Detecting divided aperture laser differential confocal radius measurement

Yan-hong LI; Shuai YANG; Shun TANG; Wei-qian ZHAO; Li-rong QIU

doi:10.37188/OPE.20212910.2287

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Detecting divided aperture laser differential confocal radius measurement

Modern Applied Optics | 更新时间：2021-11-01

- Detecting divided aperture laser differential confocal radius measurement
- Optics and Precision Engineering Vol. 29, Issue 10, Pages: 2287-2295(2021)
- 作者机构：
  
  北京理工大学光电学院精密光电测试仪器及技术北京市重点实验室，北京 100081
- 作者简介：
- 基金信息：
- DOI：10.37188/OPE.20212910.2287
  CLC： TH741
- Received：05 March 2021，
  
  Revised：30 March 2021，
  
  Published：15 October 2021
- 稿件说明：
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李彦宏,杨帅,唐顺等.后置分光瞳激光差动共焦曲率半径测量[J].光学精密工程,2021,29(10):2287-2295.

LI Yan-hong,YANG Shuai,TANG Shun,et al.Detecting divided aperture laser differential confocal radius measurement[J].Optics and Precision Engineering,2021,29(10):2287-2295.
李彦宏,杨帅,唐顺等.后置分光瞳激光差动共焦曲率半径测量[J].光学精密工程,2021,29(10):2287-2295. DOI： 10.37188/OPE.20212910.2287.

LI Yan-hong,YANG Shuai,TANG Shun,et al.Detecting divided aperture laser differential confocal radius measurement[J].Optics and Precision Engineering,2021,29(10):2287-2295. DOI： 10.37188/OPE.20212910.2287.

摘要

为了提高曲率半径的测量精度，提出后置分光瞳激光差动共焦曲率半径测量方法，研究了后置分光瞳差动共焦测量原理和虚拟针孔定位算法。在共焦测量系统的探测光路中通过D型光阑遮挡，使一半测量光束聚焦在焦面探测CCD，采用虚拟针孔定位算法对该CCD探测的艾里斑进行分割焦斑差动相减归一化探测，然后利用差动共焦曲线的零点对被测件的“共焦”位置和“猫眼”位置进行精确定焦并测得它们之间的距离，最终实现曲率半径的高精度测量。实验结果表明：该方法测量的曲率半径为

121.209 4 mm，测量重复性优于5×10

，无需根据测量物镜和被测镜的参数进行硬件调整，不仅满足曲率半径高精度测量的需求，还简化了光路结构，缩减了研制装调成本，为曲率半径的高精度、快速测量提供了新途径。

Abstract

To improve the measurement accuracy of curvature radius， a method of detecting divided aperture laser differential confocal radius measurement was proposed. In this study， the principle of this new measurement and the algorithm of virtual pinhole positioning were explored. The detection light path of the confocal measurement system was blocked by a D-type aperture such that half of the measurement beam was focused on the focal plane detection charge-coupled device （CCD）. The Airy disk detected by the CCD was divided into focal spot differential subtraction normalized detection using the virtual pinhole positioning algorithm. Then， the zero point of the differential confocal curve was used to accurately determine the focus of the "confocal" position and the "cat's eye" position of the test lens， measuring the distance between them. Finally， a high-precision measurement of the radius of curvature was achieved. Experiments and analysis show that the radius of curvature measured by this method is

121.209 4 mm， with a repeatability better than 5×10

， without the need to adjust the hardware according to the parameters of the measuring objective and tested lenses. This meets the requirements for high-precision measurement of the radius of curvature and simplifies the optical path structure， reducing the structure and adjustment costs and providing a new method for rapid and high-precision measurements of the radius of curvature.

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