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Real-time spatial error measurement of two-dimensional linear module
Micro/Nano Technology and Fine Mechanics | 更新时间:2023-11-16
    • Real-time spatial error measurement of two-dimensional linear module

    • Optics and Precision Engineering   Vol. 31, Issue 21, Pages: 3111-3124(2023)
    • DOI:10.37188/OPE.20233121.3111    

      CLC: TH161.2
    • Received:27 February 2023

      Revised:04 April 2023

      Published:10 November 2023

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  • LOU Zhifeng,ZHANG Hanping,ZHOU Jingjie,et al.Real-time spatial error measurement of two-dimensional linear module[J].Optics and Precision Engineering,2023,31(21):3111-3124. DOI: 10.37188/OPE.20233121.3111.

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