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High-accuracy characterization of areal micro-nano steps measured with optical microscopes
Modern Applied Optics | 更新时间:2022-04-26
    • High-accuracy characterization of areal micro-nano steps measured with optical microscopes

    • Optics and Precision Engineering   Vol. 30, Issue 6, Pages: 651-658(2022)
    • DOI:10.37188/OPE.20223006.0651    

      CLC: TP391.4;TH742
    • Received:14 July 2021

      Revised:06 September 2021

      Published:25 March 2022

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  • WANG Chen,MENG Xianyu,YU Yingjie,et al.High-accuracy characterization of areal micro-nano steps measured with optical microscopes[J].Optics and Precision Engineering,2022,30(06):651-658. DOI: 10.37188/OPE.20223006.0651.

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