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1.School of Mechanical Engineering, Shandong University, Jinan 250061, China
2.Key Laboratory of High-efficiency and Clean Mechanical Manufacture of the Ministry of Education, Jinan 250061, China
Published:10 June 2023,
Received:10 January 2023,
Revised:01 February 2023,
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张志名,闫鹏.面向纳米栅格扫描的时滞压电微动平台耦合补偿[J].光学精密工程,2023,31(11):1641-1651.
ZHANG Zhiming,YAN Peng.Coupling compensation for nano raster scanning of piezoelectric nano-stages with delays[J].Optics and Precision Engineering,2023,31(11):1641-1651.
张志名,闫鹏.面向纳米栅格扫描的时滞压电微动平台耦合补偿[J].光学精密工程,2023,31(11):1641-1651. DOI: 10.37188/OPE.20233111.1641.
ZHANG Zhiming,YAN Peng.Coupling compensation for nano raster scanning of piezoelectric nano-stages with delays[J].Optics and Precision Engineering,2023,31(11):1641-1651. DOI: 10.37188/OPE.20233111.1641.
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