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Study of a consistent assembly system for AFM probes based on beam deflection method
Modern Applied Optics | 更新时间:2024-02-01
    • Study of a consistent assembly system for AFM probes based on beam deflection method

    • Technology news report: An innovative research on atomic force microscopy (AFM) system has achieved a breakthrough. This study achieved consistency with the original optical path position after replacing the probe by precisely controlling the assembly position of the probe and probe clamp, eliminating the tedious optical path adjustment steps. This system uses the beam deflection method to monitor the position and deflection of the probe, and utilizes a high-precision displacement and angle adjustment platform for precise adjustment. Experimental verification shows that the average positional accuracy of the assembled probe is close to 1.1 µ m, and replacing the consistency probe only takes 8 seconds. This achievement not only simplifies the operation of recalibrating the optical path in AFM systems, but also lays a solid foundation for improving the operation and measurement performance of industrial metrology AFM. This innovative research has opened up new directions for the development of AFM field, which is expected to promote the progress and application expansion of related technologies.
    • Optics and Precision Engineering   Vol. 32, Issue 2, Pages: 137-147(2024)
    • DOI:10.37188/OPE.20243202.0137    

      CLC: TH73
    • Received:10 May 2023

      Revised:04 July 2023

      Published:25 January 2024

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  • ZHANG Baoliang,LIANG Wenfeng,YANG Tie,et al.Study of a consistent assembly system for AFM probes based on beam deflection method[J].Optics and Precision Engineering,2024,32(02):137-147. DOI: 10.37188/OPE.20243202.0137.

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