浏览全部资源
扫码关注微信
1.上海大学 机电工程与自动化学院,上海 200444
2.中国计量大学 计量测试工程学院,浙江 杭州 310018
Received:14 July 2021,
Revised:06 September 2021,
Published:25 March 2022
移动端阅览
王陈,孟宪昱,于瀛洁等.三维微纳米台阶高精度光学显微测量量化表征[J].光学精密工程,2022,30(06):651-658.
WANG Chen,MENG Xianyu,YU Yingjie,et al.High-accuracy characterization of areal micro-nano steps measured with optical microscopes[J].Optics and Precision Engineering,2022,30(06):651-658.
王陈,孟宪昱,于瀛洁等.三维微纳米台阶高精度光学显微测量量化表征[J].光学精密工程,2022,30(06):651-658. DOI: 10.37188/OPE.20223006.0651.
WANG Chen,MENG Xianyu,YU Yingjie,et al.High-accuracy characterization of areal micro-nano steps measured with optical microscopes[J].Optics and Precision Engineering,2022,30(06):651-658. DOI: 10.37188/OPE.20223006.0651.
三维微纳米台阶光学显微测量信息为多维形貌数据,其数据量庞大复杂、多维相关性低、表征难度大,且通常存在测量坏点影响关键尺寸表征精度。本文提出了一种三维微纳米台阶高精度光学显微测量量化表征方法。首先,针对三维微纳米台阶的结构特征选取测量系统并设计测量方法,获取其三维形貌点云数据信息;其次,建立三维形貌实测数据维度重构方法,将复杂的多维面形数据降维至有序二维空间;基于K-means聚类算法和数据映射,创建台阶高度参数量化表征模型,实现识别离群值的同时将二维数据点集中的质心距离映射为台阶高度值;最后,通过迭代收敛设计,进一步提高算法表征的准确度和鲁棒性。对两种微纳台阶标准物质进行实验,结果表明,在测量存在离群值等坏点情况下,本方法能够高精度表征出台阶高度参数,与校准值比对,误差小于1.5%。
The measurement data of areal micro-nano steps using optical microscopes are multi-dimensional topographical data. They are huge and complex with low correlation. It is very difficult to characterize such a type of measurement. Additionally, the measurement usually includes bad points that deteriorate its accuracy. This paper proposes a method for characterizing areal micro-nano steps using optical microscopic profilometries. First, the measurement system is selected, and the measurement method is designed according to the structural characteristics of the micro-nano steps to obtain the measurement data. Second, the reconstruction method is developed for the areal topographic measurement data, decreasing the complex multi-dimensional data into sequenced 2D coordinates. Subsequently, quantitative characterization models are created for parameterization of step heights, identifying outliers while mapping the centroid of 2D points into step height parameters. Finally, the accuracy and robustness of the algorithm is further improved by iterative convergence. Experiments on two step height standard artefacts are carried out. The results show that the method can accurately characterize the steps for data with measurement defects. A comparison with certified values shows that the measurement and characterization error is below 1.5%.
吴俊杰 , 李源 . 基于纳米测量机的微结构三维坐标测量 [J]. 光学 精密工程 , 2020 , 28 ( 10 ): 2252 - 2259 . doi: 10.37188/OPE.20202810.2252 http://dx.doi.org/10.37188/OPE.20202810.2252
WU J J , LI Y . Three-dimensional coordinate measurement of microstructures based on nano measuring machine [J]. Opt. Precision Eng. , 2020 , 28 ( 10 ): 2252 - 2259 . (in Chinese) . doi: 10.37188/OPE.20202810.2252 http://dx.doi.org/10.37188/OPE.20202810.2252
LI Y , WU J J , LEI L H , et al . Research on characterization methods of nano dimension standards [J]. Advanced Materials Research , 2013 , 662 : 88 - 94 . doi: 10.4028/www.scientific.net/amr.662.88 http://dx.doi.org/10.4028/www.scientific.net/amr.662.88
胡凯 , 蒋向前 , 刘晓军 . 台阶高度的评定方法 [J]. 中国仪器仪表 , 2009 ( 10 ): 69 - 72 . doi: 10.3969/j.issn.1005-2852.2009.10.015 http://dx.doi.org/10.3969/j.issn.1005-2852.2009.10.015
HU K , JIANG X Q , LIU X J . Evaluation method of step height [J]. China Instrumentation , 2009 ( 10 ): 69 - 72 . (in Chinese) . doi: 10.3969/j.issn.1005-2852.2009.10.015 http://dx.doi.org/10.3969/j.issn.1005-2852.2009.10.015
余茜茜 , 施玉书 , 张树 , 等 . 微纳米台阶高度评定方法的比较与分析 [J]. 计量科学与技术 , 2020 ( 8 ): 29 - 33 . doi: 10.3969/j.issn.1000-0771.2020.08.06 http://dx.doi.org/10.3969/j.issn.1000-0771.2020.08.06
YU X X , SHI Y S , ZHANG S , et al . Comparison and analysis of micro-nano step height evaluation methods [J]. Metrology Science and Technology , 2020 ( 8 ): 29 - 33 . (in Chinese) . doi: 10.3969/j.issn.1000-0771.2020.08.06 http://dx.doi.org/10.3969/j.issn.1000-0771.2020.08.06
ISO 25178-700: 2020 . Geometrical product specifications (GPS) - Surface texture: Areal-Part 700: Calibration, adjustment and verification of areal topography measuring instruments [S]. Switherland : TC 213 , 2020 .
ISMAIL M F , YANAGI K , FUJII A . An outlier correction procedure and its application to areal surface data measured by optical instruments [J]. Measurement Science and Technology , 2010 , 21 ( 10 ): 105105 . doi: 10.1088/0957-0233/21/10/105105 http://dx.doi.org/10.1088/0957-0233/21/10/105105
LE GOIC G , BROWN C A , FAVRELIERE H , et al . Outlier filtering: a new method for improving the quality of surface measurements [J]. Measurement Science and Technology , 2013 , 24 ( 1 ): 015001 . doi: 10.1088/0957-0233/24/1/015001 http://dx.doi.org/10.1088/0957-0233/24/1/015001
NURUNNABI A , WEST G , BELTON D . Outlier detection and robust normal-curvature estimation in mobile laser scanning 3D point cloud data [J]. Pattern Recognition , 2015 , 48 ( 4 ): 1404 - 1419 . doi: 10.1016/j.patcog.2014.10.014 http://dx.doi.org/10.1016/j.patcog.2014.10.014
HEIKKINEN V , KASSAMAKOV I , VIITALA T , et al . Step height standards based on self-assembly for 3D metrology of biological samples [J]. Measurement Science and Technology , 2020 , 31 ( 9 ): 094008 . doi: 10.1088/1361-6501/ab8c6a http://dx.doi.org/10.1088/1361-6501/ab8c6a
葛广路 , 吴晓春 , 赵蕊 . 纳米标准样品国内外研究进展 [J]. 中国标准化 , 2007 , 372 ( 9 ): 10 - 13 . doi: 10.3969/j.issn.1002-5944.2007.09.004 http://dx.doi.org/10.3969/j.issn.1002-5944.2007.09.004
Ge G L , Wu X C , Zhao R . Research progress of nano standard samples at home and abroad [J]. China Standardization , 2007 , 372 ( 9 ): 10 - 13 . (in Chinese) . doi: 10.3969/j.issn.1002-5944.2007.09.004 http://dx.doi.org/10.3969/j.issn.1002-5944.2007.09.004
MA S , XIE F , WANG Y Z , et al . A high precision step height measurement system of optical fiber multiplexed interferometry [J]. Measurement , 2015 , 59 : 290 - 295 . doi: 10.1016/j.measurement.2014.08.049 http://dx.doi.org/10.1016/j.measurement.2014.08.049
LI C S , YANG S M , WANG Y M , et al . Measurement and characterization of a nano-scale multiple-step height sample using a stylus profiler [J]. Applied Surface Science , 2016 , 387 : 732 - 735 . doi: 10.1016/j.apsusc.2016.06.177 http://dx.doi.org/10.1016/j.apsusc.2016.06.177
LI W , YU X X , GAO S T , et al . Calibration method of curvature distortion in step height measurement by atomic force microscopy [J]. IOP Conference Series: Materials Science and Engineering , 2020 , 715 ( 1 ): 012056 . doi: 10.1088/1757-899x/715/1/012056 http://dx.doi.org/10.1088/1757-899x/715/1/012056
Groot P J , Fitzgerald D . Measurement, certification and use of step-height calibration specimens in optical metrology [C]. Optical Measurement Systems for Industrial Inspection X. International Society for Optics and Photonics , 2017 , 10329 : 1032919 . doi: 10.1117/12.2269800 http://dx.doi.org/10.1117/12.2269800
JAIN A K . Data clustering: 50 years beyond K-means [J]. Pattern Recognition Letters , 2010 , 31 ( 8 ): 651 - 666 . doi: 10.1016/j.patrec.2009.09.011 http://dx.doi.org/10.1016/j.patrec.2009.09.011
施玉书 , 李伟 , 余茜茜 , 等 . 基于原子力显微术的5 nm台阶高度标准物质溯源与定值技术研究 [J]. 仪器仪表学报 , 2020 , 41 ( 3 ): 79 - 86 .
SHI Y S , LI W , YU X X , et al . Research on the traceability and characterization technology of 5 nm step height reference material based on atomic force microscopy [J]. Chinese Journal of Scientific Instrument , 2020 , 41 ( 3 ): 79 - 86 . (in Chinese)
雷李华 , 邹子英 , 李源 , 等 . 纳米台阶标准样板的制备和表征 [J]. 微纳电子技术 , 2011 , 48 ( 9 ): 600 - 605 . doi: 10.3969/j.issn.1671-4776.2011.09.011 http://dx.doi.org/10.3969/j.issn.1671-4776.2011.09.011
LEI L H , ZOU Z Y , LI Y , et al . Preparation and characterization of nanometer step standards [J]. Micronanoelectronic Technology , 2011 , 48 ( 9 ): 600 - 605 . (in Chinese) . doi: 10.3969/j.issn.1671-4776.2011.09.011 http://dx.doi.org/10.3969/j.issn.1671-4776.2011.09.011
刘乾 , 黄小津 , 李璐璐 , 等 . 双波长干涉显微镜波长的双约束标定 [J]. 光学 精密工程 , 2021 , 29 ( 4 ): 656 - 664 . doi: 10.37188/OPE.20212904.0656 http://dx.doi.org/10.37188/OPE.20212904.0656
LIU Q , HUANG X J , LI L L , et al . Wavelength calibration with dual constraints for dual-wavelength interference microscope [J]. Opt. Precision Eng. , 2021 , 29 ( 4 ): 656 - 664 . (in Chinese) . doi: 10.37188/OPE.20212904.0656 http://dx.doi.org/10.37188/OPE.20212904.0656
李磊刚 , 梁晋 , 唐正宗 , 等 . 用于工业三维点测量的接触式光学探针 [J]. 光学 精密工程 , 2014 , 22 ( 6 ): 1477 - 1485 . doi: 10.3788/OPE.20142206.1477 http://dx.doi.org/10.3788/OPE.20142206.1477
LI L G , LIANG J , TANG Z Z , et al . Optical and contact probe for industrial measurement of 3-D points [J]. Opt. Precision Eng. , 2014 , 22 ( 6 ): 1477 - 1485 . (in Chinese) . doi: 10.3788/OPE.20142206.1477 http://dx.doi.org/10.3788/OPE.20142206.1477
LONG Z C , HUAI W S , NING Z Y , et al . Fabrication and characterisation of nanostructure step height sample [J]. International Journal of Computing Science and Mathematics , 2020 , 12 ( 1 ): 92 . doi: 10.1504/ijcsm.2020.10030825 http://dx.doi.org/10.1504/ijcsm.2020.10030825
0
Views
1055
下载量
1
CSCD
Publicity Resources
Related Articles
Related Author
Related Institution