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Laser confocal interference surface rapid and high-precision automatic measurement
Modern Applied Optics | 更新时间:2024-05-18
    • Laser confocal interference surface rapid and high-precision automatic measurement

    • Technology media news: Researchers have proposed a fast and high-precision automatic measurement method for laser confocal interference surface shape. This method achieves high-precision positioning of the measured object through confocal precise focusing and five dimensional automatic adjustment frame technology. At the same time, Zernike fitting technology is used to reduce errors and achieve zero stripe adjustment. The experiment shows that this method has high measurement accuracy and fast speed, providing an effective means for fast and high-precision measurement of interference surface shape, which will strongly promote the technological development in related fields.
    • Optics and Precision Engineering   Vol. 32, Issue 9, Pages: 1320-1329(2024)
    • DOI:10.37188/OPE.20243209.1320    

      CLC: TH741;TP394.1
    • Received:21 November 2023

      Revised:02 January 2024

      Published:10 May 2024

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  • ZHAO Jiahao,YANG Shuai,YANG Zheng,et al.Laser confocal interference surface rapid and high-precision automatic measurement[J].Optics and Precision Engineering,2024,32(09):1320-1329. DOI: 10.37188/OPE.20243209.1320.

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