Detection method of large aperture lens based on fringe tracking

AN Qichang; WANG Kun; LIU Xinyue; WU Xiaoxia; LI Hongwen; WANG Baogang; GUO Wei

doi:10.37188/OPE.20233112.1735

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Detection method of large aperture lens based on fringe tracking

Modern Applied Optics | 更新时间：2023-07-17

- Detection method of large aperture lens based on fringe tracking
- Optics and Precision Engineering Vol. 31, Issue 12, Pages: 1735-1740(2023)
- 作者机构：
  
  1.中国科学院长春光学精密机械与物理研究所，吉林长春 130033
  2.中国科学院大学，北京 100039
  3.吉林省智能波前传感与控制重点实验室，吉林长春 130033
  4.中国人民解放军95975部队，甘肃酒泉 732750
- 作者简介：
  
  E-mail： liuxinyue@ciomp.ac.cn
- 基金信息：
- DOI：10.37188/OPE.20233112.1735
  CLC： TP394.1;TH691.9
- Received：03 November 2022，
  
  Revised：17 January 2023，
  
  Published：25 June 2023
- 稿件说明：
移动端阅览
安其昌,王鹍,刘欣悦等.基于条纹传感的大口径透镜检测方法[J].光学精密工程,2023,31(12):1735-1740.

AN Qichang,WANG Kun,LIU Xinyue,et al.Detection method of large aperture lens based on fringe tracking[J].Optics and Precision Engineering,2023,31(12):1735-1740.
安其昌,王鹍,刘欣悦等.基于条纹传感的大口径透镜检测方法[J].光学精密工程,2023,31(12):1735-1740. DOI： 10.37188/OPE.20233112.1735.

AN Qichang,WANG Kun,LIU Xinyue,et al.Detection method of large aperture lens based on fringe tracking[J].Optics and Precision Engineering,2023,31(12):1735-1740. DOI： 10.37188/OPE.20233112.1735.

摘要

为实现大口径透镜组的高质量集成，亟需一套透射波前检测系统，其可实现米级跨度上的微米级精度检测。针对大口径透射波前质量检测难题，采用非窄带干涉与条纹跟踪相结合的方法，获得元件相对倾斜以及支撑结构所引入的系统波前变化。首先，基于光纤互联架构，设计了子孔径分时复用测系统；其次，建立了斜率测量与最终系统波前的映射关系，分析了斜率重建过程对不同空间频率波前的影响；最后，利用桌面实验系统，针对探测原理进行了验证测试，在测试波长1 550 nm时，干涉感知信噪比优于15 dB，测量范围优于5 μm，探测精度优于0.5 μm。本文所提出的方法可实现大口径透镜透射波前大范围、高鲁棒、高精度的检测，具有重要的意义，特别是对于未来大口径大视场望远镜的建设。

Abstract

To achieve high-quality integration of large-aperture lens groups， a transmission wavefront detection system that can achieve micron-level accuracy detection on a meter-scale span is urgently needed. In this study， to solve the problem of large-aperture transmission wavefront quality detection， the relative tilt of components and the change in the system wavefront introduced by the support structure were obtained by combining non-narrowband interference with fringe tracking. First， according to the optical fiber interconnection architecture， a sub-aperture time-sharing multiplexing measurement system was designed. Second， the mapping relationship between the slope measurement and the final system wavefront was established， and the effects of the slope reconstruction process on the wavefront at different spatial frequencies were analyzed. Finally， a desktop experimental system was used to validate the detection principle. At the test wavelength of 1550 nm， the interference-sensing signal-to-noise ratio was >15 dB， the measurement range was better than 5 μm， and the detection accuracy was higher than 0.5 μm. Using the proposed method， the large-aperture lens transmission wavefront can be detected over a wide range， with high robustness and high accuracy； this is of considerable significance for the construction of large-aperture large-field of view telescopes.

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references

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Related Institution

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