Topology optimization of electrodes for electroosmotic flow micromixer

SUN Jianwen; ZHANG Jianyu; LI Bowen; DENG Yongbo

doi:10.37188/OPE.20233117.2515

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Topology optimization of electrodes for electroosmotic flow micromixer

Micro\/Nano Technology and Fine Mechanics | 更新时间：2026-09-11

- Topology optimization of electrodes for electroosmotic flow micromixer
- Optics and Precision Engineering Vol. 31, Issue 17, Pages: 2515-2524(2023)
- 作者机构：
  
  1.中国科学院长春光学精密机械与物理研究所，吉林长春 130033
  2.中国科学院大学，北京 100049
- 作者简介：
- 基金信息：
- DOI：10.37188/OPE.20233117.2515
  CLC： O357.1;TH703
- Received：17 February 2023，
  
  Revised：2023-03-23，
  
  Published：10 September 2023
- 稿件说明：
移动端阅览
孙建文,张健宇,李博文等.基于拓扑优化的电渗流微混合器电极[J].光学精密工程,2023,31(17):2515-2524.

SUN Jianwen,ZHANG Jianyu,LI Bowen,et al.Topology optimization of electrodes for electroosmotic flow micromixer[J].Optics and Precision Engineering,2023,31(17):2515-2524.
孙建文,张健宇,李博文等.基于拓扑优化的电渗流微混合器电极[J].光学精密工程,2023,31(17):2515-2524. DOI： 10.37188/OPE.20233117.2515.

SUN Jianwen,ZHANG Jianyu,LI Bowen,et al.Topology optimization of electrodes for electroosmotic flow micromixer[J].Optics and Precision Engineering,2023,31(17):2515-2524. DOI： 10.37188/OPE.20233117.2515.

摘要

电渗是当前芯片实验室设备中微流体常用的驱动方式之一，其中电极版图对控制电渗驱动的外电场起到关键作用。针对电渗流电极版图大多基于尺寸优化和形状优化的方法难以大幅提升微流控器件性能的问题，建立电渗流电极拓扑优化模型，采用滤波方程和阈值投影控制电极结构的特征尺寸，通过连续伴随分析方法获得模型的伴随敏度，进而演化电极版图的结构设计变量，最终实现电渗流电极的拓扑优化。基于上述拓扑优化方法设计电渗流微混合器的电极版图，并对影响微混合器混合效果的因素进行分析。结果表明，电渗流微混合器的混合评价指数达到0.047，能够实现两种不同浓度溶液的完全混合。微混合器良好的混合性能验证了本文提出电渗流电极拓扑优化方法的有效性。

Abstract

Electroosmotic flow is one of the commonly used driving mechanisms for microfluidics in current chip laboratory equipment， and the electrode layout plays an important role in controlling the external electric field driven by electroosmotic flow. At present， the layout of an electroosmotic flow electrode is mostly designed based on size optimization and shape optimization， making it difficult to improve the performance of microfluidic devices. To solve this problem， a topology optimization model of an electroosmotic flow electrode is established. The filter equation and threshold projection are used to control the characteristic size of the electrode structure. The adjoint sensitivity of the model is obtained by a continuous adjoint analysis method， and then the structural design variables of electrode layout are developed. Finally， the topology of an electroosmotic flow electrode is optimized. Based on this topology optimization method， the electrode layout of an electroosmotic flow micromixer was designed， and the factors affecting its mixing effect were analyzed. The results show that the mixing evaluation index of the electroosmotic flow micromixer reaches 0.047， which can completely mix two different concentration solutions. The good mixing performance of the micromixer verifies the effectiveness of the proposed electroosmotic flow method for electrode topology optimization.

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references

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