacturing Technology ， 2017 ， 10 （ 2 ）： 71 - 81 .

ZHANG Z ， YU Y ， LIU X ， et al . Dynamic modelling and analysis of V- and Z-shaped electrothermal microactuators ［J］. Microsystem Technologies-micro-and Nanosystems-information Storage and Processing Systems ， 2017 ， 23 （ 8 ）： 3775 - 3789 .

XIU D ， KARNIADAKIS G E . The wiener-askey polynomial chaos for stochastic differential equations ［J］. Siam Journal on Scientific Computing ， 2002 （ 24 ）： 619 - 644 .

杨杰，陈虬，高芝晖 . 基于Hermite积分的非线性随机有限元法［J］. 重庆大学学报（自然科学版）， 2003 ， 26 （ 12 ）： 15 - 17 .

YANG J ， CHEN Q ， GAO ZH H . A new nonlinear stochastic finite element method based on Hermite integrate ［J］. Journal of Chongqing University ， 2003 ， 26 （ 12 ）： 15 - 17 .

王梅宝，张晓琳，唐文彦，等 . 柔性质心测量方法及不确定度评定［J］. 光学精密工程， 2019 ， 27 （ 7 ）： 1500 - 1507 .

WANG M B ， ZHANG X L ， TANG W Y ， et al . Flexible center of gravity measurement method and uncertainty evaluation ［J］. Opt. Precision Eng. ， 2019 ， 27 （ 7 ）： 1500 - 1507 .

Views

735

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Backstepping sliding mode neural network control system for hypersonic vehicle

A objective function with measuring error uncertainty weighted for pose estimation in stereo vision

Series sliding mode control for gun control system based on extended state observer

Strategies to overcome scale constraints for Chinese instrumentation companies

Coupling error modeling and correction of angular and translational stages in fiber coupling systems

Related Author

Rong LIU

Da-qing HUANG

Ding-guo JIANG

Ju HUO

Gui-yang ZHANG

Jia-shan CUI

Ming YANG

MA Xiao-jun

Related Institution

Research Institute of Unmanned Aircraft, Nanjing University of Aeronautics and Astronautics

Factory of Chinese People′s Liberation Army

School of Astronautics, Harbin Institute of Technology

School of Electrical Engineering and Automation, Harbin Institute of Technology

The 8357 Institute, China Aerospace Science & Industry Corp.

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰