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Motion control of multi-channel double crystal monochromator based on parallelism error compensation
Micro/Nano Technology and Fine Mechanics | 更新时间:2023-05-15
    • Motion control of multi-channel double crystal monochromator based on parallelism error compensation

    • Optics and Precision Engineering   Vol. 31, Issue 9, Pages: 1335-1346(2023)
    • DOI:10.37188/OPE.20233109.1335    

      CLC: TP249
    • Received:31 December 2022

      Revised:01 February 2023

      Published:10 May 2023

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  • HE Siyu,LU Haolin,FENG Zhao,et al.Motion control of multi-channel double crystal monochromator based on parallelism error compensation[J].Optics and Precision Engineering,2023,31(09):1335-1346. DOI: 10.37188/OPE.20233109.1335.

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