High-accuracy characterization of areal micro-nano steps measured with optical microscopes

WANG Chen; MENG Xianyu; YU Yingjie; KONG Ming; LIU Wei

doi:10.37188/OPE.20223006.0651

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High-accuracy characterization of areal micro-nano steps measured with optical microscopes

Modern Applied Optics | 更新时间：2026-09-12

- High-accuracy characterization of areal micro-nano steps measured with optical microscopes
- Optics and Precision Engineering Vol. 30, Issue 6, Pages: 651-658(2022)
- 作者机构：
  
  1.上海大学机电工程与自动化学院，上海 200444
  2.中国计量大学计量测试工程学院，浙江杭州 310018
- 作者简介：
- 基金信息：
- DOI：10.37188/OPE.20223006.0651
  CLC： TP391.4;TH742
- Received：14 July 2021，
  
  Revised：2021-09-06，
  
  Published：25 March 2022
- 稿件说明：
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王陈,孟宪昱,于瀛洁等.三维微纳米台阶高精度光学显微测量量化表征[J].光学精密工程,2022,30(06):651-658.

WANG Chen,MENG Xianyu,YU Yingjie,et al.High-accuracy characterization of areal micro-nano steps measured with optical microscopes[J].Optics and Precision Engineering,2022,30(06):651-658.
王陈,孟宪昱,于瀛洁等.三维微纳米台阶高精度光学显微测量量化表征[J].光学精密工程,2022,30(06):651-658. DOI： 10.37188/OPE.20223006.0651.

WANG Chen,MENG Xianyu,YU Yingjie,et al.High-accuracy characterization of areal micro-nano steps measured with optical microscopes[J].Optics and Precision Engineering,2022,30(06):651-658. DOI： 10.37188/OPE.20223006.0651.

摘要

三维微纳米台阶光学显微测量信息为多维形貌数据，其数据量庞大复杂、多维相关性低、表征难度大，且通常存在测量坏点影响关键尺寸表征精度。本文提出了一种三维微纳米台阶高精度光学显微测量量化表征方法。首先，针对三维微纳米台阶的结构特征选取测量系统并设计测量方法，获取其三维形貌点云数据信息；其次，建立三维形貌实测数据维度重构方法，将复杂的多维面形数据降维至有序二维空间；基于K-means聚类算法和数据映射，创建台阶高度参数量化表征模型，实现识别离群值的同时将二维数据点集中的质心距离映射为台阶高度值；最后，通过迭代收敛设计，进一步提高算法表征的准确度和鲁棒性。对两种微纳台阶标准物质进行实验，结果表明，在测量存在离群值等坏点情况下，本方法能够高精度表征出台阶高度参数，与校准值比对，误差小于1.5%。

Abstract

The measurement data of areal micro-nano steps using optical microscopes are multi-dimensional topographical data. They are huge and complex with low correlation. It is very difficult to characterize such a type of measurement. Additionally， the measurement usually includes bad points that deteriorate its accuracy. This paper proposes a method for characterizing areal micro-nano steps using optical microscopic profilometries. First， the measurement system is selected， and the measurement method is designed according to the structural characteristics of the micro-nano steps to obtain the measurement data. Second， the reconstruction method is developed for the areal topographic measurement data， decreasing the complex multi-dimensional data into sequenced 2D coordinates. Subsequently， quantitative characterization models are created for parameterization of step heights， identifying outliers while mapping the centroid of 2D points into step height parameters. Finally， the accuracy and robustness of the algorithm is further improved by iterative convergence. Experiments on two step height standard artefacts are carried out. The results show that the method can accurately characterize the steps for data with measurement defects. A comparison with certified values shows that the measurement and characterization error is below 1.5%.

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