Efficient adaptive flying cutting for infrared optics micro-structured surfaces

LI Peizheng; DU Xue; SUN Zhanwen; WANG Sujuan; XU Shijun

doi:10.37188/OPE.20223015.1845

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Efficient adaptive flying cutting for infrared optics micro-structured surfaces

Design\，Fabrication and Application of Planar Optical Elements | 更新时间：2026-09-11

- Efficient adaptive flying cutting for infrared optics micro-structured surfaces
- Optics and Precision Engineering Vol. 30, Issue 15, Pages: 1845-1856(2022)
- 作者机构：
  
  1.广东工业大学精密电子制造技术与装备国家重点实验室，广东广州 510006
  2.香港理工大学工业与系统工程学系超精密加工技术国家重点实验室，香港 999077
- 作者简介：
- 基金信息：
- DOI：10.37188/OPE.20223015.1845
  CLC： TH703
- Received：17 May 2022，
  
  Revised：2022-06-10，
  
  Published：10 August 2022
- 稿件说明：
移动端阅览
李佩铮,杜雪,孙占文等.红外光学微结构表面的高效自适应飞刀切削[J].光学精密工程,2022,30(15):1845-1856.

LI Peizheng,DU Xue,SUN Zhanwen,et al.Efficient adaptive flying cutting for infrared optics micro-structured surfaces[J].Optics and Precision Engineering,2022,30(15):1845-1856.
李佩铮,杜雪,孙占文等.红外光学微结构表面的高效自适应飞刀切削[J].光学精密工程,2022,30(15):1845-1856. DOI： 10.37188/OPE.20223015.1845.

LI Peizheng,DU Xue,SUN Zhanwen,et al.Efficient adaptive flying cutting for infrared optics micro-structured surfaces[J].Optics and Precision Engineering,2022,30(15):1845-1856. DOI： 10.37188/OPE.20223015.1845.

摘要

为了实现红外光学微结构表面的高效、高精度、低损伤加工，提出了一种超精密自适应飞刀切削方法，并进行了实验验证。根据飞刀切削的运动学特性，建立了飞刀切削塑性加工模型。以最大切屑厚度始终小于脆塑转变临界为原则，根据微结构表面的局部形貌特征，采用迭代算法规划出具有动态变化进给速度的刀具轨迹。最后，将所提出方法与传统飞刀切削方法进行对比实验，验证了所提出自适应飞刀切削方法的有效性。通过实验成功在单晶硅材料上加工了无脆性断裂的微沟槽，表面粗糙度达到18 nm。与传统飞刀切削方法相比，超精密自适应飞刀切削方法在不降低进给速度的前提下，避免了脆性断裂，加工效率是传统方法的2.5倍。

Abstract

In the processing of infrared optical microstructured surfaces， the hard， brittle， and difficult-to-machine properties of infrared optical materials and the complex geometric properties of microstructured surfaces lead to uneven and brittle fractures in the processed microstructured surfaces and reduce the face shape accuracy. Small feeds are now commonly used to suppress surface fragmentation but are inefficient. To achieve efficient， high-precision， and low-damage machining of infrared optical microstructured surfaces， an ultra-precise adaptive flying cutting method was proposed and experimentally validated in this study. First， based on the kinematic characteristics of flying cutting， a flying cutting plasticity machining model was established. Second， based on the principle whereby the maximum chip thickness was always less than the brittle-plastic transition threshold， an iterative algorithm was used to plan a tool trajectory with dynamically varying feed rates based on the local morphological characteristics of the microstructured surface. Finally， the effectiveness of the proposed adaptive flying cutting method was verified by comparing it with the conventional flying cutting method in experiments. Experiments show that microgrooves are successfully machined without brittle fracture on single-crystal silicon materials and that a surface roughness of 18 nm is achieved. Compared with conventional flying tool cutting methods， the proposed ultra-precision adaptive flying cutting method avoids brittle breakage without reducing feed rates and achieves 2.5 times the machining efficiency of conventional methods.

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references

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