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Research progress of microcapacitors: from preparation technology to development trend
Micro/Nano Technology and Fine Mechanics | 更新时间:2022-01-07
    • Research progress of microcapacitors: from preparation technology to development trend

    • Optics and Precision Engineering   Vol. 29, Issue 12, Pages: 2818-2831(2021)
    • DOI:10.37188/OPE.20212912.2818    

      CLC: TM21
    • Received:05 January 2021

      Revised:30 March 2021

      Published:15 December 2021

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  • XIONG Li,HU Jin,YANG Zhao,et al.Research progress of microcapacitors: from preparation technology to development trend[J].Optics and Precision Engineering,2021,29(12):2818-2831. DOI: 10.37188/OPE.20212912.2818.

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