Calibration of piezoelectric three-dimensional force sensor considering angle deviation

ZHANG Jun; WANG Yuhe; REN Zongjin; SUN Wenju; CAI Jiale

doi:10.37188/OPE.20233117.2546

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Calibration of piezoelectric three-dimensional force sensor considering angle deviation

Micro/Nano Technology and Fine Mechanics | 更新时间：2023-09-22

- Calibration of piezoelectric three-dimensional force sensor considering angle deviation
- Optics and Precision Engineering Vol. 31, Issue 17, Pages: 2546-2554(2023)
- 作者机构：
  
  1.大连理工大学机械工程学院，辽宁大连 116024
- 作者简介：
- 基金信息：
- DOI：10.37188/OPE.20233117.2546
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ZHANG Jun, WANG Yuhe, REN Zongjin, et al. Calibration of piezoelectric three-dimensional force sensor considering angle deviation. [J]. Optics and Precision Engineering 31(17):2546-2554(2023)
DOI：

ZHANG Jun, WANG Yuhe, REN Zongjin, et al. Calibration of piezoelectric three-dimensional force sensor considering angle deviation. [J]. Optics and Precision Engineering 31(17):2546-2554(2023) DOI： 10.37188/OPE.20233117.2546.

摘要

为实现对压电式三维力传感器的高精度标定，在原标定模型上引入标定角度偏差因素。针对传感器转角、固定面不平与标定力源偏斜因素，开展了标定模型改进、参数获取与解耦效果分析等研究。分析传感器标定中存在的角度偏差，采用千分表与倾角仪进行测量。对未知参数过多问题，建立了合适的目标函数与约束条件，基于优化算法求解参数，实现了分离标定角度偏差的传感器标定。采用两种模型对实验数据解耦，从解耦误差均值和极值角度证明了新模型的有效性。结果表明：相比旧模型，实验数据下新模型大部分方向的解耦误差均值下降了80%左右，极值下降20%~49%。基于此分析了标定角度偏差对于传感器耦合特性的影响，得到各环节偏差引入的耦合比例，部分耦合系数中标定偏差因素占比达到70%以上。研究表明角度偏差对传感器标定的影响不可忽略，应加以控制。

Abstract

As the final step in the fabrication of a force sensor， the sensor is calibrated to obtain its true performance parameters. Therefore， the accuracy of a force sensor is determined by its calibration accuracy. Generally， calibration is an ideal process， but angle deviations can reduce the calibration accuracy. To achieve high-precision calibration of piezoelectric three-dimensional force sensors， a calibration angle-deviation factor is introduced into the original calibration model. For factors such as uneven surface， sensor angle， and deflection of force source， calibration model improvement， parameter acquisition， and decoupling effect analyses are performed. First， the angle-deviation factors in sensor calibration are analyzed. A dial indicator and an inclinometer are used for measurement. Second， considering the unknown parameters， an appropriate objective function and constraint conditions are established. Based on the optimization algorithm， model parameters are solved and sensor calibration to remove calibration angle deviation is realized. Finally， two models are used to decouple the experimental data. The effectiveness of the new model is proven from the perspective of the mean and extreme values of the decoupling error. Results show that compared to the old model， the mean value of decoupling error in most directions decreases by approximately 80%， and the extreme value decreases by 20%-49%， thereby verifying the effectiveness of the proposed method. On this basis， the influence of angle deviation on sensor coupling characteristics is analyzed， and the coupling ratio introduced by each link deviation is obtained. As the calibration angle-deviation factor accounts for over 70% of partial coupling coefficients， the influence of angle deviation cannot be ignored and should be controlled.

关键词

压电式力传感器标定装置维间耦合测量精度

Keywords

piezoelectric force sensorcalibration devicecrosstalkmeasurement accuracy

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