Design and verification of anti-resonance frequency controller for two stage drive vibration isolation system

FU Yuan; LI Shu-sen; LIU Jiu-qing; ZHAO Bo

doi:10.37188/OPE.20212908.1899

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Design and verification of anti-resonance frequency controller for two stage drive vibration isolation system

Micro\/Nano Technology and Fine Mechanics | 更新时间：2026-09-12

- Design and verification of anti-resonance frequency controller for two stage drive vibration isolation system
- Optics and Precision Engineering Vol. 29, Issue 8, Pages: 1899-1909(2021)
- 作者机构：
  
  1.东北林业大学机电工程学院，黑龙江哈尔滨 150040
  2.大庆油田有限责任公司采气分公司，黑龙江大庆 163000
  3.哈尔滨工业大学超精密仪器技术及智能化工业和信息化部重点实验室，黑龙江哈尔滨 150080
- 作者简介：
- 基金信息：
- DOI：10.37188/OPE.20212908.1899
  CLC： TP394.1;TH691.9
- Received：25 January 2021，
  
  Revised：2021-03-30，
  
  Published：15 August 2021
- 稿件说明：
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付源,李树森,刘九庆等.双级驱动隔振系统反共振频率控制器设计与验证[J].光学精密工程,2021,29(08):1899-1909.

FU Yuan,LI Shu-sen,LIU Jiu-qing,et al.Design and verification of anti-resonance frequency controller for two stage drive vibration isolation system[J].Optics and Precision Engineering,2021,29(08):1899-1909.
付源,李树森,刘九庆等.双级驱动隔振系统反共振频率控制器设计与验证[J].光学精密工程,2021,29(08):1899-1909. DOI： 10.37188/OPE.20212908.1899.

FU Yuan,LI Shu-sen,LIU Jiu-qing,et al.Design and verification of anti-resonance frequency controller for two stage drive vibration isolation system[J].Optics and Precision Engineering,2021,29(08):1899-1909. DOI： 10.37188/OPE.20212908.1899.

摘要

为了解决扫频过程中隔振器不能很好地隔离扫频频率在0Hz和固有频率之间的平台基座惯性力的干扰，提出一种双级驱动主动隔振系统的可调反共振频率控制器。对双级驱动主动隔振系统的运动学模型、可调反共振频率控制器及参数设计等进行了研究。首先，根据设计的双级驱动主动隔振系统建立其运动学模型。接着，基于系统的反共振频率特性提出了可调反共振频率控制器及其参数设计。然后，分析可调反共振频率控制的隔振性能。最后，搭建实验平台进行实验验证。实验结果表明：从0到初始反共振频率，闭环传递率小于

15 dB。此外，通过改变控制器的参数，附加的反共振频率可以在0 Hz和初始反共振频率之间调节。且在附加反共振频率附近，闭环传递率小于

30 dB。利用该控制器，有效载荷的扰动幅度从4 mm·s

衰减到0.5 mm·s

，平台基座的冲击扰动降低了87.5%。双级驱动主动隔振系统配合可调反共振频率控制器可以通过跟踪扫频干扰实时调整反共振频率点，可应用于半导体制造业超低振动要求的扫频环境，达到良好的隔振效果。

Abstract

Existing vibration isolators cannot isolate inertial force interferences of a platform base under a frequency sweep between 0 Hz and platform natural frequency. To solve this problem， a dual-stage actuation active vibration isolation system for an adjustable anti-resonance frequency controller is proposed in this study. The mathematical model of the adjustable anti-resonance frequency controller and parameter design of the dual-stage actuation active vibration isolation system are examined. First， a mathematical model for the designed dual-stage actuation active vibration isolation system is established. Then， based on the anti-resonance frequency characteristics of the system， an adjustable anti resonance frequency controller and its design parameters are proposed. Thereafter， the vibration isolation performance of the adjustable antiresonance frequency control is analyzed. Finally， the effectiveness of the proposed system is verified experimentally. The experiment results show that the closed-loop transmissibility of the proposed controller is less than -15 dB from zero to the first anti-resonance frequency. Furthermore， it is less than -30 dB around the added anti-resonance frequency， which is adjusted between 0 Hz and the first anti-resonance frequency by changing the parameters of the proposed controller. With the proposed controller， the disturbance amplitude of the payload decays from 4 to 0.5 mm/s with a reduction of 87.5% for an impulse disturbance applied to the platform base. The dual-stage actuation active vibration isolation system combined with the adjustable anti-resonance frequency controller can adjust the anti-resonance frequency point in real time by tracking the frequency sweep interference. Our proposed system isolates vibrations effectively and can be applied to the frequency sweep applications with ultra-low vibration requirements， such as semiconductor manufacturing industry.

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