Development of high performance and large size X-ray multilayer reflective optics

HUANG Qiushi; QI Runze; ZHANG Zhe; LI Wenbin; JIANG Li; ZHANG Yunxue; ZHUANG Yeqi; ZHANG Zhong; WANG Zhanshan

doi:10.37188/OPE.20223021.2793

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Development of high performance and large size X-ray multilayer reflective optics

更新时间：2022-11-22

- Development of high performance and large size X-ray multilayer reflective optics
- Optics and Precision Engineering Vol. 30, Issue 21, Pages: 2793-2804(2022)
- 作者机构：
  
  同济大学物理科学与工程学院，先进微结构材料教育部重点实验室，精密光学工程技术研究所，上海 200092
- 作者简介：
  
  E-mail： wangzs@tongji.edu.cn
- 基金信息：
- DOI：10.37188/OPE.20223021.2793
  CLC： O484.1
- Received：16 July 2022，
  
  Revised：11 August 2022，
  
  Published：10 November 2022
- 稿件说明：
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黄秋实,齐润泽,张哲等.高性能大尺寸X射线多层膜反射元件研制进展[J].光学精密工程,2022,30(21):2793-2804.

HUANG Qiushi,QI Runze,ZHANG Zhe,et al.Development of high performance and large size X-ray multilayer reflective optics[J].Optics and Precision Engineering,2022,30(21):2793-2804.
黄秋实,齐润泽,张哲等.高性能大尺寸X射线多层膜反射元件研制进展[J].光学精密工程,2022,30(21):2793-2804. DOI： 10.37188/OPE.20223021.2793.

HUANG Qiushi,QI Runze,ZHANG Zhe,et al.Development of high performance and large size X-ray multilayer reflective optics[J].Optics and Precision Engineering,2022,30(21):2793-2804. DOI： 10.37188/OPE.20223021.2793.

摘要

X射线多层膜是同步辐射与自由电子激光、天文观测、等离子体诊断等大科学装置和实验室分析仪器的重要光学元件，能高效率反射X射线并实现单色和偏振化等调控。本课题组在近二十年的工作中对X射线多层膜的设计、制备和表征方法开展了系统深入的研究，研制了一系列工作在软X射线和硬X射线不同波段的高性能多层膜，反射率达到国际先进水平；基于磁控溅射技术建立了大尺寸掠入射X射线多层膜的镀制平台，最大镀膜尺寸达1.2 m，均匀性优于0.5%（均方根值），制备的硬X射线多层膜反射镜成功应用在国内外大科学装置中；通过将多层膜与反射光栅相结合，创新发展了超高效率韧X射线多层膜光栅元件，相比传统单层膜光栅，该元件能将韧X射线衍射效率最高提升40倍。本文将简要介绍课题组在X射线多层膜元件领域的研究进展。

Abstract

X-ray multilayers are key optical elements in synchrotron radiation and free electron laser facilities， astronomical observations， plasma diagnostics， and lab-based analytical instruments. They can realize highly efficient reflection， monochromatization， and polarization of X-rays. Our group has been conducting systematic studies on the design， fabrication， and characterization of X-ray multilayers during the past 20 years. We have developed a series of high-performance multilayers with world-class level reflectivity at different wavelengths and have built the deposition platform for large size X-ray multilayers based on the magnetron sputtering technique. The largest deposition mirror could achieve a length of 1.2 m. The fabricated， hard X-ray multilayer mirrors have been successfully applied in synchrotron radiation facilities both in China and abroad. Through the combination of multilayer and reflective gratings， innovative， ultrahigh efficiency， tender， X-ray multilayer grating optics have been developed. Compared with conventional single-layer gratings， a maximum efficiency improvement of 40 times could be achieved. This study will introduce the results and progress that were achieved by our group in X-ray multilayer elements.

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Keywords

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