Fast picking strategy and electrical properties measurement of carbon nanotubes

MA Li; GENG Song-chao; YANG Quan; CHEN Tao; SUN Li-ning

doi:10.37188/OPE.20212908.1857

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Fast picking strategy and electrical properties measurement of carbon nanotubes

Micro\/Nano Technology and Fine Mechanics | 更新时间：2026-09-12

- Fast picking strategy and electrical properties measurement of carbon nanotubes
- Optics and Precision Engineering Vol. 29, Issue 8, Pages: 1857-1866(2021)
- 作者机构：
  
  1.上海大学机电工程与自动化学院，上海 200444
  2.苏州大学机器人与微系统中心，江苏苏州 215021
- 作者简介：
- 基金信息：
- DOI：10.37188/OPE.20212908.1857
  CLC： TG662
- Received：20 January 2021，
  
  Revised：2021-03-20，
  
  Published：15 August 2021
- 稿件说明：
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马立,耿松超,杨权等.碳纳米管的快速拾取策略及电学性能测量[J].光学精密工程,2021,29(08):1857-1866.

MA Li,GENG Song-chao,YANG Quan,et al.Fast picking strategy and electrical properties measurement of carbon nanotubes[J].Optics and Precision Engineering,2021,29(08):1857-1866.
马立,耿松超,杨权等.碳纳米管的快速拾取策略及电学性能测量[J].光学精密工程,2021,29(08):1857-1866. DOI： 10.37188/OPE.20212908.1857.

MA Li,GENG Song-chao,YANG Quan,et al.Fast picking strategy and electrical properties measurement of carbon nanotubes[J].Optics and Precision Engineering,2021,29(08):1857-1866. DOI： 10.37188/OPE.20212908.1857.

摘要

碳纳米管的拾取对大规模制造和修复电子纳米器件具有重要意义。本文在扫描电子显微镜内搭建微纳操作系统，提出在高低放大倍率下协同操作钨针和原子力显微镜探针与碳纳米管搭建切割拾取电路，采用通电切割方法实现碳纳米管的快速拾取。保持钨针与碳纳米管接触状态不变，建立碳纳米管与原子力显微镜探针点接触和线接触电路模型，分析接触位姿对电学性能的影响，并在线接触电路模型情况下改变碳纳米管与原子力显微镜探针的接触长度，研究接触长度对接触电阻的影响。实验结果表明，本文提出的操作策略能有效地提高碳纳米管的拾取成功率并将操作时间控制在8 min左右；在0~1 V的低电压且碳纳米管与金表面线接触的状态下，碳纳米管与钨针和金表面为欧姆接触，且产生的接触电阻与金属的接触长度成反比，而在点接触状态下则为非欧姆接触，表明接触状态对碳纳米管与金属间的电学性能有影响。本文的碳纳米管拾取策略和电学性能测量结果，对碳纳米管的拾取、性能测量和装配工作具有一定的指导意义。

Abstract

Carbon nanotubes’ pick-up is important to large-scale manufacturing and repairing electronic nano device. In this paper， a micro-nano operating system was built in a scanning electron microscope. A cutting pick-up circuit was proposed by collaboration of tungsten needle and AFM with carbon nanotubes under different magnifications. The energized cutting method was used to realize the rapid picking of carbon nanotubes. Under the situation of containing the contact state of tungsten needle and carbon nanotubes， the point contact circuit model and the line contact circuit model of carbon nanotubes and AFM were established， and the influence of contact pose on electrical properties was analyzed. In addition， the contact length of carbon nanotubes and AFM changing under the condition of the line contact circuit model in order to study the influence of contact length on contact resistance. The results show that the operation strategy can effectively improve the success rate of carbon nanotubes’ pick-up and control the operation time in approximately 8 min； under the low voltage of 0-1 V and the line contact state between carbon nanotubes and gold surface， the contact resistance between carbon nanotubes and tungsten needle or gold surface is ohmic contact， and the contact resistance is inversely proportional to the contact length， while in the point contact state， the contact resistance is non-ohmic contact which indicates that the contact state has effect on the electrical properties between carbon nanotubes and metal. The strategy of carbon nanotubes’ pick-up and the results of electrical properties measurement provide guidance for carbon nanotubes’ pick-up， properties measurement and assembly.

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references

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