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Full leaf-spring type spatial large-stroke parallel flexure micro-positioning stage and trajectory control
Micro/Nano Technology and Fine Mechanics | 更新时间:2023-09-25
    • Full leaf-spring type spatial large-stroke parallel flexure micro-positioning stage and trajectory control

    • Optics and Precision Engineering   Vol. 31, Issue 18, Pages: 2675-2686(2023)
    • DOI:10.37188/OPE.20233118.2675    

      CLC: TP29
    • Received:03 March 2023

      Revised:11 April 2023

      Published:25 September 2023

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  • CHEN Yunzhuang,LAI Leijie,LI Pengzhi,et al.Full leaf-spring type spatial large-stroke parallel flexure micro-positioning stage and trajectory control[J].Optics and Precision Engineering,2023,31(18):2675-2686. DOI: 10.37188/OPE.20233118.2675.

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Related Institution

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