Interferometric coherence imaging aberration due to non-rotationally symmetric secondary wavefront degradation

Sida LÜ; Mingzhuo LI; Haixiang HU; Donglin XU; Xuejun ZHANG

doi:10.37188/OPE.20223013.1523

您当前的位置：

首页 >

文章列表页 >

Interferometric coherence imaging aberration due to non-rotationally symmetric secondary wavefront degradation

Modern Applied Optics | 更新时间：2022-08-07

- Interferometric coherence imaging aberration due to non-rotationally symmetric secondary wavefront degradation
- Optics and Precision Engineering Vol. 30, Issue 13, Pages: 1523-1533(2022)
- 作者机构：
  
  1.中国科学院长春光学精密机械与物理研究所中国科学院光学系统先进制造技术重点实验室，吉林长春 130033
  2.中国科学院大学，北京 100049
- 作者简介：
- 基金信息：
- DOI：10.37188/OPE.20223013.1523
  CLC： TH744.3
- Received：21 December 2021，
  
  Revised：07 February 2022，
  
  Published：10 July 2022
- 稿件说明：
移动端阅览
吕思达,李明茁,胡海翔等.非回转对称次波前退化下的干涉相干成像像差[J].光学精密工程,2022,30(13):1523-1533.

LÜ Sida,LI Mingzhuo,HU Haixiang,et al.Interferometric coherence imaging aberration due to non-rotationally symmetric secondary wavefront degradation[J].Optics and Precision Engineering,2022,30(13):1523-1533.
吕思达,李明茁,胡海翔等.非回转对称次波前退化下的干涉相干成像像差[J].光学精密工程,2022,30(13):1523-1533. DOI： 10.37188/OPE.20223013.1523.

LÜ Sida,LI Mingzhuo,HU Haixiang,et al.Interferometric coherence imaging aberration due to non-rotationally symmetric secondary wavefront degradation[J].Optics and Precision Engineering,2022,30(13):1523-1533. DOI： 10.37188/OPE.20223013.1523.

摘要

干涉补偿检测系统中检测波前在补偿光路传播中发生退化，不可避免地引入了干涉相干成像像差，使得仪器的传递函数在高频段急剧下降，严重限制了检测精度。建立了一种干涉相干成像像差模型来揭示波前空间频率信息受干涉相干成像像差影响的退化机制，提出了非回转对称波前传播理论来阐述非回转对称波前的演化机理。然后，结合细光束追迹与波前演化的混合分析方法建立了干涉相干成像像差的数学模型，实现了次波前非回转对称传播条件下调频函数的数值化，进一步建立离焦量与波前分布的函数关系。最后，利用干涉补偿检测系统完成模型的实验验证。实验结果表明，实际值与预计值的残差结果均小于0.05 waves，模型的对称平均绝对百分比误差（SMAPE）为8.26%，平均相对误差（MRE）为3.35%，相比亚利桑那大学提出的基于Talbot效应与菲涅尔衍射分析得到的理论模型有更好的契合度。由此验证了该模型的准确性与预测性，该模型对于提高干涉补偿检测的检测精度有重要意义。

Abstract

The degradation of the detected wavefront during the propagation of the compensation optical path in the interferometric compensation detection system inevitably introduces interferometric coherent imaging aberration， causing the instrument transfer function to degrade sharply in the high frequency band and severely limiting the detection accuracy of interferometric compensation detection. In this study， an interferometric coherence imaging aberration model is developed to reveal the degradation mechanism of wavefront spatial frequency information caused by interferometric coherence imaging aberration. First， a non-rotationally symmetric wavefront propagation theory is proposed to describe the evolution mechanism of the non-rotationally symmetric wavefront. Second， the mathematical model of interferometric coherent imaging aberration is established by combining the hybrid analysis method of fine beam tracing and wavefront evolution， and the numerical value of the FM function under the condition of non-rotationally symmetric secondary wavefront propagation is realized to further establish the function relationship between the out-of-focus amount and wavefront distribution. Finally， the experimental verification of the model is completed using the interference compensation detection system. The experimental results show that the residuals of the actual and expected values are less than 0.05 waves， the symmetric mean absolute percentage error （SMAPE） of the model is 8.26%， and the mean relative error （MRE） is 3.35%； therefore， the proposed model has a better fit than the theoretical one based on Talbot effect and Fresnel diffraction analysis proposed by the University of Arizona. The accuracy and predictability of the proposed model， which is important for improving the detection accuracy of interference compensation detection， are verified.

关键词

Keywords

references

张学军，樊延超，鲍赫，等 . 超大口径空间光学遥感器的应用和发展［J］. 光学精密工程， 2016 ， 24 （ 11 ）： 2613 - 2626 . doi: 10.3788/OPE.20162411.2613 http://dx.doi.org/10.3788/OPE.20162411.2613

ZHANG X J ， FAN Y CH ， BAO H ， et al . Applications and development of ultra large aperture space optical remote sensors ［J］. Opt. Precision Eng. ， 2016 ， 24 （ 11 ）： 2613 - 2626 . （in Chinese） . doi: 10.3788/OPE.20162411.2613 http://dx.doi.org/10.3788/OPE.20162411.2613

PENG S ， CHANG J O ， ZHAO C ， et al . Optical testing for meter size aspheric optics ［J］. Proc SPIE ， 2015 ， 8466 （ 4 ）： 597 - 599 .

黎发志，罗霄，赵晶丽，等 . 离轴非球面的计算全息图高精度检测技术［J］. 光学精密工程， 2011 ， 19 （ 4 ）： 709 - 716 . doi: 10.3788/OPE.20111904.0709 http://dx.doi.org/10.3788/OPE.20111904.0709

LI F ZH ， LUO X ， ZHAO J L ， et al . Test of off-axis aspheric surfaces with CGH ［J］. Opt. Precision Eng. ， 2011 ， 19 （ 4 ）： 709 - 716 . （in Chinese） . doi: 10.3788/OPE.20111904.0709 http://dx.doi.org/10.3788/OPE.20111904.0709

李明，罗霄，薛栋林，等 . 考虑投影畸变设计大口径离轴非球面检测用计算全息图［J］. 光学精密工程， 2015 ， 23 （ 5 ）： 1246 - 1253 . doi: 10.3788/OPE.20152305.1246 http://dx.doi.org/10.3788/OPE.20152305.1246

LI M ， LUO X ， XUE D L ， et al . Design of CGH for testing large off-axis asphere by considering mapping distortion ［J］. Opt. Precision Eng. ， 2015 ， 23 （ 5 ）： 1246 - 1253 . （in Chinese） . doi: 10.3788/OPE.20152305.1246 http://dx.doi.org/10.3788/OPE.20152305.1246

曾雪锋，闫锋，薛栋林，等 . 计算全息图补偿检测离轴非球面中的投影畸变校正技术［J］. 中国激光， 2013 ， 40 （ 11 ）： 237 - 241 . doi: 10.3788/cjl201340.1109003 http://dx.doi.org/10.3788/cjl201340.1109003

ZENG X F ， YAN F ， XUE D L ， et al . Distortion correction in testing of off-axis asphere with computer-generated hologram ［J］. Chinese Journal of Lasers ， 2013 ， 40 （ 11 ）： 237 - 241 . （in Chinese） . doi: 10.3788/cjl201340.1109003 http://dx.doi.org/10.3788/cjl201340.1109003

徐抒岩，张旭升，范阔，等 . 大型光学系统波前检测中气流扰动的抑制［J］. 光学精密工程， 2020 ， 28 （ 1 ）： 80 - 89 . doi: 10.3788/ope.20202801.0080 http://dx.doi.org/10.3788/ope.20202801.0080

XU SH Y ， ZHANG X SH ， FAN K ， et al . Suppression of airflow turbulence in wavefront measurement for large-aperture optical systems ［J］. Opt. Precision Eng. ， 2020 ， 28 （ 1 ）： 80 - 89 . （in Chinese） . doi: 10.3788/ope.20202801.0080 http://dx.doi.org/10.3788/ope.20202801.0080

曹玉岩，王建立，初宏亮，等 . 大口径光学透镜的双级柔性支撑结构设计［J］. 光学精密工程， 2021 ， 29 （ 8 ）： 1867 - 1880 . doi: 10.37188/OPE.20212908.1867 http://dx.doi.org/10.37188/OPE.20212908.1867

CAO Y Y ， WANG J L ， CHU H L ， et al . Design and analysis of bi-flexible mounting structure for large optical lens ［J］. Opt. Precision Eng. ， 2021 ， 29 （ 8 ）： 1867 - 1880 . （in Chinese） . doi: 10.37188/OPE.20212908.1867 http://dx.doi.org/10.37188/OPE.20212908.1867

王晨，周游，鲁棋，等 . 反射式偏振相移动态点衍射干涉技术的研究［J］. 中国激光， 2020 ， 47 （ 10 ）： 1004003 . doi: 10.3788/CJL202047.1004003 http://dx.doi.org/10.3788/CJL202047.1004003

WANG CH ， ZHOU Y ， LU Q ， et al . Research on reflective polarization phase-shifting dynamic point diffraction interferometry ［J］. Chinese Journal of Lasers ， 2020 ， 47 （ 10 ）： 1004003 . （in Chinese） . doi: 10.3788/CJL202047.1004003 http://dx.doi.org/10.3788/CJL202047.1004003

ZHOU P ， BURGE J ， ZHAO C Y . Imaging issues for interferometric measurement of aspheric surfaces using CGH null correctors ［C］. SPIE Proceedings， Interferometry XV ： Techniques and Analysis. San Diego， California， USA. SPIE ， 2010 ， 7790 ： 77900L . doi: 10.1117/12.862427 http://dx.doi.org/10.1117/12.862427

ZHOU P ， SHU Y ， ZHAO C Y ， et al . Diffraction effects for interferometric measurements due to imaging aberrations ［J］. Optics Express ， 2012 ， 20 （ 4 ）： 4403 . doi: 10.1364/oe.20.004403 http://dx.doi.org/10.1364/oe.20.004403

ZHOU P . Error Analysis and Data Reduction for Interferometric Surface Measurements ［D］. Phoenix ： The University of Arizona ， 2009

胡海翔 . 空间光学自由曲面应用的关键技术研究［D］. 长春：中国科学院长春光学精密机械与物理研究所， 2017 .

HU H X . Research on the Key Technologies in the Application of Space Optical Freeform Surfaces ［D］. Changchun ： Changchun Institute of Optics， Fine Mechanics and Physics， Chinese Academy of Sciences ， 2017 . （in Chinese）

GOODMAN J W . Introduction to Fourier Optics ［M］. Third Edition . Beijing ： Electronic Industry Press ， 2013 .

曾雪峰 . 光学表面频段误差对成像质量的影响研究［D］. 长春：中国科学院长春光学精密机械与物理研究所， 2014 .

ZENG X F . Impact on Image Performance of Surface Spatial Frequency ［D］. Changchun ： Changchun Institute of Optics， Fine Mechanics， and Physics， Chinese Academy of Sciences ， 2014 . （in Chinese）

Views

331

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Fabrication of zero-gravity surface for large-aperture aspherical mirror by using rotationally method

Seeing metrology of large aperture mirror of telescope

Measurement of transmissive wavefront of long-focal length lens by computer-generated holography

Progress on optical components for ICF laser facility

Elimination of wavefront aberration introduced from large aperture collimator in detection of large optical device

Related Author

Yu-ming ZHOU

Jian-cheng CHEN

Wen-qing LI

Yong-gang WANG

Xiao-hui MENG

Ji-you ZHANG

Qi-chang AN

Fei YANG

Related Institution

Beijing Institute of Space Mechanics & Electricity, Optical Ultraprecise Processing Technology Innovation Center for Science and Technology Industry of National Defense

Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences

Changchun University of Science and Technology

Research Center of Laser Fusion, China Academy of Engineering Physics

Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰