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1.Changchun Institute of Optics,Fine Mechanicsand Physics,Chinese Academy of Sciences, Changchun 130031, China
2.University of Chinese Academy of Sciences, Beijing 100190, China
3.Shanghai Institute of Satellite Engineering, Shanghai 200240, China
Published:25 January 2023,
Received:11 May 2022,
Revised:07 June 2022,
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牛筱茜,缪鹏飞,王瀚林等.17.1 nm极紫外滤光片的制备[J].光学精密工程,2023,31(02):141-149.
NIU Xiaoqian,MIAO Pengfei,WANG Hanlin,et al.Preparation of EUV Filter at 17.1 nm[J].Optics and Precision Engineering,2023,31(02):141-149.
牛筱茜,缪鹏飞,王瀚林等.17.1 nm极紫外滤光片的制备[J].光学精密工程,2023,31(02):141-149. DOI: 10.37188/OPE.20233102.0141.
NIU Xiaoqian,MIAO Pengfei,WANG Hanlin,et al.Preparation of EUV Filter at 17.1 nm[J].Optics and Precision Engineering,2023,31(02):141-149. DOI: 10.37188/OPE.20233102.0141.
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