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1.State Key Laboratory of Tribology & Beijing Key Lab of Precision/Ultra-precision Manufacturing Equipments and Control, Department of Mechanical Engineering, Tsinghua University, Beijing 100084, China
Published:10 March 2022,
Received:25 August 2021,
Revised:24 September 2021,
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王磊杰,郭子文,叶伟楠等.超精密空间分离式外差利特罗平面光栅编码器位移测量系统[J].光学精密工程,2022,30(05):499-509.
WANG Leijie,GUO Ziwen,YE Weinan,et al.Ultra-precision spatial-separated heterodyne Littrow grid encoder displacement measurement system[J].Optics and Precision Engineering,2022,30(05):499-509.
王磊杰,郭子文,叶伟楠等.超精密空间分离式外差利特罗平面光栅编码器位移测量系统[J].光学精密工程,2022,30(05):499-509. DOI: 10.37188/OPE.20223005.0499.
WANG Leijie,GUO Ziwen,YE Weinan,et al.Ultra-precision spatial-separated heterodyne Littrow grid encoder displacement measurement system[J].Optics and Precision Engineering,2022,30(05):499-509. DOI: 10.37188/OPE.20223005.0499.
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