Magnetic field time-gate displacement sensor based on discrete winding and its error characteristics

CHEN Ziran; ZHANG Hengxiao; HE Zhiying; CHEN Hongyou; YU Haiyou

doi:10.37188/OPE.20233119.2836

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Magnetic field time-gate displacement sensor based on discrete winding and its error characteristics

Micro/Nano Technology and Fine Mechanics | 更新时间：2023-10-12

- Magnetic field time-gate displacement sensor based on discrete winding and its error characteristics
- Optics and Precision Engineering Vol. 31, Issue 19, Pages: 2836-2849(2023)
- 作者机构：
  
  1.重庆理工大学机械检测技术与装备教育部工程研究中心，重庆 400054
  2.中煤科工集团重庆研究院有限公司，重庆 400039
  3.时栅传感及先进检测技术重庆市重点实验室，重庆 400054
- 作者简介：
- 基金信息：
- DOI：10.37188/OPE.20233119.2836
  CLC：
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CHEN Ziran, ZHANG Hengxiao, HE Zhiying, et al. Magnetic field time-gate displacement sensor based on discrete winding and its error characteristics. [J]. Optics and Precision Engineering 31(19):2836-2849(2023)
DOI：

CHEN Ziran, ZHANG Hengxiao, HE Zhiying, et al. Magnetic field time-gate displacement sensor based on discrete winding and its error characteristics. [J]. Optics and Precision Engineering 31(19):2836-2849(2023) DOI： 10.37188/OPE.20233119.2836.

摘要

针对高精度位移传感器难以加工的难题，提出一种基于离散绕组的磁场式时栅位移传感器。通过设计离散激励绕组排布方式与感应绕组的形状控制感应位移信号的变化规律，通过组合测量方式实现精密位移测量。通过理论建模、仿真分析与实验验证揭示了激励信号误差和安装偏差对传感器测量精度的影响规律。实验结果表明：两路激励信号的幅值不等和安装偏差都会在对极内测量精度中直接引入直流分量误差和2次谐波误差，其中2次谐波误差是误差的主要成分。安装偏差越大，2次谐波误差越大，动尺沿,Z,轴偏摆姿态对测量精度的影响最大，沿,Y,轴翻转姿态引入的误差次之，沿,X,轴俯仰姿态引入的误差最小。误差修正后传感器在144 mm的测量范围内，测量误差峰峰值为4.5 μm，分辨力为0.15 μm。通过毫米级尺寸的激励和感应绕组实现微米级精度测量，可显著降低传感器的制造难度，具有重要的工程应用价值。

Abstract

Addressing the challenges in the manufacturing of high-precision displacement sensors， a magnetic-field time-gate displacement sensor based on discrete windings was proposed. Through a specific arrangement of discrete exciting windings and valid shape of the discrete inducing windings， the change law of induced displacement signals was controlled. High-precision displacement was achieved using a combined measurement method. Furthermore， the influence of errors in exciting signals and the installation errors of the sensor on the measurement precision was analyzed via theoretical modeling， simulated analysis， and experimental verification. The experiment results showed that the DC error and 2nd harmonic error were introduced directly within the pitch by the amplitude errors between the two excitation signals and installation errors， with the 2nd harmonic error being the primary contributor to the measurement errors. As installation errors increased， the 2nd harmonic error also increased. The most significant impact on the measurement error was found to be the deflection error along the ,Z, axis， followed by the flip error along the ,Y, axis， and the least impactful was the tilt error along the ,X, axis. After error correction was applied， the peak-to-peak value of the measurement error was found to be 4.5 μm within 144 mm， and the resolution was determined to be 0.15 μm. The primary feature of the method proposed is that discrete exciting windings and inducing windings on a millimeter scale were used to achieve measurement precision on a micrometer scale. This approach was shown to significantly reduce the manufacturing challenges of the displacement sensor， providing academic value and practical value.

关键词

直线位移离散绕组组合测量时栅传感器误差分析

Keywords

linear displacementdiscrete windingscombined measurementtime-gating sensorserror analysis

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