您当前的位置：
首页 >
文章列表页 >
Micron-level processing technology of microlens array （MLA） photolithography based on convolutional neural network
Micro/Nano Technology and Fine Mechanics | 更新时间：2024-01-13

    • Micron-level processing technology of microlens array （MLA） photolithography based on convolutional neural network

    • “In the MLA exposure process, a circular pattern is designed and the Yolov5 model is introduced to quickly determine the exposure quality, analyze parameters such as photoresist thickness and line energy density, and provide a basis for process optimization.”
    • Optics and Precision Engineering   Vol. 32, Issue 1, Pages: 43-52(2024)

    • DOI：10.37188/OPE.20243201.0043    

      CLC： TN248;TH391.41

    • Received：15 August 2023，

      Revised：11 September 2023，

      Published：10 January 2024

    移动端阅览

  • YAO Yuchao,ZHOU Rui,YAN Xing,et al.Micron-level processing technology of microlens array （MLA） photolithography based on convolutional neural network[J].Optics and Precision Engineering,2024,32(01):43-52. DOI： 10.37188/OPE.20243201.0043.

  •  
  •  

0

Views

572

下载量

0

CSCD

Alert me when the article has been cited
提交
Tools
Download
Export Citation
Share
Add to favorites
Add to my album

Related Articles

Polarized image feature fusion in power inspection
Remote sensing object detection algorithm based on ultra fusion residual marching geometric perception
End-to-end recognition of nighttime wildlife based on semi-supervised learning
A self correcting low-light object detection method based on pyramid edge enhancement
Integrated 2D-3D LiDAR-vision fusion vehicle speed estimation based on image frustum

Related Author

NI Mengyao
PENG Yuanlong
HU Shang
YAN Longchuan
ZHENG Jinkun
CAO Danhua
BAI Chenshuai
BAI Xiaofeng

Related Institution

State Grid JiangXi Electric Power Supply Co
State Grid Information & Telecommunication Branch
School of Optical and Electronic Information， Huazhong University of Science and Technology
School of Electronic and Information Engineering， Lanzhou Jiaotong University
Beijing Institute of Space Mechanics & Electricity
0