High-precise posture measurement for measuring freeform surface with computer generated hologram compensation

LI Wenyan; CHENG Qiang; ZENG Xuefeng; LI Fukun; XUE Donglin; ZHANG Xuejun

doi:10.37188/OPE.20233111.1581

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High-precise posture measurement for measuring freeform surface with computer generated hologram compensation

Modern Applied Optics | 更新时间：2023-07-08

- High-precise posture measurement for measuring freeform surface with computer generated hologram compensation
- Optics and Precision Engineering Vol. 31, Issue 11, Pages: 1581-1592(2023)
- 作者机构：
  
  1.中国科学院长春光学精密机械与物理研究所，吉林长春 130033
  2.中国科学院大学，北京100049
- 作者简介：
- 基金信息：
- DOI：10.37188/OPE.20233111.1581
  CLC： O439
- Received：11 January 2023，
  
  Revised：14 February 2023，
  
  Published：10 June 2023
- 稿件说明：
移动端阅览
李雯研,程强,曾雪锋等.计算全息补偿检测自由曲面的高精度位姿测量[J].光学精密工程,2023,31(11):1581-1592.

LI Wenyan,CHENG Qiang,ZENG Xuefeng,et al.High-precise posture measurement for measuring freeform surface with computer generated hologram compensation[J].Optics and Precision Engineering,2023,31(11):1581-1592.
李雯研,程强,曾雪锋等.计算全息补偿检测自由曲面的高精度位姿测量[J].光学精密工程,2023,31(11):1581-1592. DOI： 10.37188/OPE.20233111.1581.

LI Wenyan,CHENG Qiang,ZENG Xuefeng,et al.High-precise posture measurement for measuring freeform surface with computer generated hologram compensation[J].Optics and Precision Engineering,2023,31(11):1581-1592. DOI： 10.37188/OPE.20233111.1581.

摘要

为实现自由曲面的定位与位姿高精度测量，提出了“光学-机械”基准定位法，建立了位姿测量模型，并对该方法的定位误差和基准选择展开研究。根据三坐标测量机与计算全息提出了“光学-机械”基准定位法。然后，采用球形安装的回射器（Sphere Mounted Retroreflector ，SMR）、猫眼、基准球作为基准，基于波像差理论与视差效应分别建立了3种基准的位姿测量模型，得到了位置误差与基准区域波前像差的函数关系，并对3种位姿测量模型进行对比。最后，对3种基准位姿测量方法进行仿真及实验验证，实测结果与模型的残差结果均小于0.05

，相对误差均小于2.43%，验证了模型的准确性。实验结果表明，当检测距离为1 000 mm时，猫眼法的轴向定位误差为24 μm；基准球法的轴向定位误差为50 μm；SMR靶球法的轴向定位误差为16 μm，

，

方向的定位误差为1 μm，滚转角定位误差为3.26″。SMR靶球法的定位误差最小、检测动态范围最大且检测光学元件的自由度最多，更适用于自由曲面的高精度位姿检测。

Abstract

To realize the high-precision position measurement of freeform surfaces， this paper proposes an optic-mechanical reference positioning method that employs a position measurement model. First， an optical-mechanical reference positioning method based on a coordinate measuring machine and computer-generated holography is proposed. Then， using a spherical mounted retroreflector （SMR） target ball， cat eye， and reference ball as the benchmarks， three benchmark position measurement models are established on the basis of wave aberration theory and parallax effect. The functional relationship between the position error and the wavefront aberration in the reference area is obtained， and the three position measurement models are compared and analyzed. Finally， the three benchmark position measurement methods are simulated and validated via experiments. The residual difference between the measurement results and the model is below 0.05

， and the relative error is below 2.43%， confirming the accuracy of the model. The experimental results indicate that the axial positioning error of the cat-eye method is 24 μm when the measurement distance is 1 000 mm. The axial positioning error of the reference-ball method is 50 μm. The SMR target ball positioning error is 16 μm in the axial direction， 1 μm in the

and

directions， and 3.26″ in clocking. The SMR target ball method has the minimum positioning error， maximum measurement dynamic range， and maximum degree of freedom in detecting optical elements； therefore， it is more suitable for high-precision pose measurement of freeform surfaces.

关键词

Keywords

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