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1.Institute of Electrical Engineering, Chinese Academy of Sciences, Beijing 100190, China
2.University of Chinese Academy of Sciences, Beijing 100049, China
Published:25 September 2022,
Received:07 June 2022,
Revised:28 June 2022,
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解孟涛,刘俊标,王鹏飞等.电子束曲面直写的Monte Carlo仿真与实验[J].光学精密工程,2022,30(18):2232-2240.
XIE Mengtao,LIU Junbiao,WANG Pengfei,et al.Monte Carlo simulation and experiments of electron beam direct writing on curved[J].Optics and Precision Engineering,2022,30(18):2232-2240.
解孟涛,刘俊标,王鹏飞等.电子束曲面直写的Monte Carlo仿真与实验[J].光学精密工程,2022,30(18):2232-2240. DOI: 10.37188/OPE.20223018.2232.
XIE Mengtao,LIU Junbiao,WANG Pengfei,et al.Monte Carlo simulation and experiments of electron beam direct writing on curved[J].Optics and Precision Engineering,2022,30(18):2232-2240. DOI: 10.37188/OPE.20223018.2232.
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