Real-time spatial error measurement of two-dimensional linear module

LOU Zhifeng; ZHANG Hanping; ZHOU Jingjie; ZHANG Jiyun; QIAN Jun; FAN Guangchao

doi:10.37188/OPE.20233121.3111

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Real-time spatial error measurement of two-dimensional linear module

Micro/Nano Technology and Fine Mechanics | 更新时间：2023-11-16

- Real-time spatial error measurement of two-dimensional linear module
- Optics and Precision Engineering Vol. 31, Issue 21, Pages: 3111-3124(2023)
- 作者机构：
  
  1.大连理工大学机械工程学院，辽宁大连 116024
  2.大连理工高邮研究院有限公司，江苏高邮 225600
- 作者简介：
  
  E-mail： 18437952875@163.com
- 基金信息：
- DOI：10.37188/OPE.20233121.3111
  CLC：
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娄志峰,张汉平,周竞杰等.二维线性模组空间运动误差实时测量[J].光学精密工程,2023,31(21):3111-3124.

LOU Zhifeng,ZHANG Hanping,ZHOU Jingjie,et al.Real-time spatial error measurement of two-dimensional linear module[J].Optics and Precision Engineering,2023,31(21):3111-3124.
娄志峰,张汉平,周竞杰等.二维线性模组空间运动误差实时测量[J].光学精密工程,2023,31(21):3111-3124. DOI： 10.37188/OPE.20233121.3111.

LOU Zhifeng,ZHANG Hanping,ZHOU Jingjie,et al.Real-time spatial error measurement of two-dimensional linear module[J].Optics and Precision Engineering,2023,31(21):3111-3124. DOI： 10.37188/OPE.20233121.3111.

摘要

为实时检测二维线性模组的运动误差，搭建了误差实时测量系统。该系统由四自由度运动误差测量模块、滚动角误差测量模块和线性光栅尺组成，实现单轴六自由度运动误差测量。基于齐次坐标转换矩阵（Homogeneous Transformation Matrix，HTM）原理构建二维模组的空间误差模型，对功能点的实际空间位置进行表示；完成测量系统标定实验，并基于阿贝-布莱恩原则处理实验数据完成比对实验。最终，测量系统的定位误差、直线度误差和角度误差测量精度分别达到±1.2 μm，±1.3 μm和±1''，并根据空间误差模型分析二维线性模组,XZ,平面对角线位置的测量误差。结果表明，使用二维线性模组空间误差模型求解后，,XZ,平面对角线位置的测量误差由68 μm降至13 μm，证明采用该系统进行线性模组误差测量是有效的；此外，因为加载状态下二维线性模组各位置的运动误差会改变，为验证测量系统能够实时测量出线性模组的空间误差变化，在,Z,轴滑块上加装质量为2 kg的标准砝码进行对照实验。结果显示，在使用二维线性模组空间误差模型求解后，,XZ,平面对角线位置的测量误差由56 μm降至14 μm。

Abstract

A real-time error measurement system was developed to measure the motion error of a two-dimensional linear module. The system consisted of a four-degree-of-freedom motion error measurement module （for measuring the horizontal straightness， vertical straightness， pitch angle， and yaw angle errors）， roll angle error measurement module （for measuring the roll angle error）， and linear grating ruler （for measuring the axial positioning error）； thus， it measured six degrees of freedom motion errors in a single axis. The principle of the homogeneous transformation matrix （HTM）， was used to construct a spatial error model for the two-dimensional module to represent the actual spatial positions of functional points. The calibration experiments of the measurement system were performed， and the experimental data were processed based on the Abbe-Bryan principle to complete the comparison experiment. Finally， the positioning， straightness， and measurement accuracies of angular errors reach ±1.2 μm， ±1.3 μm， and ±1''， respectively. The measurement error of the diagonal position in the ,XZ, plane of the two-dimensional linear module was analyzed based on the proposed spatial error model. The results indicate that the measurement error of the diagonal position in the ,XZ, plane decreases from 68 μm to 13 μm after using the two-dimensional linear module spatial error model. In addition， because the motion errors of the two-dimensional linear module at different positions changes under loading， a comparative experiment was conducted by adding a standard weight of 2 kg to the ,Z,-axis slider to verify the measurement system could capture real-time spatial error variations of the linear module. The results show that the measurement error of the diagonal position in the ,XZ, plane decreases from 56 μm to 14 μm after using the two-dimensional linear module spatial error model.

关键词

误差测量系统二维线性模组空间误差模型实时测量

Keywords

error measurement systemtwo-dimensional linear modulespatial error modelreal-time measurement

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