Trajectory tracking control for tri-axial fast tool servo using hybrid electromagnetic-piezoelectric actuation

ZHU Zhiyuan; ZHU Zihui; ZHOU Xiaoqin; ZHU Limin; ZHU Zhiwei

doi:10.37188/OPE.20233115.2236

您当前的位置：

首页 >

文章列表页 >

Trajectory tracking control for tri-axial fast tool servo using hybrid electromagnetic-piezoelectric actuation

Micro\/Nano Technology and Fine Mechanics | 更新时间：2026-09-11

- Trajectory tracking control for tri-axial fast tool servo using hybrid electromagnetic-piezoelectric actuation
- Optics and Precision Engineering Vol. 31, Issue 15, Pages: 2236-2247(2023)
- 作者机构：
  
  1.南京理工大学机械工程学院，江苏南京 210094
  2.吉林大学机械与航空航天工程学院，吉林长春 130025
  3.上海交通大学机械与动力工程学院，上海 200240
- 作者简介：
- 基金信息：
- DOI：10.37188/OPE.20233115.2236
  CLC： TG71;TP273
- Received：27 March 2023，
  
  Revised：2023-04-24，
  
  Published：10 August 2023
- 稿件说明：
移动端阅览
朱志远,朱紫辉,周晓勤等.三轴电磁-压电混合驱动快速刀具伺服的轨迹跟踪控制[J].光学精密工程,2023,31(15):2236-2247.

ZHU Zhiyuan,ZHU Zihui,ZHOU Xiaoqin,et al.Trajectory tracking control for tri-axial fast tool servo using hybrid electromagnetic-piezoelectric actuation[J].Optics and Precision Engineering,2023,31(15):2236-2247.
朱志远,朱紫辉,周晓勤等.三轴电磁-压电混合驱动快速刀具伺服的轨迹跟踪控制[J].光学精密工程,2023,31(15):2236-2247. DOI： 10.37188/OPE.20233115.2236.

ZHU Zhiyuan,ZHU Zihui,ZHOU Xiaoqin,et al.Trajectory tracking control for tri-axial fast tool servo using hybrid electromagnetic-piezoelectric actuation[J].Optics and Precision Engineering,2023,31(15):2236-2247. DOI： 10.37188/OPE.20233115.2236.

摘要

三轴快速刀具伺服（Fast Tool Servo， FTS）具有更高的刀具空间运动柔性，逐渐用于复杂光学曲面和微纳结构表面的切削加工。针对所研制电磁-压电混合驱动三轴FTS存在的轴间耦合、高频谐振和迟滞非线性等因素对轨迹跟踪性能的影响，研究综合补偿策略实现三轴空间轨迹的高性能跟踪控制。以陷波滤波器抑制系统高频谐振，以前馈解耦补偿弱化平面轴间耦合；针对法应力电磁驱动和压电驱动的迟滞非线性，提出以线性动力学模型级联Prandtl-Ishlinskii模型描述各轴的动态迟滞特性，并构建无需直接求逆的迟滞前馈补偿模型，实现系统的迟滞非线性补偿。谐波扫频测试结果表明：所采用的陷波滤波器可以很好地消除高频谐振，前馈解耦补偿可将平面

轴间的耦合幅值降低约14 dB。宽频域内迟滞建模结果表明：平面

轴和

轴的动态迟滞建模误差分别小于±2.2%和±1.8%。以PID为主控制器，对宽频谐波（10~100 Hz）的跟踪结果表明：采用综合补偿策略获得各轴的最大跟踪误差约为仅采用逆动力学前馈补偿的25%~50%，进一步对空间螺旋球面轨迹进行了跟踪测试，证明了所构建的综合补偿控制策略的有效性。

Abstract

Recently， tri-axial fast tool servos， which offer higher cutting flexibility， are being applied to the machining of complex optical surfaces. However， the trajectory tracking performance is significantly affected by various factors， including cross-coupling， high-frequency resonance， and hysteresis nonlinearity. To address these issues，

a comprehensive compensation strategy was proposed to achieve high-performance tracking control of spatial trajectories. Specifically， a notch filter was introduced to suppress high-frequency resonance， and feedforward decoupling compensation was employed to weaken the

planar cross-coupling. Furthermore， a Prandtl-Ishlinskii model was cascaded with a dynamic model to describe the dynamic hysteresis for each axis， and a hysteresis feedforward compensation model was constructed without solving the inversion of the hysteresis model. The sweep test results show that the adopted notch filter can eliminate the high-frequency resonance effectively. The feedforward decoupling compensation further reduces the

planar cross-coupling by approximately 14 dB. The wideband hysteresis modeling results indicate that the dynamic hysteresis modeling errors of the

plane actuation and

-axial actuation are less than ±2.2% and ±1.8%， respectively. With proportional-integral-derivative control used for the main controller， the wideband tracking （10-100 Hz） shows that the maximum tracking error for each axis using the comprehensive compensation strategy is only 25% to 50% that when only inverse dynamic feedforward compensation is used. Furthermore， the tracking results for the spatial trajectory demonstrate the effectiveness of the proposed comprehensive compensation control strategy.

关键词

Keywords

references

吴庆玲 . 光学自由曲面快速刀具伺服车削误差的补偿［J］. 光学精密工程， 2015 ， 23 （ 9 ）： 2620 - 2626 . doi: 10.3788/OPE.20152309.2620 http://dx.doi.org/10.3788/OPE.20152309.2620

WU Q L . Error compensation of optical freeform surfaces in fast tool servo diamond turning ［J］. Opt. Precision Eng. ， 2015 ， 23 （ 9 ）： 2620 - 2626 . （in Chinese） . doi: 10.3788/OPE.20152309.2620 http://dx.doi.org/10.3788/OPE.20152309.2620

CHEN Y L ， LI Z W ， CHEN F W ， et al . Development of an optimized three-axis fast tool servo for ultraprecision cutting ［J］. IEEE/ASME Transactions on Mechatronics ， 2022 ， 27 （ 5 ）： 3244 - 3254 . doi: 10.1109/tmech.2021.3109696 http://dx.doi.org/10.1109/tmech.2021.3109696

CHEN L ， NIU Y H ， YANG X ， et al . A novel compliant nanopositioning stage driven by a normal-stressed electromagnetic actuator ［J］. IEEE Transactions on Automation Science and Engineering ， 2022 ， 19 （ 4 ）： 3039 - 3048 . doi: 10.1109/tase.2021.3105683 http://dx.doi.org/10.1109/tase.2021.3105683

闫鹏，李金银 . 压电陶瓷驱动的长行程快刀伺服机构设计［J］. 光学精密工程， 2020 ， 28 （ 2 ）： 390 - 397 .

YAN P ， LI J Y . Design of piezo-actuated long-stroke fast tool servo mechanism ［J］. Opt. Precision Eng. ， 2020 ， 28 （ 2 ）： 390 - 397 . （in Chinese）

TAO Y ， LI Z ， HU P ， et al .. High-accurate cutting forces estimation by machine learning with voice coil motor-driven fast tool servo for micro/nano cutting ［J］. Precision Engineering ， 2023 ， 79 ： 291 - 299 . doi: 10.1016/j.precisioneng.2022.11.014 http://dx.doi.org/10.1016/j.precisioneng.2022.11.014

HUANG W W ， LI L ， ZHU Z ， et al . Modeling， design and control of normal-stressed electromagnetic actuated fast tool servos ［J］. Mechanical Systems and Signal Processing ， 2022 ， 178 ： 109304 . doi: 10.1016/j.ymssp.2022.109304 http://dx.doi.org/10.1016/j.ymssp.2022.109304

LU X D ， TRUMPER D L . Ultrafast tool servos for diamond turning ［J］. CIRP Annals ， 2005 ， 54 （ 1 ）： 383 - 388 . doi: 10.1016/s0007-8506(07)60128-0 http://dx.doi.org/10.1016/s0007-8506(07)60128-0

WU D ， CHEN K . Frequency-domain analysis of nonlinear active disturbance rejection control via the describing function method ［J］. IEEE Transactions on Industrial Electronics ， 2013 ， 60 （ 9 ）： 3906 - 3914 . doi: 10.1109/tie.2012.2203777 http://dx.doi.org/10.1109/tie.2012.2203777

房丰洲，陈晓菲，张效栋，等 . 基于自抗扰控制算法的麦克斯韦快刀伺服控制系统［J］. 纳米技术与精密工程， 2017 ， 15 （ 5 ）： 335 - 341 . doi: 10.13494/j.npe.20160094 http://dx.doi.org/10.13494/j.npe.20160094

FANG F ZH ， CHEN X F ， ZHANG X D ， et al . Development of fast tool servo control system based on maxwell normal force using ADRC algorithm ［J］. Nanotechnology and Precision Engineering ， 2017 ， 15 （ 5 ）： 335 - 341 . （in Chinese） . doi: 10.13494/j.npe.20160094 http://dx.doi.org/10.13494/j.npe.20160094

夏薇，朱紫辉，陈栎，等 . Maxwell电磁力驱动快速刀具伺服系统轨迹跟踪控制［J］. 机械工程学报， 2022 ， 58 （ 3 ）： 259 - 265 . doi: 10.3901/jme.2022.03.259 http://dx.doi.org/10.3901/jme.2022.03.259

XIA W ， ZHU Z H ， CHEN L ， et al . Trajectory tracking control of a fast tool servo system driven by maxwell electromagnetic force ［J］. Journal of Mechanical Engineering ， 2022 ， 58 （ 3 ）： 259 - 265 . （in Chinese） . doi: 10.3901/jme.2022.03.259 http://dx.doi.org/10.3901/jme.2022.03.259

ZHANG X ， LAI L ， ZHANG L ， et al . Hysteresis and magnetic flux leakage of long stroke micro/nanopositioning electromagnetic actuator based on Maxwell normal stress ［J］. Precision Engineering ， 2022 ， 75 ： 1 - 11 . doi: 10.1016/j.precisioneng.2022.01.003 http://dx.doi.org/10.1016/j.precisioneng.2022.01.003

ZHU Z W ， TO S ， ZHU W L ， et al . Optimum design of a piezo-actuated triaxial compliant mechanism for nanocutting ［J］. IEEE Transactions on Industrial Electronics ， 2018 ， 65 （ 8 ）： 6362 - 6371 . doi: 10.1109/tie.2017.2787592 http://dx.doi.org/10.1109/tie.2017.2787592

LI H ， TANG H ， LI J ， et al . Design， fabrication， and testing of a 3-DOF piezo fast tool servo for microstructure machining ［J］. Precision Engineering ， 2021 ， 72 ： 756 - 768 . doi: 10.1016/j.precisioneng.2021.07.015 http://dx.doi.org/10.1016/j.precisioneng.2021.07.015

ZHU Z H ， CHEN L ， NIU Y H ， et al . Triaxial fast tool servo using hybrid electromagnetic–piezoelectric actuation for diamond turning ［J］. IEEE Transactions on Industrial Electronics ， 2022 ， 69 （ 2 ）： 1728 - 1738 . doi: 10.1109/tie.2021.3060635 http://dx.doi.org/10.1109/tie.2021.3060635

YAMAGUCHI T ， HIRATA M ， PANG C K . High-Speed Precision Motion Control ［M］. Boco Raton ： CRC Press ， 2011

门延武，张辉，姜文雪，等 . CMP多区压力定量解耦协同控制［J］. 清华大学学报（自然科学版）， 2015 ， 55 （ 7 ）： 750 - 755 .

MEN Y W ， ZHANG H ， JIANG W X ， et al . Quantitative decoupling cooperative control of CMP multi-zone pressure ［J］. Journal of Tsinghua University （Science and Technology）， 2015 ， 55 （ 7 ）： 750 - 755 . （in Chinese）

GU G Y ， ZHU L M ， SU C Y ， et al . Modeling and control of piezo-actuated nanopositioning stages： a survey ［J］. IEEE Transactions on Automation Science and Engineering ， 2016 ， 13 （ 1 ）： 313 - 332 . doi: 10.1109/tase.2014.2352364 http://dx.doi.org/10.1109/tase.2014.2352364

杨斌堂，赵寅，彭志科，等 . 基于Prandtl-Ishlinskii模型的超磁致伸缩驱动器实时磁滞补偿控制［J］. 光学精密工程， 2013 ， 21 （ 1 ）： 124 - 130 . doi: 10.3788/ope.20132101.0124 http://dx.doi.org/10.3788/ope.20132101.0124

YANG B T ， ZHAO Y ， PENG ZH K ， et al . Real-time compensation control of hysteresis based on Prandtl-Ishlinskii operator for GMA ［J］. Opt. Precision Eng. ， 2013 ， 21 （ 1 ）： 124 - 130 . （in Chinese） . doi: 10.3788/ope.20132101.0124 http://dx.doi.org/10.3788/ope.20132101.0124

RAKOTONDRABE M . Classical Prandtl-Ishlinskii modeling and inverse multiplicative structure to compensate hysteresis in piezoactuators ［C］. 2012 American Control Conference （ACC）. June 27 - 29 ， 2012 . Montreal， QC. IEEE ， 2012 ： 1646 - 1651 .

RAKOTONDRABE M . Bouc-Wen modeling and inverse multiplicative structure to compensate hysteresis nonlinearity in piezoelectric actuators ［J］. IEEE Transactions on Automation Science and Engineering ， 2011 ， 8 （ 2 ）： 428 - 431 . doi: 10.1109/tase.2010.2081979 http://dx.doi.org/10.1109/tase.2010.2081979

Views

1595

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

High-frequency ultrasonic-fast tool servo integrated machining and process verification

Design and test analysis of a compliant precision positioning stage driven by reluctance actuators

Structural design and bandwidth characteristic of a fast steering mirror with large travel range

Feed-forward compensation control of nonlinear friction for high acceleration motion system

Error compensation of optical freeform surfaces in fast tool servo diamond turning

Related Author

ZHU Yan

LIU Bolin

ZHENG Yunxiang

WANG Zheng

WANG Xun

ZHU Limin

LAI Leijie

YIN Xiaoqia

Related Institution

School of Mechanical Science and Engineering， Huazhong University of Science and Technology

School of Mechanical and Automotive Engineering， Shanghai University of Engineering Science

School of Mechanical and Power Engineering， East China University of Science and Technology

State Key Laboratory of Mechanical System and Vibration， School of Mechanical Engineering， Shanghai Jiao Tong University

School of Mechanical Engineering, Shanghai Jiao Tong University

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰