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Research developments of extreme ultra-violet multilayers for 40-90 nm
Modern Applied Optics | 更新时间：2026-09-11

    • Research developments of extreme ultra-violet multilayers for 40-90 nm

    • Optics and Precision Engineering   Vol. 32, Issue 9, Pages: 1293-1306(2024)

    • DOI：10.37188/OPE.20243209.1293    

      CLC： TN405;TN23

    • Received：17 April 2024，

      Revised：2024-04-30，

      Published：10 May 2024

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  • LAI Bo,JIANG Li,Qi Runze,et al.Research developments of extreme ultra-violet multilayers for 40-90 nm[J].Optics and Precision Engineering,2024,32(09):1293-1306.

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