Development of micro assembly system for friction resistance sensor manufactured based on MEMS

Liwei XUE; Xiong WANG; Yudie JIA; Hao SHEN; Liguo CHEN

doi:10.37188/OPE.20223016.1943

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Development of micro assembly system for friction resistance sensor manufactured based on MEMS

Micro/Nano Technology and Fine Mechanics | 更新时间：2022-09-01

- Development of micro assembly system for friction resistance sensor manufactured based on MEMS
- Optics and Precision Engineering Vol. 30, Issue 16, Pages: 1943-1954(2022)
- 作者机构：
  
  1.苏州大学机电工程学院，江苏苏州 215000
  2.中国空气动力研究与发展中心超高速空气动力研究所，四川绵阳 621000
- 作者简介：
- 基金信息：
- DOI：10.37188/OPE.20223016.1943
  CLC： TG494;TP24
- Received：08 June 2022，
  
  Revised：22 June 2022，
  
  Published：25 August 2022
- 稿件说明：
移动端阅览
薛立伟,王雄,贾玉蝶等.MEMS摩阻传感器微组装系统研制[J].光学精密工程,2022,30(16):1943-1954.

XUE Liwei,WANG Xiong,JIA Yudie,et al.Development of micro assembly system for friction resistance sensor manufactured based on MEMS[J].Optics and Precision Engineering,2022,30(16):1943-1954.
薛立伟,王雄,贾玉蝶等.MEMS摩阻传感器微组装系统研制[J].光学精密工程,2022,30(16):1943-1954. DOI： 10.37188/OPE.20223016.1943.

XUE Liwei,WANG Xiong,JIA Yudie,et al.Development of micro assembly system for friction resistance sensor manufactured based on MEMS[J].Optics and Precision Engineering,2022,30(16):1943-1954. DOI： 10.37188/OPE.20223016.1943.

摘要

MEMS摩阻传感器是一种专门为测量高超音速飞行器模型表面摩擦阻力设计的立体式MEMS传感器，为了实现其可靠组装，设计了MEMS摩阻传感器微组装系统，对包括双显微视觉系统、高精度治具设计、精密操作工具、精密定位平台、高精度视觉识别算法以及点胶工艺等进行了研究。首先，分析确定了传感器性能与传感器浮动杆与芯片组装的形位公差、总成后的浮动杆上端圆面与传感器管壳上组件圆孔的同心度以及端面平齐度与高度差相关。然后，针对影响因素设计了高精度治具保证组装前传感器各个部件的形位公差在理论范围内，设计了精密操作工具确保精确吸取部件并在组装过程中稳定搬运部件，利用双显微视觉精确识别装配的轴孔位置，驱动精密定位平台将各部件搬运到对应装配位置。最后，研究点胶工艺对于传感器装配性能的影响。实验结果表明：传感器微组装完成后，其浮动头与管壳上组件圆孔同心度偏差平均值约4.90 μm；浮动头与上端盖端面高度差跳动值为1 μm。MEMS摩阻传感器微组装系统完全满足传感器装配要求。

Abstract

Friction sensors are three-dimensional MEMS sensors specifically designed for measuring the surface friction of hypersonic vehicle models. In order to realize its reliable assembly， a MEMS friction sensor micro assembly system is designed， including a double micro vision system， high-precision fixture design， precision operation tools， precision positioning platform， high-precision visual recognition algorithm， and dispensing process. First， an analysis of the system reveals that the influence on the performance of the sensor is related to the geometric tolerance of the floating rod and chip assembly of the sensor， the concentricity between the upper circular surface of the floating rod and the circular hole of the upper cover of the sensor after the assembly， and the flush of the end face is related to the height difference. Then， according to the influencing factors， a high-precision fixture is designed to ensure that the geometric tolerance of each component of the sensor before assembly is within the theoretical range. Moreover， a precision operation tool is designed to ensure the accurate absorption of components and the stability of handling components in the assembly process， the shaft hole position of the positioning assembly is accurately identified using double micro vision， and the precision positioning platform is driven to transport each component to the corresponding assembly position. Finally， the influence of the dispensing process on the performance of the sensor assembly is investigated. The experimental results reveal that following the sensor assembly， the average concentricity deviation between the floating head and the circular hole of the upper end cover is 4.90 μm. The runout value of the height difference between the floating head and the end face of the upper end cap is 1 μm. The friction sensor micro-assembly system fully meets the requirements of the friction sensor assembly.

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references

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