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Trajectory planning scheme for ultra-precision system
Micro/Nano Technology and Fine Mechanics | 更新时间:2023-09-22
    • Trajectory planning scheme for ultra-precision system

    • Optics and Precision Engineering   Vol. 31, Issue 17, Pages: 2534-2545(2023)
    • DOI:10.37188/OPE.20233117.2534    

      CLC: TP273
    • Received:16 January 2023

      Revised:20 February 2023

      Published:10 September 2023

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  • LI Ailin,LI Jing.Trajectory planning scheme for ultra-precision system[J].Optics and Precision Engineering,2023,31(17):2534-2545. DOI: 10.37188/OPE.20233117.2534.

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LI Ailin
LI Jing
XIAO Xiaohui
HE Jianhua
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Related Institution

Institute of Microelectronics of the Chinese Academy of Sciences
School of Power and Mechanical Engineering, Wuhan University
Advanced Light Source Research Center, Wuhan University
Institute of High Energy Physics, Chinese Academy of Sciences
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences
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