Low-temperature direct writing fabrication of flexible humidity sensors

KANG Guoyi; ZHONG Yisheng; JIANG Jiaxin; DU Xianruo; ZHENG Gaofeng

doi:10.37188/OPE.20233122.3279

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Low-temperature direct writing fabrication of flexible humidity sensors

Micro/Nano Technology and Fine Mechanics | 更新时间：2023-11-28

- Low-temperature direct writing fabrication of flexible humidity sensors
- Optics and Precision Engineering Vol. 31, Issue 22, Pages: 3279-3288(2023)
- 作者机构：
  
  1.厦门大学仪器与电气系，福建厦门 361000
  2.厦门理工学院机械与汽车工程学院，福建厦门 361000
- 作者简介：
- 基金信息：
- DOI：10.37188/OPE.20233122.3279
  CLC：
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康国毅,钟易晟,姜佳昕等.柔性湿度传感器低温直写制备[J].光学精密工程,2023,31(22):3279-3288.

KANG Guoyi,ZHONG Yisheng,JIANG Jiaxin,et al.Low-temperature direct writing fabrication of flexible humidity sensors[J].Optics and Precision Engineering,2023,31(22):3279-3288.
康国毅,钟易晟,姜佳昕等.柔性湿度传感器低温直写制备[J].光学精密工程,2023,31(22):3279-3288. DOI： 10.37188/OPE.20233122.3279.

KANG Guoyi,ZHONG Yisheng,JIANG Jiaxin,et al.Low-temperature direct writing fabrication of flexible humidity sensors[J].Optics and Precision Engineering,2023,31(22):3279-3288. DOI： 10.37188/OPE.20233122.3279.

摘要

三维导电结构的低温、高结合力直写喷印是柔性电子复合器件制造应用所面临的挑战。本文基于银氨络合机理制备出可用于三维导电结构成型的无颗粒直写溶液，克服了金属颗粒团聚的问题，做到了长期保存。50 ℃低温烧结条件下，银氨络合溶液制备的导电纤维与银纳米颗粒溶液制备的导电纤维相比导电性能优异，电阻低至365 Ω/mm。银氨络合溶液直写制备的纤维结构与柔性基底之间有着强附着性，并具备良好的自堆叠特性，可以通过调节纤维堆叠层数在10层到50层变化，控制导电纤维的电阻在6.7~34.1 Ω/mm范围内改变。在不同饱和盐溶液建立的湿度环境下，对基于银氨络合溶液设计的湿度传感器进行测试，传感器展现出良好的湿度响应性能，迟滞低至3.2%，同时在湿度循环变化下实时响应效果优良。无颗粒直写溶液在制备柔性电子产品方面有着可观的前景，并且在运动检测和健康管理等领域有广泛的应用。

Abstract

The low-temperature， high-bonding direct writing of three-dimensional conductive structures poses a challenge to the manufacturing of flexible electronic composite devices. Based on the silver-ammonia complexation mechanism， a particle-free direct writing solution suitable for forming three-dimensional conductive structures has been developed in this study. The problem of metal particle aggregation was overcome， achieving long-term stability. Under low-temperature sintering conditions at 50 °C， the conductive fibers prepared using the silver-ammonia complex solution exhibit excellent conductivity， with resistance as low as 365 Ω/mm， surpassing those made with silver nanoparticle solutions. The fiber structures produced using the silver-ammonia complex solution have strong adhesion to flexible substrates and possess good self-stacking characteristics. By adjusting the number of fiber stacking layers from 10 to 50， the resistance of the conductive fibers can be controlled within the 6.7-34.1 Ω/mm range. A humidity sensor designed based on the silver-ammonia complex solution was tested in different saturated salt solutions to establish humidity environments. The sensor demonstrated excellent humidity responsiveness， with hysteresis as low as 3.2%， and exhibited ideal real-time response even under high humidity conditions. The particle-free direct writing solution holds promising prospects in the fabrication of flexible electronic products and finds wide applications in fields such as motion detection and health management.

关键词

电纺直写银氨络合低温烧结湿度传感器

Keywords

electrohydrodynamic direct writingsilver ammonia complexationlow temperature sinteringhumidity sensor

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