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Linear yaw compound piezoelectric micro-motion platform
Micro/Nano Technology and Fine Mechanics | 更新时间:2022-05-26
    • Linear yaw compound piezoelectric micro-motion platform

    • Optics and Precision Engineering   Vol. 30, Issue 9, Pages: 1058-1070(2022)
    • DOI:10.37188/OPE.20223009.1058    

      CLC: TH744;TP183
    • Received:06 January 2022

      Revised:15 March 2022

      Published:10 May 2022

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  • WANG Geng,WEI Weining,DAI Jun,et al.Linear yaw compound piezoelectric micro-motion platform[J].Optics and Precision Engineering,2022,30(09):1058-1070. DOI: 10.37188/OPE.20223009.1058.

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