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Coupling compensation for nano raster scanning of piezoelectric nano-stages with delays
Micro/Nano Technology and Fine Mechanics | 更新时间:2023-07-08
    • Coupling compensation for nano raster scanning of piezoelectric nano-stages with delays

    • Optics and Precision Engineering   Vol. 31, Issue 11, Pages: 1641-1651(2023)
    • DOI:10.37188/OPE.20233111.1641    

      CLC: TP273;TH113
    • Received:10 January 2023

      Revised:01 February 2023

      Published:10 June 2023

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  • ZHANG Zhiming,YAN Peng.Coupling compensation for nano raster scanning of piezoelectric nano-stages with delays[J].Optics and Precision Engineering,2023,31(11):1641-1651. DOI: 10.37188/OPE.20233111.1641.

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