Theoretical modeling and displacement response characteristics of V-shaped electrothermal actuator

Feng LI; Xinjie WANG; Hao CHEN

doi:10.37188/OPE.20223013.1572

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Theoretical modeling and displacement response characteristics of V-shaped electrothermal actuator

Micro/Nano Technology and Fine Mechanics | 更新时间：2022-08-07

- Theoretical modeling and displacement response characteristics of V-shaped electrothermal actuator
- Optics and Precision Engineering Vol. 30, Issue 13, Pages: 1572-1581(2022)
- 作者机构：
  
  南京理工大学机械工程学院，江苏南京 210094
- 作者简介：
- 基金信息：
- DOI：10.37188/OPE.20223013.1572
  CLC： TH122
- Received：26 February 2022，
  
  Revised：25 March 2022，
  
  Published：10 July 2022
- 稿件说明：
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李峰,王新杰,陈浩.V型电热驱动器的理论建模及位移响应特性[J].光学精密工程,2022,30(13):1572-1581.

LI Feng,WANG Xinjie,CHEN Hao.Theoretical modeling and displacement response characteristics of V-shaped electrothermal actuator[J].Optics and Precision Engineering,2022,30(13):1572-1581.
李峰,王新杰,陈浩.V型电热驱动器的理论建模及位移响应特性[J].光学精密工程,2022,30(13):1572-1581. DOI： 10.37188/OPE.20223013.1572.

LI Feng,WANG Xinjie,CHEN Hao.Theoretical modeling and displacement response characteristics of V-shaped electrothermal actuator[J].Optics and Precision Engineering,2022,30(13):1572-1581. DOI： 10.37188/OPE.20223013.1572.

摘要

为了研究V型电热驱动器的位移响应特性，考虑到材料参数的温度非线性及数学模型中存在的非连续性边界问题，从理论、仿真和实验三个方面对V型电热驱动器进行研究。通过引入与温度相关的材料参数更新函数，建立V型电热驱动器的电-热-力耦合模型；利用改进型切比雪夫谱方法求解所构建的耦合模型，得到V型电热驱动器温度和瞬态位移表达式。然后，对V型电热驱动器温度和位移进行有限元仿真和理论分析。最后，搭建电热驱动器瞬态位移响应实验平台，将恒定电压激励下的V型电热驱动器位移响应实验结果与理论和仿真结果进行对比，并对周期性方波电压下V型电热驱动器的位移响应进行了测试。实验结果表明：在一段时间后，V型电热驱动器的位移响应呈现周期性变化，且周期与方波电压周期相等；在其他参数相同的条件下，峰峰值为14 V的周期方波电压作用下，电热驱动器位移均值为20 µm，峰峰值为7 V的周期方波电压作用下，位移均值为28 µm；频率为50 Hz的周期方波电压作用下，电热驱动器位移变化幅度比频率100 Hz下多7 µm。V型电热驱动器的位移均值基本不变，但位移变化幅度与频率负相关。

Abstract

To study the characteristics of displacement response for a V-shaped electrothermal actuator， considering that the material parameters are affected by temperature nonlinearity and discontinuous boundary problems in the mathematical model， the characteristics of displacement response for the V-shaped electrothermal actuator were studied in theory， simulation， and experiment. First， an electro-thermal-mechanical coupling model of a V-shaped electrothermal actuator was established by introducing updating functions of a material parameter related to the temperature. Expressions for the temperature and transient displacement of the V-shaped electrothermal actuator were obtained using the improved Chebyshev spectrum method to solve the constructed coupling model. Then， a finite element simulation and theoretical analysis of the temperature and displacement of the V-shaped electrothermal actuator were performed to verify the correctness of the model. Finally， an experimental platform for the transient displacement response of the electrothermal actuator was constructed. The experimental results of the displacement response for the V-shaped electrothermal actuator under constant voltage excitation were compared with the theoretical and simulation results. The displacement response of the V-shaped electrothermal actuator under a periodic square wave voltage was tested. The test results reveal the following： the V-shaped electrothermal actuator performs periodic variation after a certain amount of time. The cycle is identical to that of the square wave voltage. Under similar conditions of other parameters， the average displacements of the electrothermal driver under the action of the peak-to-peak 14 V periodic square wave voltage are 20 µm. Furthermore， the average displacements under the action of the peak-to-peak 7 V periodic square wave voltage are 28 µm. The displacement variation of the electrothermal actuator under the action of a periodic square wave voltage with a frequency of 50 Hz is 7 µm larger than that under a frequency of 100 Hz. The mean displacement is approximately equal. However， the variation range of displacement is negatively correlated with frequency.

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references

胡意立，胡影，李建平，等 . 具有“前进-前进”运动模式的惯性压电驱动器［J］. 光学精密工程， 2021 ， 29 （ 6 ）： 1356 - 1364 . doi: 10.37188/ope.20212906.1356 http://dx.doi.org/10.37188/ope.20212906.1356

HU Y L ， HU Y ， LI J P ， et al . Piezoelectric inertial actuator with “forward-forward” motion mode ［J］. Optics and Precision Engineering ， 2021 ， 29 （ 6 ）： 1356 - 1364 . （in Chinese） . doi: 10.37188/ope.20212906.1356 http://dx.doi.org/10.37188/ope.20212906.1356

尤清扬 . 气/液环境中光热微驱动机构的静态与动态驱动技术研究［D］. 杭州：浙江大学， 2021 .

YOU Q Y . Static/dynamic Actuation Technique of Optothermal Microactuators Operated in Air and Liquid ［D］. Hangzhou ： Zhejiang University ， 2021 . （in Chinese）

沈林坤 . 基于光波导结构的微驱动器设计研究［D］. 南京：南京邮电大学， 2020 .

SHEN L K . Study of Micro-actuators Design based on Optical Waveguide Structure ［D］. Nanjing ： Nanjing University of Posts and Telecommunications ， 2020 . （in Chinese）

刘加凯 . 静电驱动MOEMS保险机构的设计与试验［J］. 光学精密工程， 2019 ， 27 （ 2 ）： 334 - 340 . doi: 10.3788/ope.20192702.0334 http://dx.doi.org/10.3788/ope.20192702.0334

LIU J K . Design and test of electrostatic driving MOEMS arming device ［J］. Opt. Precision Eng. ， 2019 ， 27 （ 2 ）： 334 - 340 . （in Chinese） . doi: 10.3788/ope.20192702.0334 http://dx.doi.org/10.3788/ope.20192702.0334

TAKANAMI S ， KITAGAWA W ， TAKESHITA T . Design for improvement of torque-thrust charac⁃teristic in simultaneous drive in two-degree-of-freedom electromagnetic actuator ［C］. 19th International Conference on Electrical Machines and Systems ， Chiba， Japan. ICEMS ， 2017 ： 1 - 6 .

李致富，黄楠，钟云，等 . 压电驱动器迟滞非线性的分数阶建模及实验验证［J］. 光学精密工程， 2020 ， 28 （ 5 ）： 1124 - 1131 .

LI ZH F ， HUANG N ， ZHONG Y ， et al . Fractional order modeling and experimental verification of hysteresis nonlinearities in piezoelectric actuators ［J］. Opt. Precision Eng. ， 2020 ， 28 （ 5 ）： 1124 - 1131 . （in Chinese）

陈浩，曹云，王新杰，等 . 工艺误差影响下微电热驱动器失效分析［J］. 光学精密工程， 2021 ， 29 （ 6 ）： 1365 - 1374 . doi: 10.37188/OPE.20212906.1365 http://dx.doi.org/10.37188/OPE.20212906.1365

CHEN H ， CAO Y ， WANG X J ， et al . Failure analysis of electro-thermal micro-actuator under effect of process error ［J］. Opt. Precision Eng. ， 2021 ， 29 （ 6 ）： 1365 - 1374 . （in Chinese） . doi: 10.37188/OPE.20212906.1365 http://dx.doi.org/10.37188/OPE.20212906.1365

PUSTAN M ， CHIOREAN R ， BIRLEANU C ， et al . Reliability design of thermally actuated MEMS switches based on V-shape beams ［J］. Microsystem Technologies ， 2017 ， 23 （ 9 ）： 3863 - 3871 . doi: 10.1007/s00542-015-2789-8 http://dx.doi.org/10.1007/s00542-015-2789-8

张绪平，张卓 . V型和Z型电热微驱动器性能比较与分析（邀请论文）［J］. 北京工业大学学报， 2015 ， 41 （ 11 ）： 1636 - 1643 . doi: 10.1109/icma.2015.7237626 http://dx.doi.org/10.1109/icma.2015.7237626

ZHANG X P ， ZHANG ZH . Performance comparison and analysis of V-and Z-shaped electrothermal actuators（invited paper）［J］. Journal of Beijing University of Technology ， 2015 ， 41 （ 11 ）： 1636 - 1643 . （in Chinese） . doi: 10.1109/icma.2015.7237626 http://dx.doi.org/10.1109/icma.2015.7237626

ZHANG Z ， ZHANG W Z ， WU Q Y ， et al . A comprehensive analytical model and experimental validation of Z-shaped electrothermal microactuators ［C］. Recent Advances in Mechanism Design for Robotics ， 2015 ： 177 - 187 . doi: 10.1007/978-3-319-18126-4_17 http://dx.doi.org/10.1007/978-3-319-18126-4_17

HOANG K T ， NGUYEN D T ， PHAM P H . Impact of design parameters on working stability of the electrothermal V-shaped actuator ［J］. Microsystem Technologies ， 2020 ， 26 （ 5 ）： 1479 - 1487 . doi: 10.1007/s00542-019-04682-y http://dx.doi.org/10.1007/s00542-019-04682-y

SHAN T Q ， QI X L ， CUI L ， et al . Thermal behavior modeling and characteristics analysis of electrothermal microactuators ［J］. Microsystem Technologies ， 2017 ， 23 （ 7 ）： 2629 - 2640 . doi: 10.1007/s00542-016-3070-5 http://dx.doi.org/10.1007/s00542-016-3070-5

VAMEGH ESTAHBANATI S ， DHAOUADI R ， BAKRI-KASSEM M . Macromodeling of thermally driven V-shaped MEMS actuators ［J］. Mechatronics ， 2017 ， 46 ： 193 - 204 . doi: 10.1016/j.mechatronics.2017.03.006 http://dx.doi.org/10.1016/j.mechatronics.2017.03.006

ZHANG Z ， YU Y Q ， LIU X Y ， et al . Dynamic modelling and analysis of V- and Z-shaped electrothermal microactuators ［J］. Microsystem Technologies ， 2017 ， 23 （ 8 ）： 3775 - 3789 . doi: 10.1007/s00542-016-3180-0 http://dx.doi.org/10.1007/s00542-016-3180-0

ZHANG Z ， YU Y Q ， LIU X Y ， et al . A comparison model of V- and Z-shaped electrothermal microactuators ［C］. 2015 IEEE International Conference on Mechatronics and Automation （ICMA）. August 2 - 5 ， 2015 . Beijing， China. IEEE ， 2015 ： 1025 - 1030 . doi: 10.1109/icma.2015.7237626 http://dx.doi.org/10.1109/icma.2015.7237626

NGUYEN D T ， HOANG K T ， PHAM P H . Larger displacement of silicon electrothermal V-shaped actuator using surface sputtering process ［J］. Microsystem Technologies ， 2021 ， 27 （ 5 ）： 1985 - 1991 . doi: 10.1007/s00542-020-04985-5 http://dx.doi.org/10.1007/s00542-020-04985-5

ZHANG Z ， YU Y Q ， ZHANG X P . Vibration analysis of V-shaped beam electrothermal microactuators ［C］. Proceedings of ASME 2017 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference ， 69，2017 ， Cleveland， Ohio， USA . 2017 . doi: 10.1109/crc.2017.16 http://dx.doi.org/10.1109/crc.2017.16

ZHANG Z ， ZHANG W Z ， WU Q Y ， et al . Closed-form modelling and design analysis of V- and Z-shaped electrothermal microactuators ［J］. Journal of Micromechanics and Microengineering ， 2017 ， 27 （ 1 ）： 015023 . doi: 10.1088/1361-6439/27/1/015023 http://dx.doi.org/10.1088/1361-6439/27/1/015023

陈浩，王新杰，王炅，等 . V型电热驱动器理论模型及动态特性［J］. 上海交通大学学报， 2021 ， 55 （ 10 ）： 1263 - 1271 .

CHEN H ， WANG X J ， WANG J ， et al . Theoretical model and dynamic performance of V-shaped electrothermal actuator ［J］. Journal of Shanghai Jiao Tong University ， 2021 ， 55 （ 10 ）： 1263 - 1271 . （in Chinese）

VOICU R C ， TIBEICA C ， MULLER R ， et al . Design， simulation and testing of polymeric microgrippers with V-shaped electrothermal actuators and encapsulated heaters ［C］. 2016 International Semiconductor Conference （CAS）. October 10 - 12 ， 2016 . Sinaia， Romania. IEEE ， 2016 ： 89 - 92 . doi: 10.1109/smicnd.2016.7783048 http://dx.doi.org/10.1109/smicnd.2016.7783048

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