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Trajectory planning scheme for ultra-precision system
- Optics and Precision Engineering Vol. 31, Issue 17, Pages: 2534-2545(2023)
- 作者机构：
1.中国科学院 微电子研究所，北京 100029
2.中国科学院大学，北京 100049
- 作者简介：
- 基金信息：
DOI：10.37188/OPE.20233117.2534
CLC：
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LI Ailin, LI Jing. Trajectory planning scheme for ultra-precision system. [J]. Optics and Precision Engineering 31(17):2534-2545(2023)
LI Ailin, LI Jing. Trajectory planning scheme for ultra-precision system. [J]. Optics and Precision Engineering 31(17):2534-2545(2023) DOI： 10.37188/OPE.20233117.2534.
摘要
为了提高超精密设备中多自由度工作台的效率和精度，在满足纳米精度要求的同时提高工程调试与集成效率，提出了一种针对多自由度工作台的轨迹规划方案。对前道工艺的应用场景和机电系统能力进行分析描述，聚焦轨迹规划的难点，提出了整定控制参数和确定轨迹动力学约束参数的方法。通过差分进化算法整定反馈控制器参数，再以控制器的实际跟踪效果和应用需求为优化目标，运用蒙特卡洛算法对参考轨迹进行优化迭代。最后与传统工程调试进行了实验对比。实验结果表明：在工作台扫描运动的重复定位精度均达到,,https://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=48088088&type=,https://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=48088086&type=,13.97000027,2.79399991,要求的前提下，本文提出的方案能使跟踪误差快速收敛，调参次数减少约90%。该方案在保证超高运动定位精度的同时能够有效地提高工程调试与集成效率。
Abstract
As equipment used for IC manufacturing must meet a wide range of complicated requirements， improving the efficiency and accuracy of multi-degree-of-freedom motion positioning systems， which are widely used in the design of various stages of IC manufacturing， has become a contentious research topic. Thus， this study proposes a critical trajectory-planning scheme for application in an ultra-precise and multi-motion stage. The goal of the trajectory planning is to control nanometer-level accuracy while improving technical efficiency in fine-tuning. The optimization trajectory model is based on the practical situation and the requirements of the real processes. A differential evolutionary approach is used to modify the controller setting， and a reference trajectory is derived using an iterative Monte Carlo approach based on the actual tracking performance of the controller as the optimization target. Simulations and experiments are performed using a physical system， and the data analysis demonstrates a fast convergence of the tracking errors， with approximately 90% reduction in the level of parameter fine-tuning while maintaining the repeat positioning precision of the stage below ±5 nm/3,σ,. The experimental results indicate that the proposed scheme can enhance the working efficiency of a motion system towards its required accuracy while maintaining a high level of positioning precision.
关键词
超精密系统轨迹规划蒙特卡洛算法跟踪控制多自由度耦合
Keywords
ultra-precision systemtrajectory planningMonte Carlo algorithmservo controlmulti-degree-of-freedom coupling
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