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Laser confocal interference surface rapid and high-precision automatic measurement
Modern Applied Optics | 更新时间：2024-05-18
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    • Laser confocal interference surface rapid and high-precision automatic measurement

    • “科技媒体讯，研究人员提出了激光共焦干涉面形快速高精度自动测量方法。该方法通过共焦精密定焦和五维自动调整架技术，实现了被测件的高精度定位。同时，利用Zernike拟合技术减小误差，实现零条纹调整。实验表明，该方法测量精度高、速度快，为干涉面形的快速高精度测量提供了有效手段，将有力推动相关领域的技术发展。”
      ”
    • Optics and Precision Engineering   Vol. 32, Issue 9, Pages: 1320-1329(2024)

    • DOI：10.37188/OPE.20243209.1320    

      CLC： TH741;TP394.1

    • Published：10 May 2024，

      Received：21 November 2023，

      Revised：02 January 2024，

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  • ZHAO Jiahao,YANG Shuai,YANG Zheng,et al.Laser confocal interference surface rapid and high-precision automatic measurement[J].Optics and Precision Engineering,2024,32(09):1320-1329. DOI： 10.37188/OPE.20243209.1320.

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