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1.Institute of Precision Optical Engineering, MOE Key Laboratory of Advanced Micro-Structured Materials, Shanghai Frontiers Science Center of Digital Optics, Shanghai Professional Technical Service Platform for Full-Spectrum and High-Performance Optical Thin Film Devices and Applications, School of Physics Science and Engineering, Tongji University, Shanghai 200092, China
E-mail: wangzs@tongji.edu.cn
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Published:10 November 2022,
Received:22 July 2022,
Revised:11 August 2022,
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余俊,王占山,黄秋实等.极紫外及X射线波段超光滑反射镜的超精密加工与检测[J].光学精密工程,2022,30(21):2688-2697.
YU Jun,WANG Zhanshan,HUANG Qiushi,et al.Ultra-precision machining and testing of reflector mirrors for extreme ultraviolet and X-ray[J].Optics and Precision Engineering,2022,30(21):2688-2697.
余俊,王占山,黄秋实等.极紫外及X射线波段超光滑反射镜的超精密加工与检测[J].光学精密工程,2022,30(21):2688-2697. DOI: 10.37188/OPE.20223021.2688.
YU Jun,WANG Zhanshan,HUANG Qiushi,et al.Ultra-precision machining and testing of reflector mirrors for extreme ultraviolet and X-ray[J].Optics and Precision Engineering,2022,30(21):2688-2697. DOI: 10.37188/OPE.20223021.2688.
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