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上海大学 精密机械工程系,上海 200444
Received:21 February 2022,
Revised:12 March 2022,
Published:25 June 2022
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王驰,陈伟,孙建美等.基于超小GRIN光纤镜头的MEMS光纤声传感器及性能测试方法[J].光学精密工程,2022,30(12):1406-1417.
WANG Chi,CHEN Wei,SUN Jianmei,et al.MEMS fiber optic acoustic sensor and performance testing method based on ultra-small GRIN fiber lens[J].Optics and Precision Engineering,2022,30(12):1406-1417.
王驰,陈伟,孙建美等.基于超小GRIN光纤镜头的MEMS光纤声传感器及性能测试方法[J].光学精密工程,2022,30(12):1406-1417. DOI: 10.37188/OPE.20223012.1406.
WANG Chi,CHEN Wei,SUN Jianmei,et al.MEMS fiber optic acoustic sensor and performance testing method based on ultra-small GRIN fiber lens[J].Optics and Precision Engineering,2022,30(12):1406-1417. DOI: 10.37188/OPE.20223012.1406.
研究一种MEMS膜片与超小GRIN光纤镜头相结合的MEMS光纤声传感器,以及基于扫频OCT (Swept Source Optical Coherence Tomography,SS-OCT)解调系统的MEMS光纤声传感器性能测试方法。在进行建模分析的基础上,设计并研究MEMS膜片与超小GRIN光纤镜头相结合的MEMS光纤声传感器的制作工艺,搭建基于SS-OCT的声振测量系统,通过开展单频声信号、混频声信号、频率响应、声压灵敏度和系统稳定性测量实验,进行传感器的性能测试与标定。结果显示,所研究的MEMS光纤声传感器样品的频响范围为50 Hz~4.5 kHz,在频率为300 Hz时传感器声压灵敏度21.63 nm/Pa,信噪比(SNR)为44.1 dB,线性度为98.97%,重复性标准偏差为0.003。结果表明所研究的MEMS光纤声传感器可行,而且利用SS-OCT解调系统可对其传感性能进行有效测量。
Research is conducted on a micro-electromechanical system (MEMS) fiber optic acoustic sensor by combining an MEMS diaphragm and ultra-small graded-index (GRIN) fiber optic lens, and a performance test method of the MEMS fiber optic acoustic sensor based on the swept-source optical coherence tomography (SS-OCT) demodulation system is investigated. The fabrication process of the MEMS optical fiber acoustic sensor combining the MEMS diaphragm and ultra-small GRIN optical fiber lens is designed and studied on the basis of modeling and analysis, and an acoustic and vibration measurement system based on SS-OCT is constructed. The performance test and calibration of the sensor are performed by conducting measurement experiments of a single-frequency acoustic signal, a mixed-frequency acoustic signal, frequency response, sound pressure sensitivity, and system stability. The results show that the frequency response range of the studied MEMS fiber optic acoustic sensor sample is 50 Hz-4.5 kHz. At a frequency of 300 Hz, the sound pressure sensitivity of the sensor is 21.63 nm/Pa, signal-to-noise ratio is 44.1 dB, linearity is 98.97%, and repeatability standard deviation is 0.003. The studied MEMS optical fiber acoustic sensor is shown to be feasible, and its sensing performance can be effectively measured by using the SS-OCT demodulation system.
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