Trajectory tracking control for tri-axial fast tool servo using hybrid electromagnetic-piezoelectric actuation

ZHU Zhiyuan; ZHU Zihui; ZHOU Xiaoqin; ZHU Limin; ZHU Zhiwei

doi:10.37188/OPE.20233115.2236

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Trajectory tracking control for tri-axial fast tool servo using hybrid electromagnetic-piezoelectric actuation

Micro/Nano Technology and Fine Mechanics | 更新时间：2023-08-28

- Trajectory tracking control for tri-axial fast tool servo using hybrid electromagnetic-piezoelectric actuation
- Optics and Precision Engineering Vol. 31, Issue 15, Pages: 2236-2247(2023)
- 作者机构：
  
  1.南京理工大学机械工程学院，江苏南京 210094
  2.吉林大学机械与航空航天工程学院，吉林长春 130025
  3.上海交通大学机械与动力工程学院，上海 200240
- 作者简介：
- 基金信息：
- DOI：10.37188/OPE.20233115.2236
  CLC： TG71;TP273
- Received：27 March 2023，
  
  Revised：24 April 2023，
  
  Published：10 August 2023
- 稿件说明：
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朱志远,朱紫辉,周晓勤等.三轴电磁-压电混合驱动快速刀具伺服的轨迹跟踪控制[J].光学精密工程,2023,31(15):2236-2247.

ZHU Zhiyuan,ZHU Zihui,ZHOU Xiaoqin,et al.Trajectory tracking control for tri-axial fast tool servo using hybrid electromagnetic-piezoelectric actuation[J].Optics and Precision Engineering,2023,31(15):2236-2247.
朱志远,朱紫辉,周晓勤等.三轴电磁-压电混合驱动快速刀具伺服的轨迹跟踪控制[J].光学精密工程,2023,31(15):2236-2247. DOI： 10.37188/OPE.20233115.2236.

ZHU Zhiyuan,ZHU Zihui,ZHOU Xiaoqin,et al.Trajectory tracking control for tri-axial fast tool servo using hybrid electromagnetic-piezoelectric actuation[J].Optics and Precision Engineering,2023,31(15):2236-2247. DOI： 10.37188/OPE.20233115.2236.

摘要

三轴快速刀具伺服（Fast Tool Servo， FTS）具有更高的刀具空间运动柔性，逐渐用于复杂光学曲面和微纳结构表面的切削加工。针对所研制电磁-压电混合驱动三轴FTS存在的轴间耦合、高频谐振和迟滞非线性等因素对轨迹跟踪性能的影响，研究综合补偿策略实现三轴空间轨迹的高性能跟踪控制。以陷波滤波器抑制系统高频谐振，以前馈解耦补偿弱化平面轴间耦合；针对法应力电磁驱动和压电驱动的迟滞非线性，提出以线性动力学模型级联Prandtl-Ishlinskii模型描述各轴的动态迟滞特性，并构建无需直接求逆的迟滞前馈补偿模型，实现系统的迟滞非线性补偿。谐波扫频测试结果表明：所采用的陷波滤波器可以很好地消除高频谐振，前馈解耦补偿可将平面

轴间的耦合幅值降低约14 dB。宽频域内迟滞建模结果表明：平面

轴和

轴的动态迟滞建模误差分别小于±2.2%和±1.8%。以PID为主控制器，对宽频谐波（10~100 Hz）的跟踪结果表明：采用综合补偿策略获得各轴的最大跟踪误差约为仅采用逆动力学前馈补偿的25%~50%，进一步对空间螺旋球面轨迹进行了跟踪测试，证明了所构建的综合补偿控制策略的有效性。

Abstract

Recently， tri-axial fast tool servos， which offer higher cutting flexibility， are being applied to the machining of complex optical surfaces. However， the trajectory tracking performance is significantly affected by various factors， including cross-coupling， high-frequency resonance， and hysteresis nonlinearity. To address these issues， a comprehensive compensation strategy was proposed to achieve high-performance tracking control of spatial trajectories. Specifically， a notch filter was introduced to suppress high-frequency resonance， and feedforward decoupling compensation was employed to weaken the

planar cross-coupling. Furthermore， a Prandtl-Ishlinskii model was cascaded with a dynamic model to describe the dynamic hysteresis for each axis， and a hysteresis feedforward compensation model was constructed without solving the inversion of the hysteresis model. The sweep test results show that the adopted notch filter can eliminate the high-frequency resonance effectively. The feedforward decoupling compensation further reduces the

planar cross-coupling by approximately 14 dB. The wideband hysteresis modeling results indicate that the dynamic hysteresis modeling errors of the

plane actuation and

-axial actuation are less than ±2.2% and ±1.8%， respectively. With proportional-integral-derivative control used for the main controller， the wideband tracking （10-100 Hz） shows that the maximum tracking error for each axis using the comprehensive compensation strategy is only 25% to 50% that when only inverse dynamic feedforward compensation is used. Furthermore， the tracking results for the spatial trajectory demonstrate the effectiveness of the proposed comprehensive compensation control strategy.

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references

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