Continuous cubic phase plate with long depth of focus fabricated by femtosecond laser and its optical performance

LI Pengju; PAN Deng; LIU Shunli

doi:10.37188/OPE.20223017.2088

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Continuous cubic phase plate with long depth of focus fabricated by femtosecond laser and its optical performance

Micro\/Nano Technology and Fine Mechanics | 更新时间：2026-09-12

- Continuous cubic phase plate with long depth of focus fabricated by femtosecond laser and its optical performance
- Optics and Precision Engineering Vol. 30, Issue 17, Pages: 2088-2093(2022)
- 作者机构：
  
  中国科学技术大学工程科学学院，安徽合肥 230031
- 作者简介：
- 基金信息：
- DOI：10.37188/OPE.20223017.2088
  CLC： O436
- Received：04 April 2022，
  
  Revised：2022-05-10，
  
  Published：10 September 2022
- 稿件说明：
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李鹏举,潘登,刘顺利.长焦深连续立方相位板的飞秒激光加工与性能测试[J].光学精密工程,2022,30(17):2088-2093.

LI Pengju,PAN Deng,LIU Shunli.Continuous cubic phase plate with long depth of focus fabricated by femtosecond laser and its optical performance[J].Optics and Precision Engineering,2022,30(17):2088-2093.
李鹏举,潘登,刘顺利.长焦深连续立方相位板的飞秒激光加工与性能测试[J].光学精密工程,2022,30(17):2088-2093. DOI： 10.37188/OPE.20223017.2088.

LI Pengju,PAN Deng,LIU Shunli.Continuous cubic phase plate with long depth of focus fabricated by femtosecond laser and its optical performance[J].Optics and Precision Engineering,2022,30(17):2088-2093. DOI： 10.37188/OPE.20223017.2088.

摘要

传统的长焦深光束生成器件，诸如空间光调制器和正负透镜组合，存在光学元件尺寸较大、难以与微纳光学系统集成等问题，发展一种长焦深光束生成方法并制备一种结构简单、尺寸紧凑且成像质量良好的长焦深光束器件尤为重要。提出了一种利用连续立方相位板调制来产生长焦深光束的方法，通过飞秒激光直写技术制备了高尺寸精度（直径为108 μm，高1.1 μm）的相位板，实现了可调控的焦距长度（50

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150 μm）和焦深（100

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600 μm），并且对相位板进行光学测试，展示了其长聚焦能力和成像能力。该器件可用于高性能集成光学系统、微纳光学制造等领域。

Abstract

Traditional methods for generating beams with a long depth of focus， such as spatial light modulator and a combination of positive and negative lens， have several limitations， including a large size of optical elements， difficult integration with micro-nano optics and others. This makes the application of optical devices in aviation areas challenging. Thus， it is necessary to develop a method for generating beams with a long depth of focus beam， and fabricating an optical element with a simple structure， compact size， and good imaging quality. In this paper， we achieve this by using continuous cubic phase plate modulation. A phase plate with high dimensional accuracy （108 μm in diameter， 1.1 μm in height） and adjustable focal length （50-150 μm） and focal depth range （100-600 μm） is fabricated via femtosecond laser direct writing technology. The optical test of the phase plate demonstrates its long depth of focus and imaging ability. This method indicates new avenues in high performance integrated optics， micro/nano-optics manufacturing， and laser micro/nano manufacturing for aeronautical science and technology.

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references

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