Linear yaw compound piezoelectric micro-motion platform

Geng WANG; Weining WEI; Jun DAI; Yonggang YAN

doi:10.37188/OPE.20223009.1058

您当前的位置：

首页 >

文章列表页 >

Linear yaw compound piezoelectric micro-motion platform

Micro/Nano Technology and Fine Mechanics | 更新时间：2022-05-26

- Linear yaw compound piezoelectric micro-motion platform
- Optics and Precision Engineering Vol. 30, Issue 9, Pages: 1058-1070(2022)
- 作者机构：
  
  河南理工大学机械与动力工程学院，河南焦作 454000
- 作者简介：
- 基金信息：
- DOI：10.37188/OPE.20223009.1058
  CLC： TH744;TP183
- Received：06 January 2022，
  
  Revised：15 March 2022，
  
  Published：10 May 2022
- 稿件说明：
移动端阅览
王耿,魏维宁,代军等.线性偏摆复合型压电微动平台[J].光学精密工程,2022,30(09):1058-1070.

WANG Geng,WEI Weining,DAI Jun,et al.Linear yaw compound piezoelectric micro-motion platform[J].Optics and Precision Engineering,2022,30(09):1058-1070.
王耿,魏维宁,代军等.线性偏摆复合型压电微动平台[J].光学精密工程,2022,30(09):1058-1070. DOI： 10.37188/OPE.20223009.1058.

WANG Geng,WEI Weining,DAI Jun,et al.Linear yaw compound piezoelectric micro-motion platform[J].Optics and Precision Engineering,2022,30(09):1058-1070. DOI： 10.37188/OPE.20223009.1058.

摘要

为了研究微/纳米技术在光学、精密加工和精确定位等领域的应用，提出了一种线性偏摆复合型压电微动平台，以实现线性运动和偏摆运动。对平台的组成和工作原理进行阐述，建立两种运动的数学模型，并进行运动性能仿真。根据拟定的尺寸加工出样机，对样机的运动能力和频响特性进行测试。最后，通过比例积分微分（Proportional Integral Derivative， PID）反馈实现对平台的跟踪控制。仿真和实验结果表明：该平台具有良好的运动精度和解耦性，一阶固有频率可以达到333.8 Hz，能够实现24.924 μm的线性运动和1.330 mrad的角度摆动，实现了微/纳米级别的运动，在精密光学、精确定位等领域具有广阔的应用前景。

Abstract

To extend the applications of micro/nano technology in the fields of optics， precision machining， and precise positioning， this study introduces the design， analysis， and testing process for a two-degree-of-freedom micro-movement platform to achieve linear and yaw motion. First， the main composition and working principle of the designed platform are introduced. Subsequently， the mathematical models of the two motions are established and simulated to assess motion performance. A prototype is fabricated considering the size of the piezoelectric platform， and an experimental platform is established to test the motion capability and frequency response. Finally， the precise control of the platform is realized via proportional integral derivative method. The simulation and experimental results demonstrate that the platform achieves good motion accuracy and decoupling performance， with the first natural frequency reaching 333.8 Hz. Moreover， the platform can achieve 24.924 μm linear motion and 1.330 mrad angular swing. The designed structure can serve as reference for the design of micro-motion platform and the research of high-precision motion.

关键词

Keywords

references

BYKOV V A ， NOVIKOV Y A ， RAKOV A V ， et al . Defining the parameters of a cantilever tip AFM by reference structure ［J］. Ultramicroscopy ， 2003 ， 96 （ 2 ）： 175 - 180 . doi: 10.1016/s0304-3991(03)00005-6 http://dx.doi.org/10.1016/s0304-3991(03)00005-6

WANG S M ， YE Z Z ， YEH C C ， et al . New design of a low-cost micro machine tool with the high-precision variable-resolution mechanism ［J］. Optical and Quantum Electronics ， 2016 ， 48 （ 12 ）： 565 . doi: 10.1007/s11082-016-0836-z http://dx.doi.org/10.1007/s11082-016-0836-z

WANG G ， YAO X M ， CUI J J ， et al . A novel piezoelectric hysteresis modeling method combining LSTM and NARX neural networks ［J］. Modern Physics Letters B ， 2020 ， 34 （ 28 ）： 2050306 . doi: 10.1142/s0217984920503066 http://dx.doi.org/10.1142/s0217984920503066

陈国真，徐斯强，刘品宽，等 . 大行程快速反射镜的结构设计及带宽特性［J］. 光学精密工程， 2020 ， 28 （ 1 ）： 90 - 101 . doi: 10.3788/ope.20202801.0090 http://dx.doi.org/10.3788/ope.20202801.0090

CHEN G ZH ， XU S Q ， LIU P K ， et al . Structural design and bandwidth characteristic of a fast steering mirror with large travel range ［J］. Opt. Precision Eng. ， 2020 ， 28 （ 1 ）： 90 - 101 . （in Chinese） . doi: 10.3788/ope.20202801.0090 http://dx.doi.org/10.3788/ope.20202801.0090

ZHAO L ， WANG H ， DUAN W B ， et al . Design and analysis of a bi-axial centralized butterfly flexure hinge for fast steering mirrors ［J］. Journal of Astronomical Telescopes， Instruments， and Systems ， 2020 ， 6 ： 048003 . doi: 10.1117/1.jatis.6.4.048003 http://dx.doi.org/10.1117/1.jatis.6.4.048003

WANG P Y ， XU Q S . Design and testing of a flexure-based constant-force stage for biological cell micromanipulation ［J］. IEEE Transactions on Automation Science and Engineering ， 2018 ， 15 （ 3 ）： 1114 - 1126 . doi: 10.1109/tase.2017.2733553 http://dx.doi.org/10.1109/tase.2017.2733553

LUO Y Q ， LIU W Y . Analysis of the displacement of distributed compliant parallel-guiding mechanism considering parasitic rotation and deflection on the guiding plate ［J］. Mechanism and Machine Theory ， 2014 ， 80 ： 151 - 165 . doi: 10.1016/j.mechmachtheory.2014.06.005 http://dx.doi.org/10.1016/j.mechmachtheory.2014.06.005

张旭，赖磊捷，李朋志，等 . 电磁驱动柔顺微定位平台闭环频域逆迭代学习控制［J］. 光学精密工程， 2021 ， 29 （ 9 ）： 2149 - 2157 . doi: 10.37188/OPE.20212909.2149 http://dx.doi.org/10.37188/OPE.20212909.2149

ZHANG X ， LAI L J ， LI P ZH ， et al . Closed-loop inverse iterative learning control in frequency-domain for electromagnetic driven compliant micro-positioning platform ［J］. Opt. Precision Eng. ， 2021 ， 29 （ 9 ）： 2149 - 2157 . （in Chinese） . doi: 10.37188/OPE.20212909.2149 http://dx.doi.org/10.37188/OPE.20212909.2149

ZHONG X Q ， LIU C X ， DI Z M ， et al . Optimization and experiment of two-dimensional parallel decoupling image stabilization mechanism ［J］. International Journal of Precision Engineering and Manufacturing ， 2020 ， 21 （ 10 ）： 1965 - 1974 . doi: 10.1007/s12541-020-00393-x http://dx.doi.org/10.1007/s12541-020-00393-x

CLARK L ， SHIRINZADEH B ， ZHONG Y M ， et al . Design and analysis of a compact flexure-based precision pure rotation stage without actuator redundancy ［J］. Mechanism and Machine Theory ， 2016 ， 105 ： 129 - 144 . doi: 10.1016/j.mechmachtheory.2016.06.017 http://dx.doi.org/10.1016/j.mechmachtheory.2016.06.017

DAS T K ， SHIRINZADEH B ， GHAFARIAN M ， et al . Design， analysis and experimental investigations of a high precision flexure-based microgripper for micro/nano manipulation ［J］. Mechatronics ， 2020 ， 69 ： 102396 . doi: 10.1016/j.mechatronics.2020.102396 http://dx.doi.org/10.1016/j.mechatronics.2020.102396

ZHU J X ， HAO G B . Design and test of a compact compliant gripper using the Scott–Russell mechanism ［J］. Archives of Civil and Mechanical Engineering ， 2020 ， 20 （ 3 ）： 81 . doi: 10.1007/s43452-020-00085-3 http://dx.doi.org/10.1007/s43452-020-00085-3

NAN Z J ， XU Q S ， ZHANG Y B ， et al . Force-sensing robotic microinjection system for automated multi-cell injection with consistent quality ［J］. IEEE Access ， 2019 ， 7 ： 55543 - 55553 . doi: 10.1109/access.2019.2913592 http://dx.doi.org/10.1109/access.2019.2913592

KANG S ， LEE M G ， CHOI Y M . Six degrees-of-freedom direct-driven nanopositioning stage using crab-leg flexures ［J］. IEEE/ASME Transactions on Mechatronics ， 2020 ， 25 （ 2 ）： 513 - 525 . doi: 10.1109/tmech.2020.2972301 http://dx.doi.org/10.1109/tmech.2020.2972301

CLARK L ， SHIRINZADEH B ， BHAGAT U ， et al . Development and control of a two DOF linear-angular precision positioning stage ［J］. Mechatronics ， 2015 ， 32 ： 34 - 43 . doi: 10.1016/j.mechatronics.2015.10.001 http://dx.doi.org/10.1016/j.mechatronics.2015.10.001

CAI K H ， TIAN Y L ， WANG F J ， et al . Design and control of a 6-degree-of-freedom precision positioning system ［J］. Robotics and Computer-Integrated Manufacturing ， 2017 ， 44 ： 77 - 96 . doi: 10.1016/j.rcim.2016.08.005 http://dx.doi.org/10.1016/j.rcim.2016.08.005

WU S L ， SHAO Z X ， SU H J ， et al . An energy-based approach for kinetostatic modeling of general compliant mechanisms ［J］. Mechanism and Machine Theory ， 2019 ， 142 ： 103588 . doi: 10.1016/j.mechmachtheory.2019.103588 http://dx.doi.org/10.1016/j.mechmachtheory.2019.103588

Views

757

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Technological parameter optimization and quality effects on solid-liquid phase abrasive flow polishing

Analysis of influence factors of resolution in high-resolution 4f imaging system

Calibration of distortion for three-mirror off-axis

Mathematical model of contacting aspheric surface contour measurement

Related Author

Jing-lei HU

Kun DONG

Zhen WANG

Li-bin ZHOU

Xin-ming ZHANG

Jun-ye LI

XIA Chun-qiu

ZHONG Xing

Related Institution

College of Mechanical and Electric Engineering, Chang Chun University of Sicence and Technology

University of Chinese Academy of Sciences, Beijing 100049, China

Changchun Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Changchun 130033, China

Changchun Satellite Technology Co. LTD, Changchun 130031, China

University of Chinese Academy of Sciences

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰