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1.School of Mechatronic Engineering and Automation,Shanghai University, Shanghai 200444, China
2.College of Metrology & Measurement Engineering, China Jiliang University, Hangzhou 310018, China
Published:25 March 2022,
Received:14 July 2021,
Revised:06 September 2021,
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王陈,孟宪昱,于瀛洁等.三维微纳米台阶高精度光学显微测量量化表征[J].光学精密工程,2022,30(06):651-658.
WANG Chen,MENG Xianyu,YU Yingjie,et al.High-accuracy characterization of areal micro-nano steps measured with optical microscopes[J].Optics and Precision Engineering,2022,30(06):651-658.
王陈,孟宪昱,于瀛洁等.三维微纳米台阶高精度光学显微测量量化表征[J].光学精密工程,2022,30(06):651-658. DOI: 10.37188/OPE.20223006.0651.
WANG Chen,MENG Xianyu,YU Yingjie,et al.High-accuracy characterization of areal micro-nano steps measured with optical microscopes[J].Optics and Precision Engineering,2022,30(06):651-658. DOI: 10.37188/OPE.20223006.0651.
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