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1.State Key Laboratory of Modern Optical Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, China
Published:10 September 2022,
Received:09 May 2022,
Revised:07 June 2022,
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胡逸凡,章海军,倪凯佳.三角放大型压电陶瓷微纳米驱动机构[J].光学精密工程,2022,30(17):2094-2099.
HU Yifan,ZHANG Haijun,NI Kaijia.Mini-piezo-element drive microactuator based on triangular amplification[J].Optics and Precision Engineering,2022,30(17):2094-2099.
胡逸凡,章海军,倪凯佳.三角放大型压电陶瓷微纳米驱动机构[J].光学精密工程,2022,30(17):2094-2099. DOI: 10.37188/OPE.20223000.0223.
HU Yifan,ZHANG Haijun,NI Kaijia.Mini-piezo-element drive microactuator based on triangular amplification[J].Optics and Precision Engineering,2022,30(17):2094-2099. DOI: 10.37188/OPE.20223000.0223.
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