Research on damage mechanism and application of nanosecond laser coatings

CHENG Xinbin; JIAO Hongfei; ZHANG Jinlong; NIU Xinshang; MA Bin; SHEN Zhenxiang; WANG Zhanshan

doi:10.37188/OPE.20223021.2568

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Research on damage mechanism and application of nanosecond laser coatings

更新时间：2026-09-12

- Research on damage mechanism and application of nanosecond laser coatings
- Optics and Precision Engineering Vol. 30, Issue 21, Pages: 2568-2590(2022)
- 作者机构：
  
  同济大学物理科学与工程学院精密光学工程技术研究所，先进微结构材料教育部重点实验室，上海市数字光学前沿科学研究基地，上海市全光谱高性能光学薄膜器件与应用专业技术服务平台，上海 200092
- 作者简介：
  
  E-mail： wangzs@tongji.edu.cn
- 基金信息：
- DOI：10.37188/OPE.20223021.2568
  CLC： O484.4;TB43
- Received：11 August 2022，
  
  Revised：2022-08-29，
  
  Published：10 November 2022
- 稿件说明：
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程鑫彬,焦宏飞,张锦龙等.纳秒激光薄膜损伤机理和应用研究[J].光学精密工程,2022,30(21):2568-2590.

CHENG Xinbin,JIAO Hongfei,ZHANG Jinlong,et al.Research on damage mechanism and application of nanosecond laser coatings[J].Optics and Precision Engineering,2022,30(21):2568-2590.
程鑫彬,焦宏飞,张锦龙等.纳秒激光薄膜损伤机理和应用研究[J].光学精密工程,2022,30(21):2568-2590. DOI： 10.37188/OPE.20223021.2568.

CHENG Xinbin,JIAO Hongfei,ZHANG Jinlong,et al.Research on damage mechanism and application of nanosecond laser coatings[J].Optics and Precision Engineering,2022,30(21):2568-2590. DOI： 10.37188/OPE.20223021.2568.

摘要

根据我国强激光装置建设和工程任务对强激光薄膜元件的需求，基于对薄膜损伤机制的认识，同济大学提出了“全流程定量化”控制缺陷制备激光薄膜的思路。同济大学利用结构、性质可控人工小球制作定量化人工缺陷，系统研究了基板加工、超声清洗、电场模拟与调控、镀膜材料与工艺选择、镀后后处理、激光预处理、传递与保存等因素对薄膜元件激光损伤特性和损伤规律的影响。从损伤形貌和损伤规律上证实了节瘤缺陷电场增强理论模型的正确性，促进了研究人员对节瘤缺陷损伤机制的认知深度，提出了提升薄膜损伤性能的新途径，创建了新材料，实现了可兼顾环境稳定性、光谱特性和损伤特性的多功能强激光薄膜制备，有力支撑了我国强激光装置建设和激光技术的进一步提升。

Abstract

According to the requirements for high-power laser coating components in the construction of high-power laser facilities in China and， based on the understanding of the damage mechanism of laser coatings， our team at Tongji University has proposed the concept of quantitatively controlling defects in the whole process to prepare laser coatings. Quantitative artificial defects have also been fabricated by using artificial SiO

spheres with controllable structure and properties. Over the past few decades， we have systematically and quantitatively studied the effects of substrate processing， ultrasonic cleaning， electric field simulation and adjustment， choices of coating material and process parameters， post-treatment after coating， laser conditioning， transferring and preservation of the laser damage characteristics， and damage rules of laser coating components. The validity of the theoretical model of nodule defect electric field enhancement was verified in this study on the basis of the damage morphologies and damage rules， thereby promoting the understanding of the nodule defect damage mechanism. We created new materials and proposed a series of new approaches to improve the damage properties of thin films， realizing the preparation of multi-functional high-intensity laser films that can account for environmental stability， spectral characteristics， and damage characteristics. Our findings will potentially aid the construction of high-power laser facilities and further improvement of laser technology in China.

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