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Study of a consistent assembly system for AFM probes based on beam deflection method
Modern Applied Optics | 更新时间：2026-09-11

    • Study of a consistent assembly system for AFM probes based on beam deflection method

    • Optics and Precision Engineering   Vol. 32, Issue 2, Pages: 137-147(2024)

    • DOI：10.37188/OPE.20243202.0137    

      CLC： TH73

    • Received：10 May 2023，

      Revised：2023-07-04，

      Published：25 January 2024

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  • ZHANG Baoliang,LIANG Wenfeng,YANG Tie,et al.Study of a consistent assembly system for AFM probes based on beam deflection method[J].Optics and Precision Engineering,2024,32(02):137-147.

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