Interferometric coherence imaging aberration due to non-rotationally symmetric secondary wavefront degradation

LÜ Sida; LI Mingzhuo; HU Haixiang; XU Donglin; ZHANG Xuejun

doi:10.37188/OPE.20223013.1523

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Interferometric coherence imaging aberration due to non-rotationally symmetric secondary wavefront degradation

Modern Applied Optics | 更新时间：2026-09-11

- Interferometric coherence imaging aberration due to non-rotationally symmetric secondary wavefront degradation
- Optics and Precision Engineering Vol. 30, Issue 13, Pages: 1523-1533(2022)
- 作者机构：
  
  1.中国科学院长春光学精密机械与物理研究所中国科学院光学系统先进制造技术重点实验室，吉林长春 130033
  2.中国科学院大学，北京 100049
- 作者简介：
- 基金信息：
- DOI：10.37188/OPE.20223013.1523
  CLC： TH744.3
- Received：21 December 2021，
  
  Revised：2022-02-07，
  
  Published：10 July 2022
- 稿件说明：
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吕思达,李明茁,胡海翔等.非回转对称次波前退化下的干涉相干成像像差[J].光学精密工程,2022,30(13):1523-1533.

LÜ Sida,LI Mingzhuo,HU Haixiang,et al.Interferometric coherence imaging aberration due to non-rotationally symmetric secondary wavefront degradation[J].Optics and Precision Engineering,2022,30(13):1523-1533.
吕思达,李明茁,胡海翔等.非回转对称次波前退化下的干涉相干成像像差[J].光学精密工程,2022,30(13):1523-1533. DOI： 10.37188/OPE.20223013.1523.

LÜ Sida,LI Mingzhuo,HU Haixiang,et al.Interferometric coherence imaging aberration due to non-rotationally symmetric secondary wavefront degradation[J].Optics and Precision Engineering,2022,30(13):1523-1533. DOI： 10.37188/OPE.20223013.1523.

摘要

干涉补偿检测系统中检测波前在补偿光路传播中发生退化，不可避免地引入了干涉相干成像像差，使得仪器的传递函数在高频段急剧下降，严重限制了检测精度。建立了一种干涉相干成像像差模型来揭示波前空间频率信息受干涉相干成像像差影响的退化机制，提出了非回转对称波前传播理论来阐述非回转对称波前的演化机理。然后，结合细光束追迹与波前演化的混合分析方法建立了干涉相干成像像差的数学模型，实现了次波前非回转对称传播条件下调频函数的数值化，进一步建立离焦量与波前分布的函数关系。最后，利用干涉补偿检测系统完成模型的实验验证。实验结果表明，实际值与预计值的残差结果均小于0.05 waves，模型的对称平均绝对百分比误差（SMAPE）为8.26%，平均相对误差（MRE）为3.35%，相比亚利桑那大学提出的基于Talbot效应与菲涅尔衍射分析得到的理论模型有更好的契合度。由此验证了该模型的准确性与预测性，该模型对于提高干涉补偿检测的检测精度有重要意义。

Abstract

The degradation of the detected wavefront during the propagation of the compensation optical path in the interferometric compensation detection system inevitably introduces interferometric coherent imaging aberration， causing the instrument transfer function to degrade sharply in the high frequency band and severely limiting the detection accuracy of interferometric compensation detection. In this study， an interferometric coherence imaging aberration model is developed to reveal the degradation mechanism of wavefront spatial frequency information caused by interferometric coherence imaging aberration. First， a non-rotationally symmetric wavefront propagation theory is proposed to describe the evolution mechanism of the non-rotationally symmetric wavefront. Second， the mathematical model of interferometric coherent imaging aberration is established by combining the hybrid analysis method of fine beam tracing and wavefront evolution， and the numerical value of the FM function under the condition of non-rotationally symmetric secondary wavefront propagation is realized to further establish the function relationship between the out-of-focus amount and wavefront distribution. Finally， the experimental verification of the model is completed using the interference compensation detection system. The experimental results show that the residuals of the actual and expected values are less than 0.05 waves， the symmetric mean absolute percentage error （SMAPE） of the model is 8.26%， and the mean relative error （MRE） is 3.35%； therefore， the proposed model has a better fit than the theoretical one based on Talbot effect and Fresnel diffraction analysis proposed by the University of Arizona. The accuracy and predictability of the proposed model， which is important for improving the detection accuracy of interference compensation detection， are verified.

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