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Research developments of extreme ultra-violet multilayers for 40-90 nm
Modern Applied Optics | 更新时间：2024-05-18
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    • Research developments of extreme ultra-violet multilayers for 40-90 nm

    • “科技新闻播报：极紫外多层膜反射镜在多个科学技术领域如光刻、天体物理等领域发挥关键作用。专家深入研究了40~90nm波段多层膜，探索了Mg基、Sc基等材料的最佳反射率和带宽，验证了多层膜的时间稳定性，为多层膜制备提供了技术指导，为相关科学研究与应用提供了有力支撑。”
      ”
    • Optics and Precision Engineering   Vol. 32, Issue 9, Pages: 1293-1306(2024)

    • DOI：10.37188/OPE.20243209.1293    

      CLC： TN405;TN23

    • Published：10 May 2024，

      Received：17 April 2024，

      Revised：30 April 2024，

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  • LAI Bo,JIANG Li,Qi Runze,et al.Research developments of extreme ultra-violet multilayers for 40-90 nm[J].Optics and Precision Engineering,2024,32(09):1293-1306. DOI： 10.37188/OPE.20243209.1293.

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WANG Zhanshan
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National Synchrotron Radiation Laboratory, University of Science and Technology of China
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