CHENG Ming,ZHAO Dongxu,WANG Yunpeng,et al.Process development of small size copper-plated InP wafer with 8-inch CMP equipment[J].Optics and Precision Engineering,2024,32(03):392-400.
CHENG Ming,ZHAO Dongxu,WANG Yunpeng,et al.Process development of small size copper-plated InP wafer with 8-inch CMP equipment[J].Optics and Precision Engineering,2024,32(03):392-400. DOI: 10.37188/OPE.20243203.0392.
Process development of small size copper-plated InP wafer with 8-inch CMP equipment