Ultra-precision machining and testing of reflector mirrors for extreme ultraviolet and X-ray

YU Jun; WANG Zhanshan; HUANG Qiushi; ZHANG Zhong; SHEN Zhenxiang; JIAO Hongfei; SHENG Pengfeng; XIA Jingjing; WANG Yifan

doi:10.37188/OPE.20223021.2688

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Ultra-precision machining and testing of reflector mirrors for extreme ultraviolet and X-ray

更新时间：2022-11-22

- Ultra-precision machining and testing of reflector mirrors for extreme ultraviolet and X-ray
- Optics and Precision Engineering Vol. 30, Issue 21, Pages: 2688-2697(2022)
- 作者机构：
  
  同济大学物理科学与工程学院精密光学工程技术研究所，先进微结构材料教育部重点实验室，上海市数字光学前沿科学研究基地，上海市全光谱高性能光学薄膜器件与应用专业技术服务平台，上海 200092
- 作者简介：
  
  E-mail： wangzs@tongji.edu.cn
- 基金信息：
- DOI：10.37188/OPE.20223021.2688
  CLC： TH751
- Received：22 July 2022，
  
  Revised：11 August 2022，
  
  Published：10 November 2022
- 稿件说明：
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余俊,王占山,黄秋实等.极紫外及X射线波段超光滑反射镜的超精密加工与检测[J].光学精密工程,2022,30(21):2688-2697.

YU Jun,WANG Zhanshan,HUANG Qiushi,et al.Ultra-precision machining and testing of reflector mirrors for extreme ultraviolet and X-ray[J].Optics and Precision Engineering,2022,30(21):2688-2697.
余俊,王占山,黄秋实等.极紫外及X射线波段超光滑反射镜的超精密加工与检测[J].光学精密工程,2022,30(21):2688-2697. DOI： 10.37188/OPE.20223021.2688.

YU Jun,WANG Zhanshan,HUANG Qiushi,et al.Ultra-precision machining and testing of reflector mirrors for extreme ultraviolet and X-ray[J].Optics and Precision Engineering,2022,30(21):2688-2697. DOI： 10.37188/OPE.20223021.2688.

摘要

极紫外、X射线为微观物质认识、宏观空间探测提供了高精度的观测手段，但这类观测的实现需要大量高精度光学反射元件的支撑。由于极紫外、X射线在光学表面更易发生散射，其光学反射镜基底的精度需求和制作技术也明显区别于长波元件。近年来，同济大学精密光学工程技术研究所建立了极紫外、X射线反射元件基底的超精密加工与检测平台，研发了超光滑非球面的离子束修形技术，提出了基于泽尼克多项式的随机离轴旋转绝对检测方法，形成了极紫外、X射线光学用反射镜基底的高精度全流程研制技术，并将该技术成功地应用于国内和国际短波光学大科学装置中。本文综述了本课题组在极紫外、X射线用反射镜制作领域中的研究进展。

Abstract

High-precision extreme ultraviolet and X-ray observations for space exploration require the development of advanced micro materials for the numerous high-precision optical reflection elements used in such observations. Because short wavelengths are more prone to scattering on optical surfaces， the precision requirements and the fabrication techniques of short-wavelength optical components differ significantly from those of long-wavelength optical components. The Institute of Precision Optical Engineering （IPOE） at Tongji University has 20 years of research experience in this field. We have built a high-accuracy fabrication and measurement platform based on short-wavelength mirrors， developed an ion beam configuration of an ultra-smooth aspheric surface， proposed an absolute measurement method using random off-axis rotation based on Zernike polynomials， and formed a complete technology chain to develop aspheric reflector substrates. These optical components and systems have been successfully applied at several short-wavelength science facilities both in China and abroad. This study will briefly introduce the recent research progress on these optical aspheric reflectors at the IPOE.

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