Hysteresis modeling and experimental verification of piezoelectric actuators with multi-delay input

YANG Liu; SHI Shuxian; LI Dongjie

doi:10.37188/OPE.20233110.1501

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Hysteresis modeling and experimental verification of piezoelectric actuators with multi-delay input

Micro\/Nano Technology and Fine Mechanics | 更新时间：2026-09-12

- Hysteresis modeling and experimental verification of piezoelectric actuators with multi-delay input
- Optics and Precision Engineering Vol. 31, Issue 10, Pages: 1501-1508(2023)
- 作者机构：
  
  1.哈尔滨理工大学自动化学院，黑龙江哈尔滨 150080
  2.哈尔滨理工大学黑龙江省复杂智能系统与集成重点实验室，黑龙江哈尔滨 150040
- 作者简介：
- 基金信息：
- DOI：10.37188/OPE.20233110.1501
  CLC： TP394.1;TH691.9
- Received：16 November 2022，
  
  Revised：2022-11-28，
  
  Published：25 May 2023
- 稿件说明：
移动端阅览
杨柳,石树先,李东洁.多延时输入下压电驱动器迟滞建模及实验验证[J].光学精密工程,2023,31(10):1501-1508.

YANG Liu,SHI Shuxian,LI Dongjie.Hysteresis modeling and experimental verification of piezoelectric actuators with multi-delay input[J].Optics and Precision Engineering,2023,31(10):1501-1508.
杨柳,石树先,李东洁.多延时输入下压电驱动器迟滞建模及实验验证[J].光学精密工程,2023,31(10):1501-1508. DOI： 10.37188/OPE.20233110.1501.

YANG Liu,SHI Shuxian,LI Dongjie.Hysteresis modeling and experimental verification of piezoelectric actuators with multi-delay input[J].Optics and Precision Engineering,2023,31(10):1501-1508. DOI： 10.37188/OPE.20233110.1501.

摘要

压电陶瓷驱动器（PEAs）是一种多用于在精密仪器仪表中实现高速、高精度定位的智能驱动器。然而，其自身存在迟滞、蠕变等非线性，尤其是迟滞特性严重影响了压电驱动器的的控制精度。针对迟滞建模中的不对称和速率相关问题，提出一种多延时输入Prandtl-Ishlinskii（MDPI）模型，基于传统PI模型引入了一组延时输入来描述迟滞的率相关特性，随后加入了偏移系数用于改善模型的非对称性。最后，在压电微运动平台上采集了1~100 Hz的1 V正弦信号实验数据，并与率相关PI模型和动态延迟PI模型进行了模型精度对比。实验结果表明，相比另外两个动态PI模型，该模型能够更准确地描述PEAs的动态特性和迟滞特性。在50 Hz和100 Hz下，MDPI模型最大绝对误差（MAE）分别为0.081 5 μm和0.142 9 μm，均方根误差（RMSE）分别为0.009 5 μm，0.011 9 μm。相较二者该模型均方根误差精度分别平均提高了72.46%和64.21%。

Abstract

Piezoelectric actuators （PEAs） are smart drivers that are widely employed in precision instruments to achieve high-speed， high-precision positioning. However， the nonlinear properties of PEAs， such as creep and， particularly， hysteresis， seriously affect their control precision. This paper proposes a multiple delay-input Prandtl–Ishlinskii （MDPI） model to solve the offset and rate-dependent issues encountered during modeling. Notably， the MDPI model has a set of rate-dependent dynamic factors， and offset coefficients are added to improve the asymmetry of the model. Next， experimental data of 1 V sinusoidal signals ranging from 1 to 100 Hz are collected on the piezoelectric micro-motion platform， and the accuracy of the model is compared with that of rate-dependent and dynamic delay PI models. The experimental results indicate that the MDPI model describes the dynamic and hysteresis characteristics of PEAs more accurately than the other two dynamic PI models. For input signal frequencies of 50 and 100 Hz， the maximum absolute errors of the MDPI model are 0.0815 and 0.1429 μm， and the root mean square errors （RMSEs） are 0.009 5 and 0.011 9 μm， respectively. Compared with the RMSE accuracies of the other two models， that of the MDPI model is improved by 72.46% and 64.21%， respectively.

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